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3-axis magnetic field sensor, method for fabricating magnetic field sensing structure and magnetic field sensing circuit

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-007/14
  • G01B-007/30
  • G01R-033/06
  • H01L-043/08
  • G01R-033/09
출원번호 US-0907960 (2013-06-02)
등록번호 US-9069033 (2015-06-30)
우선권정보 TW-102110704 A (2013-03-26)
발명자 / 주소
  • Chen, Young-Shying
  • Kuo, Keng-Ming
  • Wang, Ding-Yeong
  • Chien, Cheng-Wei
출원인 / 주소
  • Industrial Technology Research Institute
대리인 / 주소
    Jianq Chyun IP Office
인용정보 피인용 횟수 : 1  인용 특허 : 76

초록

A 3-axis magnetic field sensor on a substrate and including, a first tunneling magneto-resistor (TMR) having a first easy-axis for sensing a X-axis magnetic field, a second TMR having a second easy-axis for sensing a Y-axis magnetic field, an out-of-plane magnetic sensor for sensing a Z-axis magneti

대표청구항

1. A 3-axis magnetic field sensor, comprising: a first in-plane magnetic field sensor, located on a substrate to sense an X-axis magnetic field, and having a first tunneling magneto-resistor (TMR) and a first easy-axis, wherein the first easy-axis is regarded as a Y-axis;a second in-plane magnetic f

이 특허에 인용된 특허 (76)

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이 특허를 인용한 특허 (1)

  1. Liu, Lianjun; Mather, Phillip, Method and structure for testing and calibrating three axis magnetic field sensing devices.
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