To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening po
To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
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1. A gas purge device to be used for a load port apparatus, the load port apparatus comprising: a side base that defines a first mini-environment; anda door capable of closing an opening portion of the side base,the door being configured to hold a lid of a sealed container for containing an object t
1. A gas purge device to be used for a load port apparatus, the load port apparatus comprising: a side base that defines a first mini-environment; anda door capable of closing an opening portion of the side base,the door being configured to hold a lid of a sealed container for containing an object to be contained, and to open and close the lid of the sealed container so that the object to be contained is insertable and removable into/from the sealed container,the gas purge device comprising:a cover member arranged in the first mini-environment in surrounding the opening portion, the cover member defining a second mini-environment in the first mini-environment;a curtain nozzle arranged inside of the second mini-environment at a position above the opening portion, for supplying a purge gas into the second mini-environment;a pair of purge nozzles arranged inside of the second mini-environment at both side portions of the opening portion so as to be capable of supplying the purge gas into the sealed container via the opening portion;a gas supply pipe extending toward the curtain nozzle, for supplying the purge gas to each of the pair of purge nozzles from a different direction from the extending direction of the gas supply pipe, and for supplying the purge gas to an internal space of the curtain nozzle by being connected to the internal space of the curtain nozzle at an end portion in the extending direction of the gas supply pipe; anda conductance adjusting unit arranged at the end portion of the gas supply pipe connected to the internal space of the curtain nozzle, for adjusting conductance at the end portion at the time of supplying the purge gas to the internal space of the curtain nozzle. 2. A gas purge device according to claim 1, wherein the cover member comprises a cover member opening portion that enables an operation of inserting and removing the object to be contained,wherein the curtain nozzle supplies the purge gas, with respect to the second mini-environment defined between the opening portion and the cover member, onto a plane formed by intersecting the opening portion and the cover member, andwherein the each of the pair of purge nozzles extends along a side edge of the opening portion in parallel to the gas supply pipe. 3. A gas purge device according to claim 1, wherein the curtain nozzle comprises a curtain filter, and the purge gas is supplied through an intermediation of the curtain filter, andwherein the each of the pair of purge nozzles comprises a purge nozzle filter, and the purge gas is supplied into the sealed container through an intermediation of the purge nozzle filter. 4. A gas purge device according to claim 1, wherein the curtain nozzle comprises:a first curtain chamber and a second curtain chamber arranged in a purge gas supplying order, the first curtain chamber and the second curtain chamber serving as the internal space of the curtain nozzle; anda curtain chamber filter arranged between the first curtain chamber and the second curtain chamber, the curtain chamber filter being capable of generating a pressure difference between the first curtain chamber and the second curtain chamber, andwherein the purge gas is supplied from the first curtain chamber to the second curtain chamber through an intermediation of the curtain chamber filter. 5. A gas purge device according to claim 1, wherein the each of the pair of purge nozzles comprises:a first purge nozzle chamber and a second purge nozzle chamber arranged in a purge gas supplying order; anda purge nozzle chamber filter arranged between the first purge nozzle chamber and the second purge nozzle chamber, the purge nozzle chamber filter being capable of generating a pressure difference between the first purge nozzle chamber and the second purge nozzle chamber, andwherein the purge gas is supplied from the first purge nozzle chamber to the second purge nozzle chamber through an intermediation of the purge nozzle chamber filter. 6. A gas purge device according to claim 3, wherein the curtain nozzle comprises:a first curtain chamber and a second curtain chamber arranged in a purge gas supplying order, the first curtain chamber and the second curtain chamber serving as the internal space of the curtain nozzle; anda curtain chamber filter arranged between the first curtain chamber and the second curtain chamber, the curtain chamber filter being capable of generating a pressure difference between the first curtain chamber and the second curtain chamber,wherein the purge gas is supplied from the first curtain chamber to the second curtain chamber through an intermediation of the curtain chamber filter,wherein the each of the pair of purge nozzles comprises:a first purge nozzle chamber and a second purge nozzle chamber arranged in a purge gas supplying order; anda purge nozzle chamber filter arranged between the first purge nozzle chamber and the second purge nozzle chamber, the purge nozzle chamber filter being capable of generating a pressure difference between the first purge nozzle chamber and the second purge nozzle chamber,wherein the purge gas is supplied from the first purge nozzle chamber to the second purge nozzle chamber through an intermediation of the purge nozzle chamber filter, andwherein at least one of a set of the curtain filter and the curtain chamber filter and a set of the purge nozzle filter and the purge nozzle chamber filter has a difference in degree of pressure loss. 7. A gas purge device according to claim 1, wherein the each of the pair of purge nozzles comprises a purge nozzle chamber capable of generating a pressure difference between the purge nozzle chamber and the second mini-environment through an intermediation of a purge nozzle filter, andwherein the purge gas is supplied from the gas supply pipe to the purge nozzle chamber via communication passages arranged at least at two positions on an upstream side and a downstream side in a case of supplying the purge gas to the gas supply pipe. 8. A gas purge device according to claim 1, wherein the each of the pair of purge nozzles comprises a flow control portion that defines a discharge direction of the purge gas at the time of discharging the purge gas. 9. A load port apparatus, comprising: a side base that defines a mini-environment;a door capable of closing an opening portion of the side base,the door being configured to hold a lid of a sealed container for containing an object to be contained, and to open and close the lid of the sealed container so that the object to be contained is insertable and removable into/from the sealed container;a door drive mechanism for supporting the side base, and the door, and for causing the door to open and close the opening portion;a mount base arranged on an outer side of the opening portion, on which the sealed container is mountable, the mount base being configured to align the sealed container and the opening portion with each other; andthe gas purge device according to claim 1.
Miyajima, Toshihiko; Suzuki, Hitoshi; Igarashi, Hiroshi, Enclosed container lid opening/closing system and enclosed container lid opening/closing method.
Larisch, Michael; Beck, Ulrich; Walser, Michael, Adapter tool configured to be attached to a loadport of a wafer handling system and wafer handling system with such an adapter tool.
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