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Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B82Y-010/00
  • G01M-003/32
  • F17C-011/00
  • G01F-022/02
출원번호 US-0155237 (2011-06-07)
등록번호 US-9097611 (2015-08-04)
발명자 / 주소
  • McManus, James V.
  • Dietz, James
  • Lurcott, Steven M.
출원인 / 주소
  • ENTEGRIS, INC.
대리인 / 주소
    Hultquist, PLLC
인용정보 피인용 횟수 : 0  인용 특허 : 65

초록

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a da

대표청구항

1. A monitoring system for dynamically monitoring the volume of fluid in an adsorbent-based gas supply vessel in a gas box of an ion implanter during operation including dispensing of gas from the gas supply vessel, said monitoring system including (i) a monitoring assembly in the gas box, adapted t

이 특허에 인용된 특허 (65)

  1. Holst, Mark; Dubois, Ray; Arno, Jose; Faller, Rebecca; Tom, Glenn, Abatement of effluents from chemical vapor deposition processes using organometallic source reagents.
  2. Sherer, John Michael, Abatement system targeting a by-pass effluent stream of a semiconductor process tool.
  3. Banucci Eugene G. ; Hultquist Steven J., Adsorbent-based storage and dispensing system.
  4. Arno, Jose; Sturm, Edward; Wang, Luping; Dietz, James, Apparatus and method for inhibiting decomposition of germane.
  5. Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery.
  6. Dunemann Klaus (Karlsbad DEX) Fritz Harald (Waldbronn DEX), Arrangement for measuring the pressure in cylindrical cavities.
  7. Carpenter, Kent; Dietz, James, Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels.
  8. Wodjenski, Michael J., Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array.
  9. Wodjenski,Michael J., Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array.
  10. Rauworth Barry L. (Victoria MN) Hennen John M. (Eden Prairie MN), Composite, pressure-resistant drum type container.
  11. Parce, John Wallace; Knapp, Michael R.; Chow, Calvin Y. H.; Bousse, Luc, Controlled fluid transport in microfabricated polymeric substrates.
  12. Hicks Bradford W. (Kalamazoo MI) Blust Brian R. (Rochester MI) Beverly James A. (Kalamazoo MI) Schultz Gary R. (Kalamazoo MI), Fault detection method for central tire inflation system.
  13. Luping Wang ; Terry A. Tabler ; James A. Dietz, Fluid distribution system and process, and semiconductor fabrication facility utilizing same.
  14. Wang, Luping; Tabler, Terry A.; Dietz, James A., Fluid distribution system and process, and semiconductor fabrication facility utilizing same.
  15. Discenzo,Frederick M., Fluid sensor fixture for dynamic fluid testing.
  16. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system comprising high work capacity physical sorbent.
  17. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system utilizing carbon sorbent medium.
  18. Wang, Luping; Salsbury, Joseph, Fluid storage and delivery system utilizing low heels carbon sorbent medium.
  19. George R. Brandes ; Thomas H. Baum ; Michael A. Tischler, Fluid storage and dispensing system.
  20. Wang Luping ; Tom Glenn M., Fluid storage and dispensing system.
  21. Wang Luping ; Tom Glenn M., Fluid storage and dispensing system.
  22. James V. McManus ; Michael J. Wodjenski ; Edward E. Jones, Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly.
  23. Luping Wang ; Glenn M. Tom ; James A Dietz ; Steven M. Lurcott ; Steven J. Hultquist, Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing.
  24. Luping Wang ; Glenn M. Tom ; James A. Dietz ; Steven M. Lurcott ; Steven J. Hultquist, Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing.
  25. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  26. McManus, James V.; Dietz, James A.; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  27. Glenn M. Tom ; James V. McManus, Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
  28. Tom, Glenn M.; McManus, James V., Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
  29. Wodjenski,Michael J.; Arno,Jose I., Gas cabinet including integrated effluent scrubber.
