A pump comprises a regenerative pumping mechanism. A rotor of the pump has a generally disc-shaped pump rotor mounted on an axial driveshaft for rotation relative to a stator, the pump rotor having rotor formations disposed in a surface and defining at least a portion of a flow path for pumping gas
A pump comprises a regenerative pumping mechanism. A rotor of the pump has a generally disc-shaped pump rotor mounted on an axial driveshaft for rotation relative to a stator, the pump rotor having rotor formations disposed in a surface and defining at least a portion of a flow path for pumping gas from an inlet to an outlet. The rotor formations are formed between the pump rotor and the stator of the pumping mechanism. The pump rotor and the stator comprise an axial gas bearing arrangement for controlling axial clearance between the rotor and the stator during pump operation. The gas bearing is located at a radially outward position on the rotor.
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1. A pump for pumping fluid, comprising a regenerative pumping mechanism comprising: a stator comprising a planar surface, a plurality of concentric channels formed in the planar surface and a planar circumferential gas bearing surface level with the planar surface;a generally disc-shaped pump rotor
1. A pump for pumping fluid, comprising a regenerative pumping mechanism comprising: a stator comprising a planar surface, a plurality of concentric channels formed in the planar surface and a planar circumferential gas bearing surface level with the planar surface;a generally disc-shaped pump rotor mounted on an axial shaft for rotation relative to the stator, the pump rotor having rotor formations comprising a plurality of concentric circles of shaped recesses disposed in a surface wherein each concentric circle of shaped recesses is aligned with a respective concentric channel of the stator and defining at least a portion of a flow path formed between the pump rotor and the stator for pumping gas from an inlet to an outlet of the pumping mechanism; andan axial gas bearing arranged to control axial clearance between the rotor and the stator during pump operation, the axial gas bearing located between the plurality of concentric circles of shaped recesses and an outlet of the pump that is at atmospheric pressure, the axial gas bearing comprising a rotor part and a stator part aligned with the rotor part, the rotor part comprising a plurality of bearing surfaces interspersed between a plurality of recessed portions on the rotor, and the stator part comprising a planar circumferential gas bearing surface of the stator. 2. The pump as claimed in claim 1, wherein the stator comprises two stator portions located adjacent respective axial sides of the pump rotor, the rotor formations are disposed on each of the axial sides of the pump rotor, and the flow path is divided by the pump rotor into sub-flow paths so that gas can flow simultaneously along each axial side of the pump rotor to the outlet of the pumping mechanism. 3. The pump as claimed in claim 2, wherein said sub-flow paths are mirrored about a radial center line of the pump rotor. 4. The pump as claimed in claim 1, wherein said axial gas bearing comprises two rotor parts, with one rotor part on each axial side of the pump rotor, and two stator parts, with one stator part on each axial side of the pump rotor, each rotor part co-operable with a planar circumferential gas bearing surface of one of the stator parts so that gas that has been pumped along the flow paths can pass between the rotor part and the stator part on each axial side of the rotor to reach the pump outlet. 5. The pump as claimed in claim 1, wherein the inlet of the regenerative pumping mechanism is located at a radially inner portion of the pump and the outlet of the regenerative pumping mechanism is located at a radially outer portion of the pump. 6. The pump as claimed in claim 1, wherein, during use, the axial running clearance between the pump rotor and stator is either one of less than 30 μm, less than 20 μm, or approximately 8 μm. 7. The pump according to claim 1, wherein at least one of: the pump rotor surface having rotor formations disposed therein;a stator surface facing the pump rotor surface; ora surface of the pump rotor or stator comprising the axial gas bearing; are coated with a material that is harder than other pump rotor or stator material. 8. The pump according to claim 7, wherein the material is any one of a nickel PTFE matrix, anodised aluminium, a carbon-based material, or a combination thereof. 9. The pump according to claim 8, where the carbon-based material is any one of Diamond-like material, or synthetic diamond deposited by chemical vapour deposition. 10. The pump according to claim 1, wherein the rotor part of the axial gas bearing further comprises a leading edge between a bearing surface and a recess, wherein the leading edge is angled so that particulates that strike the leading edge are directed toward the outlet. 11. The pump according to claim 10 wherein each recessed portion comprises two recessed surfaces recessed by different depths from the bearing surfaces of the rotor part. 12. The pump according to claim 11 wherein each recessed portion further comprises an intersection between the two recessed surfaces, the intersection angled such that particulates are directed toward the outlet. 13. A vacuum pump comprising: multiple concentric circles of recesses on a rotor, each circle of recesses aligned with a respective channel in a planar surface of a stator, wherein the circles of recesses and the channels increase a pressure of a gas between an inlet to the vacuum pump and an outlet of the vacuum pump; anda gas bearing located between the concentric circles of recesses and the outlet of the vacuum pump and comprising a planar circumferential gas bearing surface on the stator and a plurality of edges on the rotor that are each angled relative to a radius of the rotor and are each aligned with the planar circumferential gas bearing surface, wherein the gas bearing is at atmospheric pressure and the planar circumferential gas bearing surface on the stator is level with the planar surface of the stator. 14. The vacuum pump of claim 13 wherein the edge is angled so as to cause particulates to be directed toward an outlet of the pump.
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