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특허 상세정보

Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B82Y-010/00    G01M-003/32    F17C-011/00    G01F-022/02   
출원번호 US-0155237 (2011-06-07)
등록번호 US-9097611 (2015-08-04)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Hultquist, PLLC
인용정보 피인용 횟수 : 0  인용 특허 : 65
초록

A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively ...

대표
청구항

1. A monitoring system for dynamically monitoring the volume of fluid in an adsorbent-based gas supply vessel in a gas box of an ion implanter during operation including dispensing of gas from the gas supply vessel, said monitoring system including (i) a monitoring assembly in the gas box, adapted to monitor at least one characteristic of the gas supply vessel selected from the group consisting of: vessel wall strain; vessel temperature; vessel displacement; vessel flexial character; and vessel weight or at least one characteristic of the gas dispensed f...

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