  30. Tom Glenn M. ; McManus James V., Gas source and dispensing system with in situ monitoring of pressure and temperature.
  31. Luping Wang ; Glenn M. Tom, Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein.
  32. Olander,W. Karl, Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate.
  33. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
  34. Arno,Jose I.; Dietz,James A., In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration.
  35. Kantor, Frederick W., Instrumentation and control system and method for fluid transport and processing.
  36. Hayes, Michael W.; Holst, Mark R.; Arno, Jose I.; Tom, Glenn M., Integrated ion implant scrubber system.
  37. Michael W. Hayes ; Mark R. Holst ; Jose I. Arno, Integrated ion implant scrubber system.
  38. Stack Andrew P. (San Jose CA), Ion beam contamination sensor.
  39. Tabler Terry A. ; Lurcott Steven M., Leak detection device, and fluid vessel assembly comprising same.
  40. Sweeney, Joseph D.; Marganski, Paul J.; Olander, W. Karl; Wang, Luping, Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream.
  41. Krawetz Arthur A. (Evanston IL) Klinsuttho Pricha (Darien IL) Phan Phat A. (Skokie IL) Phung Quyet (Orange CA), Method for the measurement of bulk modulus and pressure viscosity of liquids.
  42. Mark Holst ; Ray Dubois ; Jose Arno ; Rebecca Faller ; Glenn Tom, Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents.
  43. Allen James (11260 Hideaway Trail Anchorage AK 99516), Method of determining the volume of a substance having a density, in vertical storage tanks.
  44. Kowalski Henry C. (Grand Blanc MI), Non-invasive fluid condition sensing transducer.
  45. Arno, Jose I., Optical sensor system and method for detection of hydrides and acid gases.
  46. May Iain,GBX ; Tom Glenn M., Piezoelectric gas sensing device for detection of a gas species a gaseous environment.
  47. Lamborne Andrew N. ; de Juan ; Jr. Eugene, Pre-filled package containing unit dose of medical gas and method of making same.
  48. Beatson Michael F. F. (Promiano 50021 Barberino Valdelsa Florence ITX) Nunn Terence M. (5a Castle St. Dover ; Kent GB2), Pressure sensing apparatus and engine analyzing apparatus.
  49. Brainard II Edward C. (Marion MA), Pressure vessel with improved external seal.
  50. Tom Glenn M. ; McManus James V., Process system with integrated gas storage and delivery unit.
  51. Troiano Joseph M. (150 Overlook Ave. 7G Peekskill NY 10566) Spector George (233 Broadway ; Rm. 3815 New York NY 10007), Propane carry safe.
  52. Tom Glenn M. ; King Mackenzie E., Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same.
  53. Tom Glenn M., Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream.
  54. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald, Rectangular parallelepiped fluid storage and dispensing vessel.
  55. Olney Ross D. (West Hills CA) Reeds John W. (Thousand Oaks CA), Self-regulating tire pressure system and method.
  56. Olander,W. Karl; Sweeney,Joseph D.; Wang,Luping, Semiconductor manufacturing facility utilizing exhaust recirculation.
  57. Moore,Scott E.; Meikle,Scott G.; Crum,Magdel, Semiconductor workpiece processing methods, a method of preparing semiconductor workpiece process fluid, and a method of delivering semiconductor workpiece process fluid to a semiconductor processor.
  58. Tischler Michael A. ; Kirlin Peter S., Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members.
  59. Tom, Glenn M.; McManus, James V.; Wang, Luping; Olander, W. Karl, Sorbent-based gas storage and delivery system.
  60. Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
  61. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
  62. Rodier,Daniel; Waisanen,Scott; Griffin,Dale, System and method for measuring molecular analytes in a measurement fluid.
  63. Heimovics ; Jr. John F. (Akron OH), Temperature compensator for pressure regulator.
  64. Jo Sung Jin ; Chua Chee Seong,SGX, Tire pressure monitoring system.
  65. Isakov Slavik,CAX ; Konchin Boris,CAX, Tire pressure sensing system.
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