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Arrangement for identifying uncontrolled events at the process module level and methods thereof

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05B-011/01
  • G06F-019/00
  • G06F-009/50
  • G05B-019/418
  • G06F-011/20
출원번호 US-0555674 (2009-09-08)
등록번호 US-8983631 (2015-03-17)
발명자 / 주소
  • Huang, Chung Ho
  • Venugopal, Vijayakumar C.
  • Lam, Connie
  • Podlesnik, Dragan
출원인 / 주소
  • Lam Research Corporation
인용정보 피인용 횟수 : 0  인용 특허 : 88

초록

A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors c

대표청구항

1. A process-level troubleshooting architecture configured to facilitate substrate processing in a plasma processing system, comprising: a process module controller configured to control operation of the plasma processing system, the process module controller further configured to collect and provid

이 특허에 인용된 특허 (88)

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