최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0799840 (2013-03-13) |
등록번호 | US-9132436 (2015-09-15) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 88 인용 특허 : 479 |
Gas distribution assemblies are described including an annular body, an upper plate, and a lower plate. The upper plate may define a first plurality of apertures, and the lower plate may define a second and third plurality of apertures. The upper and lower plates may be coupled with one another and
Gas distribution assemblies are described including an annular body, an upper plate, and a lower plate. The upper plate may define a first plurality of apertures, and the lower plate may define a second and third plurality of apertures. The upper and lower plates may be coupled with one another and the annular body such that the first and second apertures produce channels through the gas distribution assemblies, and a volume is defined between the upper and lower plates.
1. A gas distribution assembly, comprising: an annular body comprising: an inner annular wall located at an inner diameter, an outer annular wall located at an outer diameter, an upper surface, and a lower surface;a first upper recess formed in the upper surface;a first lower recess formed in the lo
1. A gas distribution assembly, comprising: an annular body comprising: an inner annular wall located at an inner diameter, an outer annular wall located at an outer diameter, an upper surface, and a lower surface;a first upper recess formed in the upper surface;a first lower recess formed in the lower surface at the inner annular wall;a second lower recess formed in the lower surface below and radially outward of the first lower recess;a first fluid channel defined in the upper surface that is located in the annular body radially inward of the first upper recess;an upper plate coupled with the annular body at the first upper recess and covering the first fluid channel, wherein the upper plate defines a plurality of first apertures; anda lower plate coupled with the annular body at the first lower recess, comprising: a plurality of second apertures defined therein, wherein the second apertures align with the first apertures defined in the upper plate;a plurality of third apertures defined therein and located between the second apertures;wherein the upper and lower plates are coupled with one another such that the first and second apertures are aligned to form a channel through the upper and lower plates. 2. The gas distribution assembly of claim 1, wherein the upper and lower plates are bonded together. 3. The gas distribution assembly of claim 1, further comprising a second fluid channel defined in the upper surface that is located in the annular body radially outward of the first fluid channel, wherein a plurality of ports are defined in a portion of the annular body defining an outer wall of the first fluid channel and an inner wall of the second fluid channel. 4. The gas distribution assembly of claim 3, wherein the second fluid channel is located radially outward of the upper recess such that the second fluid channel is not covered by the upper plate. 5. The gas distribution assembly of claim 4, wherein a second upper recess is defined by the annular body near the top of the second fluid channel in both the inner wall and an outer wall, and wherein the gas distribution assembly further comprises an annular member positioned within the second upper recess so as to cover the second fluid channel. 6. The gas distribution assembly of claim 3, wherein the upper recess comprises a bottom portion that intersects the outer wall of the first fluid channel. 7. The gas distribution assembly of claim 3, further comprising a pair of isolation channels wherein one of the pair of isolation channels is defined in the upper surface of the annular body, and the other of the pair of isolation channels is defined in the lower surface of the annular body, and wherein the pair of isolation channels are vertically aligned with one another. 8. The gas distribution assembly of claim 3, wherein the second fluid channel is located radially inward of the upper recess such that the second fluid channel is covered by the upper plate. 9. The gas distribution assembly of claim 8, wherein a portion of the upper plate extends into the second channel below a bottom of the upper recess. 10. The gas distribution assembly of claim 9, wherein the plurality of ports are angled upward from the second fluid channel to the first fluid channel such that the ports are fluidly accessible below the portion of the upper plate extending into the second channel. 11. The gas distribution assembly of claim 8, further comprising a pair of isolation channels wherein one of the pair of isolation channels is defined in the upper plate at a location radially inward from the upper recess, and the other of the pair of isolation channels is defined in the lower surface of the annular body, and wherein the pair of isolation channels are vertically aligned with one another. 12. The gas distribution assembly of claim 1, further comprising an annular temperature channel defined in the annular body and configured to receive a cooling fluid operable to maintain a temperature of the annular body. 13. The gas distribution assembly of claim 1, further comprising an annular temperature channel defined in the annular body and configured to receive a heating element disposed within the channel and operable to maintain a temperature of the annular body. 14. A gas distribution assembly, comprising: an annular body comprising: an inner annular wall located at an inner diameter, an outer annular wall located at an outer diameter, an upper surface, and a lower surface;an upper recess formed in the upper surface;a lower recess formed in the lower surface;a first fluid channel defined in the lower surface that is located in the annular body radially inward of the lower recess;an upper plate coupled with the annular body at the upper recess, wherein the upper plate defines a plurality of first apertures; anda lower plate coupled with the annular body at the lower recess, and covering the first fluid channel, the lower plate comprising: a plurality of second apertures defined therein, wherein the second apertures align with the first apertures defined in the upper plate;a plurality of third apertures defined therein and located between the second apertures;wherein the upper and lower plates are coupled with one another such that the first and second apertures are aligned to form a channel through the upper and lower plates. 15. The gas distribution assembly of claim 14, further comprising a second fluid channel defined in the lower surface that is located in the annular body radially outward of the first fluid channel, wherein a plurality of ports are defined in a portion of the annular body defining an outer wall of the first fluid channel and an inner wall of the second fluid channel, wherein the plurality of ports are configured to fluidly couple the second fluid channel with the first fluid channel. 16. The gas distribution assembly of claim 15, wherein the second fluid channel is located radially inward of the lower recess such that the second fluid channel is covered by the lower plate, and wherein a portion of the lower plate extends into the second channel above a top of the lower recess. 17. The gas distribution assembly of claim 16, wherein the plurality of ports are angled downward from the second fluid channel to the first fluid channel such that the ports are fluidly accessible above the portion of the lower plate extending into the second channel. 18. The gas distribution assembly of claim 14, wherein the first apertures comprise a conical shape of decreasing diameter as the first apertures extend through the upper plate, and wherein the second and third apertures comprise a conical shape of increasing diameter as the second and third apertures extend through the lower plate. 19. The gas distribution assembly of claim 14, wherein each of the second and third apertures comprise at least three sections of different shape or diameter.
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