[특허]Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator

Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G06F-007/00 G06F-019/00 H01L-021/67 H01L-021/677
출원번호	US-0134705 (2013-12-19)
등록번호	US-9159592 (2015-10-13)
발명자 / 주소	Flitsch, Frederick A.
출원인 / 주소	Futrfab, Inc.
대리인 / 주소	Kincart, Joseph P.
인용정보	피인용 횟수 : 0 인용 특허 : 74

초록 ▼

The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.

대표청구항 ▼

1. A Cleanspace fabricator comprising: a multilevel environment;multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment; andan automated tool replacement system, wherein the automated tool replacement system comprises: a robotic tool handler capable of transporting a processing tool,a connecting surface for the robotic tool handler, wherein said connectingsurface is connectable to the processing tool, anda support structure for supporting the robotic tool handler, said support structure comprising an automation for transporting the robotic tool handler in at least one of a horizontal direction and a vertical direction,wherein said support structure is supported along a track affixed to a ceiling or a floor. 2. The apparatus of claim 1 wherein the support structure additionally comprises: wheels mounted proximate to a lowest portion of the support structure, wherein said support structure is functional to provide movement in the horizontal direction; andfurther comprising a mechanization attached to the wheels, wherein said mechanization is functional to elevate the robotic tool handler thereby providing movement in the vertical direction. 3. The apparatus of claim 1 wherein the automation for transporting the robotic tool handler in the horizontal direction and the vertical direction comprises multiple rails and a drive unit operative to provide locomotion along at least one rail. 4. The apparatus of claim 1 additionally comprising a mechanized apparatus operative to position one or more of the multiple processing tools in an operation location. 5. The apparatus of claim 1 additionally comprising a robotic automation residing within the Cleanspace to move substrate lots from a first tool of the multiple tools to a second tool of the multiple tools. 6. The apparatus of claim 1 additionally comprising circuitry functional to provide one or more of: wired or wireless electronic communication between at least two of: a processing tool held by the robotic tool handler, a processing tool adjacent to the robotic tool handler and cleanspace fabricator automation. 7. The apparatus of claim 1 additionally comprising electronically interlocked safety systems functional to control an ability of a fabricator tool body to be moved into or out of the robotic tool handler at various positions.

이 특허에 인용된 특허 (74)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허에 인용된 특허 (74)

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연합인증

Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

이 특허에 인용된 특허 (74)

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