Semiconductor device and method of fabricating the same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-027/14
H01L-029/04
H01L-029/15
H01L-031/036
G02F-001/1339
H01L-029/786
G02F-001/1333
G02F-001/1345
출원번호
US-0556135
(2009-09-09)
등록번호
US-9069215
(2015-06-30)
우선권정보
JP-11-191102 (1999-07-06)
발명자
/ 주소
Hirakata, Yoshiharu
Goto, Yuugo
Kobayashi, Yuko
Yamazaki, Shunpei
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Nixon Peabody LLP
인용정보
피인용 횟수 :
0인용 특허 :
153
초록▼
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the s
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the same. The shape of a spacer for keeping a substrate interval constant is made such that it is a columnar shape, a radius R of curvature is 2 μm or less, a height H is 0.5 μm to 10 μm, a diameter is 20 μm or less, and an angle α is 65° to 115°. By doing so, it is possible to prevent the lowering of an opening rate and the lowering of light leakage due to orientation disturbance.
대표청구항▼
1. A display device comprising: a first substrate;a gate electrode over the first substrate;a semiconductor layer overlapping with the gate electrode;a first insulating layer disposed between the gate electrode and the semiconductor layer;a first conductive layer over and electrically connected the
1. A display device comprising: a first substrate;a gate electrode over the first substrate;a semiconductor layer overlapping with the gate electrode;a first insulating layer disposed between the gate electrode and the semiconductor layer;a first conductive layer over and electrically connected the semiconductor layer;a second conductive layer over and electrically connected the semiconductor layer;a second insulating layer over the gate electrode, the first conductive layer, and the second conductive layer:a pixel electrode over the second insulating layer, the pixel electrode electrically connected to the first conductive layer;a second substrate opposed to the first substrate;a liquid crystal material disposed between the first substrate and the second substrate;a first photolithographic spacer disposed between the first substrate and the second substrate; anda second photolithographic spacer disposed between the first substrate and the second substrate,wherein the first photolithographic spacer and the second photolithographic spacer are disposed in a region surrounded by a sealing region,wherein each of the gate electrode, the first insulating layer, the semiconductor layer, the first conductive layer, and the pixel electrode overlaps with the first photolithographic spacer,wherein each of the gate electrode, the semiconductor layer, the first conductive layer, the second conductive layer, and the pixel electrode does not overlap with the second photolithographic spacer, andwherein the first photolithographic spacer has a cross-section in which a width of a second substrate side end portion of the first photolithographic spacer is larger than a width of a center portion of the first photolithographic spacer, and the width of the center portion of the first photolithographic spacer is larger than a width of a first substrate side end portion of the first photolithographic spacer. 2. The display device according to claim 1, wherein a sectional shape of the first photolithographic spacer in a radial direction is one selected from the group consisting of a circle, an ellipse, a triangle, a quadrilateral, and a polygon having sides more than four. 3. The display device according to claim 1, wherein the first photolithographic spacer is disposed between the pixel electrode and the second substrate. 4. The display device according to claim 1, further comprising: a touch detection element overlapping with the liquid crystal material, wherein the touch detection element is any one of an optical detecting element, a pressure sensitive type detecting element, and a capacitive type detecting element. 5. The display device according to claim 4, further comprising: an LED backlight overlapping with the liquid crystal material. 6. The display device according to claim 1, wherein the pixel electrode electrically connected to the first conductive layer so that a part of the pixel electrode is located in a contact hole of the second insulating layer. 7. The display device according to claim 1, further comprising: an alignment film disposed between the pixel electrode and the first photolithographic spacer. 8. The display device according to claim 1, wherein the gate electrode is located under the semiconductor layer. 9. A display device comprising: a first substrate;a gate electrode over the first substrate;a semiconductor layer overlapping with the gate electrode;a first insulating layer disposed between the gate electrode and the semiconductor layer;a first conductive layer over and electrically connected the semiconductor layer;a second conductive layer over and electrically connected the semiconductor layer;a second insulating layer over the gate electrode, the first conductive layer, and the second conductive layer;a pixel electrode over the second insulating layer, the pixel electrode electrically connected to the first conductive layer;a second substrate opposed to the first substrate;a liquid crystal material disposed between the first substrate and the second substrate; anda first spacer disposed between the first substrate and