초록 ▼

An actuator comprising a first part and a second part, the first part being configured to move relative to the second part, wherein a labyrinth seal is provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyri

An actuator comprising a first part and a second part, the first part being configured to move relative to the second part, wherein a labyrinth seal is provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyrinth seal to a second side of the labyrinth seal, wherein one or more inlets and one or more outlets are provided within the labyrinth seal, the one or more inlets being configured to provide gas to a location within the labyrinth seal and the one or more outlets being configured to remove at least part of the gas from a location within the labyrinth seal.

대표청구항 ▼

1. An actuator comprising: a first part and a second part, the first part being configured to move relative to the second part; anda labyrinth seal provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyrinth

1. An actuator comprising: a first part and a second part, the first part being configured to move relative to the second part; anda labyrinth seal provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyrinth seal to a second side of the labyrinth seal, wherein one or more inlets and one or more outlets are provided within the labyrinth seal, the one or more inlets being configured to provide gas to a location within the labyrinth seal and the one or more outlets being configured to remove at least part of the gas from a location within the labyrinth seal; wherein the one or more inlets are located between an innermost gap and a neighboring gap of the labyrinth seal, the one or more inlets being located at one end of the gaps. 2. The actuator of claim 1, wherein the labyrinth seal is rotationally symmetric. 3. The actuator of claim 1, wherein the labyrinth seal comprises a plurality of ridges, gaps being present between adjacent ridges that are sufficiently narrow to restrict the flow of gas. 4. The actuator of claim 3, wherein the gaps are 50 microns wide or more. 5. The actuator of claim 4, wherein gaps are 150 microns wide or more. 6. The actuator of claim 5, wherein spaces are present between ends of ridges of a first part of the labyrinth seal and an adjacent base of a second part of the labyrinth seal, the spaces being sufficiently wide that they do not significantly restrict the flow of gas. 7. The actuator of claim 6, wherein the actuator is configured to allow a tilt to be introduced between the first and second part of the labyrinth seal, the tilt being accommodated at least in part by the spaces between ends of the ridges and the adjacent base. 8. The actuator of claim 1, wherein a space is provided between the one or more inlets and the innermost gap, and between the one or more inlets and the neighboring gap, the space being configured to provide buffering of the gas delivered through the one or more inlets. 9. The actuator of claim 1, wherein the one or more outlets are located between the innermost gap and the neighboring gap of the labyrinth seal, the one or more outlets being located at an opposite end of the gaps from the one or more inlets. 10. The actuator of claim 9, wherein a space is provided between the one or more outlets and the innermost gap, and between the one or more outlets and the neighboring gap, the space being configured to provide buffering of the gas passing to the one or more outlets. 11. The actuator of claim 1, wherein the actuator is a linear actuator and the labyrinth seal comprises a plurality of linear ridges, gaps being present between adjacent ridges that are sufficiently narrow to restrict the flow of gas. 12. The actuator of claim 11, wherein the labyrinth seal further comprises two surfaces that are not provided with ridges, a gap being present between the surfaces that is sufficiently narrow to restrict the flow of gas. 13. The actuator of claim 1, wherein the actuator comprises an articulated arm. 14. A lithographic apparatus comprising: an illumination system configured to condition a radiation beam;a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;a substrate table constructed to hold a substrate;a substrate handling robot configured to position the substrate, the robot having a actuator with a first part and a second part, the first part being configured to move relative to the second part, and a labyrinth seal provided between the first part and the second part, the labyrinth seal being configured to restrict the flow of gas from a first side of the labyrinth seal to a second side of the labyrinth seal, wherein one or more inlets and one or more outlets are provided within the labyrinth seal, the one or more inlets being configured to provide gas to a location within the labyrinth seal and the one or more outlets being configured to remove at least part of the gas from a location within the labyrinth seal;wherein the one or more inlets are located between an innermost gap and a neighboring gap of the labyrinth seal, the one or more inlets being located at one end of the gaps; anda projection system configured to project the patterned radiation beam onto a target portion of the substrate. 15. The lithographic apparatus of claim 14, wherein the labyrinth seal is electrically isolated from other parts of the lithographic apparatus and is connected to a power supply configured to electrostatically charge the labyrinth seal. 16. A method of sealing an actuator comprising a first part and a second part, the first part being configured to move relative to the second part, using a labyrinth seal, the labyrinth seal being provided between the first part and the second part, the method comprising; introducing gas into the labyrinth seal via one or more inlets located between an innermost gap and a neighboring gap of the labyrinth seal, the one or more inlets being located at one end of the gaps; andremoving gas from the labyrinth seal via one or more outlets connected to a location within the labyrinth seal.