Apparatus for aligning dispenser using alignment plate and dispenser alignment system
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B05C-011/00
H01J-009/00
G02F-001/1337
G02F-001/1339
B05C-011/10
B05C-013/02
C23C-016/52
B05D-005/06
B29C-065/00
B05B-012/12
G02F-001/1333
출원번호
US-0585302
(2009-09-10)
등록번호
US-9004005
(2015-04-14)
우선권정보
KR-10-2003-0089854 (2003-12-10)
발명자
/ 주소
Jung, Sung-Su
Kwak, Yong-Keun
출원인 / 주소
LG Display Co., Ltd.
대리인 / 주소
McKenna Long & Aldridge LLP
인용정보
피인용 횟수 :
0인용 특허 :
68
초록▼
An apparatus for aligning a dispenser includes a table having a first alignment mark, an alignment plate provided along at least one side of the table, at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second al
An apparatus for aligning a dispenser includes a table having a first alignment mark, an alignment plate provided along at least one side of the table, at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark, a first image camera provided along a side of the syringe and detecting an image of the second alignment mark, a second image camera detecting an image of the first alignment mark, and an alignment control unit aligning the image of the second alignment mark and a first reference position, and aligning an image of the first alignment mark and a second reference position.
대표청구항▼
1. An apparatus for aligning a dispenser, comprising: a table having a top surface on which a substrate is loaded, a bottom surface below the top surface, and outer lateral surfaces between the top surface and the bottom surface, a first alignment mark being formed on the top surface of the table;an
1. An apparatus for aligning a dispenser, comprising: a table having a top surface on which a substrate is loaded, a bottom surface below the top surface, and outer lateral surfaces between the top surface and the bottom surface, a first alignment mark being formed on the top surface of the table;an alignment plate provided along at least one outer lateral surface of the table, the alignment plate having a top surface, a bottom surface, and lateral surfaces between the top surface and the bottom surface;at least one syringe supplying a dispensing material to the alignment plate through a nozzle provided at one end portion thereof to form a second alignment mark on the top surface of the alignment plate by the dispensing material;a first image camera provided along a side of the syringe and detecting an image of the second alignment mark;a second image camera detecting an image of the first alignment mark; andan alignment control unit is configured to align the image of the second alignment mark and a first reference position, and aligning the image of the first alignment mark and a second reference position, wherein said alignment plate is disposed at a side of the substrate loaded on the table,wherein one of the lateral surfaces of the alignment plate is contacted with one of the outer lateral surfaces of the table so that the top surface of the alignment plate and a top surface of the substrate loaded on the table are coplanar. 2. The apparatus according to claim 1, wherein the first alignment mark is engraved into the table. 3. The apparatus according to claim 1, wherein the first alignment mark is formed of light reflecting material. 4. The apparatus according to claim 1, wherein the first alignment mark includes aluminum oxide. 5. The apparatus according to claim 1, wherein the first and second alignment marks have horizontal and vertical patterns. 6. The apparatus according to claim 1, wherein the alignment plate includes glass having an area smaller than an area of the table. 7. The apparatus according to claim 1, wherein the alignment control unit is configured to align the image of the first image camera and the first reference position by moving the table. 8. The apparatus according to claim 1, wherein the alignment control unit is configured to align the image of the second image camera and the second reference position by moving the second image camera. 9. The apparatus according to claim 1, wherein the alignment control unit comprises: a first display part is configured to display the image of the second alignment mark detected by the first image camera and the first reference position;a second display part is configured to display the image of the first alignment mark detected by the second image camera and the second reference position; anda control unit is configured to drive the table along at least one of X- and Y-directions to align the image of the second alignment mark and the first reference position, and drive the second image camera along at least one of the X- and Y-directions to align the image of the first alignment mark and the second reference position. 10. The apparatus according to claim 1, wherein the substrate is a liquid crystal display panel. 11. The apparatus according to the claim 1, wherein an area of the alignment plate is less than an area of the substrate. 12. A dispenser alignment system, comprising: an alignment plate provided along at least one side of a table, the table having a first alignment mark and the alignment plate having a second alignment mark formed by a dispensing material, the table having a top surface on which a substrate is loaded, a bottom surface below the top surface, and outer lateral surfaces between the top surface and the bottom surface, the alignment plate having a top surface, a bottom surface, and lateral surfaces between the top surface and the bottom surface;a first image camera detecting an image of the second alignment mark;a second image camera detecting an image of the first alignment mark; andan alignment control unit is configured to align the image of the second alignment mark and a first reference position, and aligning an image of the first alignment mark and a second reference position, wherein said alignment plate is disposed at a side of the substrate loaded on the table, wherein one of the lateral surfaces of the alignment plate is contacted with one of the outer lateral surfaces of the table so that the top surface of the alignment plate and a top surface of the substrate loaded on the table are coplanar. 13. The system according to claim 12, wherein the alignment control unit is configured to move the table to align the image of the second reference mark and the first reference position. 14. The apparatus according to claim 12, wherein the alignment control unit is configured to move the second image camera to align the image of the first alignment mark and the second reference position. 15. The system according to claim 12, wherein the alignment control unit comprises: a first display part is configured to display the image of the second alignment mark detected by the first image camera and the first reference position;a second display part is configured to display the image of the first alignment mark detected by the second image camera and the second reference position; anda control unit is configured to drive the table along at least one of X- and Y-directions to align the image of the second alignment mark and the first reference position, anddrive the second image camera along at least one of the X- and Y-directions to align the image of the first alignment mark and the second reference position. 16. The system according to claim 12, wherein the substrate is a liquid crystal display panel. 17. The system according to the claim 12, wherein an area of the alignment plate is less than an area of the substrate.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (68)
Yi,Jong Hoon; Lee,Dong Hoon, Align key for a TOC/COT-type liquid crystal display device and method of fabricating the same.