the second substrate, the first spacer comprising a photopolymerization type insulating film; anda second spacer disposed between the first substrate and the second substrate, the second spacer comprising a photopolymerization type insulating film,wherein the first spacer and the second spacer are disposed in a region surrounded by a sealing region,wherein each of the gate electrode, the first insulating layer, the semiconductor layer, the first conductive layer, and the pixel electrode overlaps with the first spacer,wherein each of the gate electrode, the semiconductor layer, the first conductive layer, the second conductive layer, and the pixel electrode does not overlap with the second spacer, andwherein the first spacer has a cross-section in which a width of a second substrate side end portion of the first spacer is larger than a width of a center portion of the first spacer, and the width of the center portion of the first spacer is larger than a width of a first substrate side end portion of the first spacer. 10. The display device according to claim 9, wherein a sectional shape of the first spacer in a radial direction is one selected from the group consisting of a circle, an ellipse, a triangle, a quadrilateral, and a polygon having sides more than four. 11. The display device according to claim 9, wherein the first spacer is disposed between the pixel electrode and the second substrate. 12. The display device according to claim 9, further comprising: a touch detection element overlapping with the liquid crystal material, wherein the touch detection element is any one of an optical detecting element, a pressure sensitive type detecting element, and a capacitive type detecting element. 13. The display device according to claim 12, further comprising: an LED backlight overlapping with the liquid crystal material. 14. A display device comprising: a first substrate;a gate electrode over the first substrate;a semiconductor layer overlapping with the gate electrode;a first insulating layer disposed between the gate electrode and the semiconductor layer;a first conductive layer over and electrically connected the semiconductor layer;a second conductive layer over and electrically connected the semiconductor layer;a second insulating layer over the gate electrode, the first conductive layer, and the second conductive layer;a pixel electrode over the second insulating layer, the pixel electrode electrically connected to the first conductive layer;a second substrate opposed to the first substrate;a liquid crystal material disposed between the first substrate and the second substrate; anda first spacer disposed between the first substrate and the second substrate, the first spacer comprising a positive or negative type photosensitive resin; anda second spacer disposed between the first substrate and the second substrate, the second spacer comprising a positive or negative type photosensitive resin,wherein the first spacer and the second spacer are disposed in a region surrounded by a sealing region,wherein each of the gate electrode, the first insulating layer, the semiconductor layer, the first conductive layer, and the pixel electrode overlaps with the first spacer,wherein each of the gate electrode, the semiconductor layer, the first conductive layer, the second conductive layer, and the pixel electrode does not overlap with the second spacer, andwherein the first spacer has a cross-section in which a width of a second substrate side end portion of the first spacer is larger than a width of a center portion of the first spacer, and the width of the center portion of the first spacer is larger than a width of a first substrate side end portion of the first spacer. 15. The display device according to claim 14, wherein a sectional shape of the first spacer in a radial direction is one selected from the group consisting of a circle, an ellipse, a triangle, a quadrilateral, and a polygon having sides more than four. 16. The display device according to claim 14, wherein the photosensitive resin is polyimide or acrylic. 17. The display device according to claim 14, wherein the first spacer is disposed between the pixel electrode and the second substrate. 18. The display device according to claim 14, further comprising: a touch detection element overlapping with the liquid crystal material,wherein the touch detection element is any one of an optical detecting element, a pressure sensitive type detecting element, and a capacitive type detecting element. 19. The display device according to claim 18, further comprising: an LED backlight overlapping with the liquid crystal material.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (153)
Hongyong Zhang JP; Shunpei Yamazaki JP; Satoshi Teramoto JP; Yoshiharu Hirakata JP, ACTIVE MATRIX LCD COMPRISING A SEALING LAYER WITH A REGION OVERLAPPING AN INSULATING FILM FORMED OVER ANOTHER INSULATING FILM, AND A REGION WHERE SAID INSULATING FILM IS NOT FORMED OVER SAID ANOTHER .
Ohtani Hisashi,JPX ; Ogata Yasushi,JPX ; Hirakata Yoshiharu,JPX, Active matrix liquid crystal with capacitor between light blocking film and pixel connecting electrode.
Watanabe Takanori,JPX ; Miyawaki Mamoru,JPX ; Inoue Shunsuke,JPX ; Kochi Tetsunobu,JPX, Display device having a silicon substrate, a locos film formed on the substrate, a tensile stress film formed on the lo.
