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Pressure sensor with pressure-actuated switch 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01H-035/34
  • G01L-019/12
  • G01L-007/08
  • G01L-009/00
출원번호 US-0985052 (2011-01-05)
등록번호 US-9016133 (2015-04-28)
발명자 / 주소
  • Besling, William Frederick Adrianus
  • Steeneken, Peter Gerard
  • Wunnicke, Olaf
출원인 / 주소
  • NXP, B.V.
인용정보 피인용 횟수 : 2  인용 특허 : 39

초록

Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path throu

대표청구항

1. A pressure sensor configured to measure an ambient pressure, the pressure sensor comprising: a substrate including a first metallic contact;a membrane attached to the substrate, the membrane including a second metallic contact and responding to the ambient pressure by deflection, wherein the ambi

이 특허에 인용된 특허 (39)

  1. Knecht Thomas A. (Eden Prairie MN) Frick Roger L. (Chanhassen MN), Capacitance pressure sensor.
  2. Lee ; Shih-Ying ; Briefer ; Dennis K., Capacitive pressure sensing device.
  3. Kremidas James R. (Fenton MI), Capacitive pressure sensor.
  4. Lee Shih-Ying (Lincoln MA) Li Sen Z. (Acton MA), Capacitive pressure sensor.
  5. Sekimura Masayuki (Tokyo JPX), Capacitive pressure sensor.
  6. Guenter Igel DE; Ulrich Sieben DE; Juergen Giehl DE, Capacitive sensor.
  7. Marchant Brent R. (Ogden UT), Differential pressure switch for stored gas pressure vessel.
  8. Dias J. Fleming (Palo Alto CA) Karrer Henry E. (Palo Alto CA) Tykulsky Alexander (Carlisle MA), High fidelity pressure transducer.
  9. Filippelli,Albert R., High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point.
  10. Piesinger Gregory H., Low tire pressure warning system.
  11. Hanahara, Tetsuro; Okuma, Shinji; Ishikawa, Takayuki; Santo, Koichi, Luminous EL sheet having a domed diaphragm and a switch employing the EL sheet.
  12. Nathanson,Harvey C.; Kirby,Christopher; Tranchini,Robert; Young,Robert M., MEMS device.
  13. Steeneken, Peter Gerard; Suy, Hilco, MEMS switch.
  14. Grudzien, Chris P., Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor.
  15. Sogge Dale R. (Franklin MA) O\Brien Edward F. (Providence RI) Czarn David A. (Cumberland RI), Method for making pressure responsive switch.
  16. Kogan,Yakov; Vakhshoori,Daryoosh; Wang,Peidong, Micro-electro-mechanical pressure sensor.
  17. Young Donald C. (Pangbourne GB2) Daniels Philim B. (Hounslow GB2), Microengineered diaphragm pressure switch.
  18. James Christopher D. (Carlsbad CA) Katzenstein Henry S. (Arroyo Grande CA), Micromachined relay and method of forming the relay.
  19. Last Howard R. ; Fan Lawrence C. ; Balestrieri Ralph E. ; Garvick Donald R. ; Wood Robert L., Miniature hydrostat fabricated using multiple microelectromechanical processes.
  20. Olivier AndrW. (New Orleans LA) Williams ; Jr. Oneil J. (Metairie LA), Non-resettable, pressure-actuated switch.
  21. Ferguson, Glen C., Normally closed pressure-sensitive hydrophone switch.
  22. Jacob, Joern; Boehler, Ewald, Pressure cell with temperature sensors and pressure measuring method.
  23. Miller Bearge ; Miller Norman K. ; Sarkisian Gevork ; Sarkissian Karen ; Galperin Anatoly, Pressure responsive switch and method of making same.
  24. Johnston Samuel A. (Fontana WI), Pressure sensitive switch.
  25. Okamura Kenji (Yokohama JPX) Masaki Kenji (Yokohama JPX), Pressure sensor and sensing method.
  26. Jonsson,Steffan, Pressure sensor for detecting small pressure differences and low pressures.
  27. Yoshikawa Eiji,JPX ; Tsugai Masahiro,JPX ; Araki Toru,JPX, Pressure switch.
  28. Dwyer Daniel (Norton MA) Morin Daniel (North Providence RI) Mazzola Massimo (Napoli MA ITX) Abrahamson Karl R. (Easton MA), Pressure switch apparatus for monitoring pressure level in an enclosed chamber and methods of calibrating same and for m.
  29. Ohnesorge David H. (South Bend IN) Antonazzi Frank J. (South Bend IN), Pressure transducer.
  30. Tiemann Jerome J. (Schenectady NY), Pressure transducer.
  31. Slavin Michael (Gloucester Point VA) Carp Ralph W. (Newport News VA) Bata George T. (Grafton VA), Pressure variable capacitor.
  32. De Groot Thomas J. ; Ferguson Glen ; Hulsman William H. ; Prescott Robert C. ; Smith Richard D., Pressure-sensitive switch, its method of calibration and use in a hydrophone array.
  33. Yogesh B. Gianchandani, Sealed capacitive pressure sensors.
  34. Jerman John H. (Palo Alto CA), Semiconductor transducer or actuator utilizing corrugated supports.
  35. Staffan Jonsson SE, Sensor element having temperature measuring means.
  36. Matsubara,Naoteru, Sensor having a diaphragm.
  37. Cusack, Jon B., Snap disc pressure switch.
  38. Muraca, Patrick J., Stylet for use with tissue microarrayer and molds.
  39. Allen Henry V. (Fremont CA) Jerman John H. (Palo Alto CA) Terry Stephen C. (Palo Alto CA), Trimmable microminiature force-sensitive switch.

이 특허를 인용한 특허 (2)

  1. Teowee, Gimtong; Papillon, Bryan E.; Heckelman, James D.; Munroe, Chris, Calibration of molded piezoelectric longitudinal charge coefficient of a pressure sensor for blasting operation.
  2. Orita, Atsuo, Capacitance measuring device and capacitance measurement method for dielectric elastomer.
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