Hard amorphous carbon film containing ultratrace hydrogen for magnetic recording media and magnetic heads
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G11B-005/72
G11B-005/84
G11B-005/31
G11B-005/255
출원번호
US-0024521
(2013-09-11)
등록번호
US-9030774
(2015-05-12)
발명자
/ 주소
Matsumura, Toru
Inaba, Hiroshi
Matsumoto, Hiroyuki
출원인 / 주소
HGST Netherlands B.V.
대리인 / 주소
Zilka-Kotab, PC
인용정보
피인용 횟수 :
0인용 특허 :
13
초록▼
A magnetic recording medium according to one embodiment includes at least a ground layer above a non-magnetic substrate; a magnetic recording layer above the ground layer; and an overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film
A magnetic recording medium according to one embodiment includes at least a ground layer above a non-magnetic substrate; a magnetic recording layer above the ground layer; and an overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film, wherein a hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.1 atom % to 1.0 atom %. Additional products and methods are also presented.
대표청구항▼
1. A magnetic recording medium, comprising: at least a ground layer above a non-magnetic substrate;a magnetic recording layer above the ground layer; andan overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film, wherein a hydrogen co
1. A magnetic recording medium, comprising: at least a ground layer above a non-magnetic substrate;a magnetic recording layer above the ground layer; andan overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film, wherein a hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.1 atom % to 1.0 atom %. 2. The magnetic recording medium as recited in claim 1, wherein the center layer of the overcoat is defined between a first layer and a second layer of the overcoat, the first layer extending at least 0.5 nm in the film thickness direction from a side thereof closest the recording layer in the film thickness direction, and a second layer extending at least 0.5 nm in the film thickness direction from a side thereof opposite the first layer. 3. The magnetic recording medium as recited in claim 2, wherein the first and second layers have a composition different than the center layer. 4. The magnetic recording medium as recited in claim 1, wherein the amorphous carbon is primarily tetrahedral amorphous carbon. 5. The magnetic recording medium as recited in claim 1, wherein the center layer has a carbon content of at least 95 atom %. 6. The magnetic recording medium as recited in claim 1, wherein a mass density of the overcoat is in a range of 3.3 g/cm3 to 3.6 g/cm3 as determined by x-ray reflectometry. 7. The magnetic recording medium as recited in claim 1, wherein a mass density of the overcoat is in a range of 3.5 g/cm3 to 3.6 g/cm3 as determined by x-ray reflectometry. 8. The magnetic recording medium as recited in claim 1, wherein hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.2 atom % to 0.4 atom %. 9. The magnetic recording medium as recited in claim 1, wherein the overcoat has a ratio of sp3 bonding with respect to sp2 bonding (sp3/(sp2+sp3)) of at least 0.25. 10. A magnetic data storage system, comprising: at least one magnetic head;a magnetic medium as recited in claim 1;a drive mechanism for passing the magnetic medium over the at least one magnetic head; anda controller electrically coupled to the at east one magnetic had for controlling operation of the at least one magnetic head. 11. A magnetic head, comprising: a playback element; andan overcoat above a media-facing side of the playback element, the overcoat characterized in that said overcoat is an amorphous carbon film, wherein a hydrogen content in the film in a center layer in a film thickness direction of said overcoat is from 0.1 atom % to 1.0 atom %. 12. The magnetic head as recited in claim 10, wherein the center layer of the overcoat is defined between a first layer and a second layer of the overcoat, the extending at least 0.5 nm in the film thickness direction from a side thereof closest the playback element in the film thickness direction, and a second layer extending at least 0.5 nm in the film thickness direction from a side thereof opposite the first side. 13. The magnetic head as recited in claim 11, wherein the first and second layers have a composition different than the center layer. 14. The magnetic head as recited in claim 10, wherein the amorphous carbon is primarily tetrahedral amorphous carbon. 15. The magnetic head as recited in claim 10, wherein the center layer has a carbon content of at least 95 atom %. 16. The magnetic head as recited in claim 10, wherein a mass density of the overcoat is in a range of 3.3 g/cm3 to 3.6 g/cm3 as determined by x-ray reflectometry. 17. The magnetic head as recited in claim 10, wherein a mass density of the overcoat is in a range of 3.5 g/cm3 to 3.6 g/cm3 as determined by x-ray reflectometry. 18. The magnetic head as recited in claim 10, wherein hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.2 atom % to 0.4 atom %. 19. The magnetic head as recited in claim 10, wherein the overcoat has a ratio of sp3 bonding with respect to sp2 bonding (sp3/(sp2+sp3)) of at least 0.25. 20. A magnetic data storage system, comprising: at least one magnetic head as recited in claim 10;a magnetic medium;a drive mechanism for passing the magnetic over the at least one magnetic head; anda controller electrically coupled to the at least one magnetic head for controlling operation of the at least one magnetic head. 21. A method, comprising: forming an overcoat above at least one of a magnetic layer of a magnetic medium and a media-facing side of the playback element, the overcoat characterized in that said overcoat is an amorphous carbon film, wherein a hydrogen content in the film in a center layer in a film thickness direction of said overcoat is in a range of from 0.1 atom % to 1.0 atom %,wherein the hydrogen content of said overcoat is adjusted to be in said range by adjusting a flow of hydrogen gas into a film deposition chamber during deposition of the overcoat, and by adjusting a hydrogen gas pressure in said film deposition chamber.
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이 특허에 인용된 특허 (13)
Fontana ; Jr. Robert Edward ; Hwang Cherngye ; Novotny Vlad Joseph ; Reiley Timothy Clark ; Yeack-Scranton Celia Elizabeth ; Snyder Clinton David, Contact magnetic recording disk file with improved head assembly.
Matsumura, Toru; Inaba, Hiroshi; Matsumoto, Hiroyuki, Hard amorphous carbon film containing ultratrace hydrogen for magnetic recording media and magnetic heads.
Dorbeck, Mark A.; Sykora, Frank; Erdemir, Ali; Eryilmaz, Osman, High performance computer hard disk drive with a carbon overcoat and method of improving hard disk performance.
Inomata,Akihiro, Magnetic recording medium including a magnetic layer with first magnetic particles and a protective layer with second magnetic particles.
Shirotori, Satoshi; Sakurai, Masatoshi; Kikitsu, Akira; Kamata, Yoshiyuki; Kimura, Kaori, Magnetic recording medium with thicker protective film in edge areas and magnetic recording apparatus using the medium.
Veerasamy, Vijayen; Weiler, Manfred; Li, Eric, Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production.
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