Yamazaki Shunpei (Tokyo JPX) Takemura Yasuhiko (Kanagawa JPX) Zhang Hongyong (Kanagawa JPX), Insulated gate field effect semiconductor devices having a LDD region and an anodic oxide film of a gate electrode.
Shimizu Michio (Chiba JPX) Nishi Takeshi (Kanagawa JPX) Konuma Toshimitsu (Kanagawa JPX), LCD columnar spacers made of a hydrophilic resin and LCD orientation film having a certain surface tension or alignment.
Fujimori Kohichi,JPX ; Shinomiya Tokihiko,JPX ; Inou Ippei,JPX ; Kozaki Shuichi,JPX, LCD device having an input function and polymer substrates having dual function.
Shimizu Michio,JPX ; Konuma Toshimitsu,JPX ; Nishi Takeshi,JPX, LCD polymerized column spacer formed on a modified substrate, from an acrylic resin, on a surface having hydrophilic an.
Shimada Shinji,JPX, Liquid crystal device having column spacers with portion on each of the spacers for reflecting or absorbing visible light and method for fabricating the same.
Tsuboyama Akira (Tokyo JPX) Shindo Hitoshi (Yokohama JPX) Katagiri Kazuharu (Tama JPX) Kanbe Junichiro (Yokohama JPX), Liquid crystal device having pillar spacers with small base periphery width in direction perpendicular to orientation tr.
Watanabe Yoshihiro (Yokohama JPX) Nakamura Hiroki (Chigasaki JPX) Sugawara Takako (Kawasaki JPX), Liquid crystal display apparatus having gap adjusting means under the sealing region.
Yamada Nobuaki,JPX ; Kondo Masahiko,JPX ; Okamoto Masayuki,JPX ; Kozaki Shuichi,JPX, Liquid crystal display device and a production method for the same.
Ikeda, Masahiro; Sawasaki, Manabu; Taniguchi, Yoji; Inoue, Hiroyasu; Tanose, Tomonori; Tanaka, Yoshinori, Liquid crystal display device and method of manufacturing the same without scattering spacers.
Kurauchi Shoichi,JPX ; Miyazaki Daisuke,JPX ; Hatoh Hitoshi,JPX ; Akiyoshi Muneharu,JPX ; Midorikawa Teruyuki,JPX, Liquid crystal display device comprising switching elements of reverse stagger type and common electrode formed over th.
Zhang Hongyong,JPX ; Sakakura Masayuki,JPX ; Isoda Shirou,JPX, Liquid crystal display device for preventing short circuits and method of manufacturing the same.
Nakamura Hiroki,JPX, Liquid crystal display device having the driving circuit disposed in the seal area, with different spacer density in driving circuit area than display area.
Miyachi Kouichi,JPX ; Aoki Sunao,JPX, Liquid crystal display device including spacers located in positions indicative of rubbing/orientation direction.
Onishi Noriaki,JPX ; Yamada Nobuaki,JPX, Liquid crystal display device with at least 7.degree. C. liquid crystal to isotropic phase transition temperature differ.
Yamada Nobuaki (Higashiosaka JPX) Kondo Masahiko (Nara-ken JPX) Okamoto Masayuki (Tenri JPX) Kozaki Shuichi (Nara JPX), Liquid crystal display device with polymeric walls and a production method for the same.
Tamai Kazuhiko,JPX ; Koden Mitsuhiro,JPX, Liquid crystal display element with a portion of an alignment layer covers spacer is directly bonded to the alignment la.
Mashiko Ryutaro,JPX ; Shigeta Mitsuhiro,JPX ; Furukawa Tomoo,JPX ; Sako Teiyu,JPX ; Sasaki Hirokazu,JPX, Manufacturing method of liquid crystal element for injecting the liquid crystal into the cell and liquid crystal injecting device.
Takayama Toru,JPX ; Takemura Yasuhiko,JPX ; Zhang Hongyong,JPX ; Yamazaki Shunpei,JPX, Process for fabricating semiconductor and process for fabricating semiconductor device.
Kokubo, Chiho; Yamagata, Hirokazu; Yamazaki, Shunpei, Semiconductor comprising a TFT provided on a substrate having an insulating surface and method of fabricating the same.
Kousai Takamasa,JPX ; Makita Naoki,JPX ; Takayama Toru,JPX, Semiconductor device method for producing the same and liquid crystal display including the same.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.