Hamasaki Bunei (Yokohama JPX) Igarashi Hajime (Kawasaki JPX) Nakai Akiya (Tokyo JPX) Ayata Naoki (Machida JPX), Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment.
Tolsma,Hoite Pieter Theodoor; Navarro Y Koren,Ramon; Simons,Hubertus Johannes Gertrudus; Edart,Remi Daniel Marie; Lam,Pui Leng; Hulshof,Bernardus Johannes Antonius; Bogers,Roland Adrianus Emanuel Maria, Alignment system and method and device manufactured thereby.
Van Bilsen, Franciscus Bernardus Maria; Burghoorn, Jacobus; Van Haren, Richard Johannes Franciscus; Hinnen, Paul Christiaan; Van Horssen, Hermanus Gerardus; Huijbregtse, Jeroen; Jeunink, Andre Bernardus; Megens, Henry; Koren, Ramon Navarro Y; Tolsma, Hoite Pieter Theodoor; Simons, Hubertus Johannes Gertrudus; Schuurhuis, Johny Rutger; Schets, Sicco Ian; Lee, Brian Young Bok; Dunbar, Allan Reuben, Alignment systems and methods for lithographic systems.
Hennessey A. Kathleen (Lubbock TX) Lin YouLing (Lubbock TX) Wong Wan Sang (Lubbock TX) Cleavelin C. Rinn (Lubbock TX) Demoor Stephen J. (Sugarland TX) Hahn Kwang-Soo (Seoul KRX), Apparatus and method for aligning and measuring misregistration.
Wittekoek Stefan (all from Veldhoven NLX) Van Den Brink Marinus A. (all from Veldhoven NLX) Fahner Theodorus A. (all from Veldhoven NLX), Apparatus for and method of projecting a mask pattern on a substrate.
Keizo Ishikawa JP; Takehide Kishimoto JP; Hideaki Yamagata JP; Takashi Nishimoto JP, Color liquid crystal display with a shielding member being arranged between sealing member and display zone.
Kim Chung Yup,KRX ; Kim Young Chul,KRX ; Kim Dong Young,KRX ; Cho Hyun Nam,KRX ; Lee Jun Young,KRX, Fabrication method for liquid crystal alignment layer by magnetic field treatment.
Shimizu Michio (Chiba JPX) Nishi Takeshi (Kanagawa JPX) Konuma Toshimitsu (Kanagawa JPX), LCD columnar spacers made of a hydrophilic resin and LCD orientation film having a certain surface tension or alignment.
Hopewell William D. (Ridgefield CT) Jackson Robert R. (Millbrook NY) Shaw Jerry C. (Ridgefield CT) Van Kessel Theodore G. (Millbrook NY), Latent-image control of lithography tools.
Shimada Shinji,JPX, Liquid crystal device having column spacers with portion on each of the spacers for reflecting or absorbing visible light and method for fabricating the same.
Tsuboyama Akira (Tokyo JPX) Shindo Hitoshi (Yokohama JPX) Katagiri Kazuharu (Tama JPX) Kanbe Junichiro (Yokohama JPX), Liquid crystal device having pillar spacers with small base periphery width in direction perpendicular to orientation tr.
Nakamura Hiroki,JPX, Liquid crystal display device having the driving circuit disposed in the seal area, with different spacer density in driving circuit area than display area.
Amendola, Albert; Christensen, Richard G.; Yereance, Jr., John G., Method and apparatus for making a mask conforming to a ceramic substrate metallization pattern.
Jochen Philippi DE; Andreas Lohner DE, Method of calibrating an apparatus for producing a three-dimensional object, calibration apparatus and method and apparatus for producing a three-dimensional object.
Shimizu Michio (Chiba JPX) Nishi Takeshi (Kanagawa JPX) Konuma Toshimitsu (Kanagawa JPX), Method of making LCD in which resin columns are cured and the liquid crystal is reoriented.
Kato Yoshinori,KRX ; Lee Kun-jong,KRX ; Ku Gyo-seung,KRX, Method of manufacturing LCD by dropping liquid crystals on a substrate and then pressing the substrates.
Cina Michael F. (Hopewell Junction NY) Cohen Mitchell S. (Ossining NY) Flint Ephraim B. (Garrison NY) Grebe Kurt R. (Beacon NY) Hall Douglas J. (Newark Valley NY) Jackson Kenneth P. (Danbury CT) Opry, Methods and apparatus for precise alignment of objects.
Omeis Juergen (Seeheim-Jugenheim DEX) Rau Norbert (Sulzbach DEX) Kunesch Michael (Babenhausen DEX), Process for producing anisotropic liquid crystal layers on a substrate.
Yamada Satoshi,JPX ; Matsukawa Hideki,JPX, Production process of liquid crystal display panel, seal material for liquid crystal cell and liquid crystal display.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.