[특허]Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate

Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B05C-011/00 B05C-011/10 B05C-005/00 C23C-016/52 H01L-021/67 H01L-021/677 H01L-031/0216 H01L-031/032 H01L-031/18 B41J-002/045
출원번호	US-0874984 (2010-09-02)
등록번호	US-9186696 (2015-11-17)
우선권정보	JP-2009-207140 (2009-09-08)
발명자 / 주소	Miyamoto, Hidenori Maruyama, Kenji Hirakawa, Tadahiko Misumi, Koichi
출원인 / 주소	Tokyo Ohka Kogyo Co., Ltd.
대리인 / 주소	Knobbe Martens Olson & Bear LLP
인용정보	피인용 횟수 : 0 인용 특허 : 41

초록 ▼

A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate, a chamber having a coating space in which the coating part applies the liquid material on the substrate and a transport space into which the substrate is transported, and a removal unit which removes the liquid material from the inside of the chamber when at least one of oxygen concentration and humidity inside the chamber exceeds a threshold value.

대표청구항 ▼

1. A solar cell coating system comprising: a coating part including a slit nozzle which applies a liquid material including an oxidizable metal to a first substrate by a non-spin coating method;a chamber having a coating space in which the coating part applies the liquid material to the first substrate and a transport space into which the substrate is transported;a sensor detecting at least one of the following oxygen concentration or humidity inside the chamber;a removal unit which removes the liquid material from the inside of the chamber when at least one of the following oxygen concentration or humidity inside the chamber exceeds a first threshold value; anda controller programmed to control the operation of the removal unit on the basis of a detection result obtained by the sensor,wherein the controller is programmed to control the removal unit so that the liquid material is not removed until the coating part finishes coating the first substrate when the at least one of the following oxygen concentration or humidity exceeds the first threshold value, wherein the removal unit comprises a recovery part which recovers a recovered liquid material, said recovered liquid material is the liquid material moved from inside the chamber to outside the chamber, wherein the recovery part comprises a circulation path which returns the recovered liquid material into the chamber, and wherein the removal unit comprises a discharge unit which discharges oxygen or moisture from the chamber, depending on which of the following oxygen concentration or humidity inside the chamber exceeds the first threshold value. 2. The solar cell coating system according to claim 1, wherein the controller is programmed to stop a second substrate from being transported to the coating part after the coating of the first substrate has been completed. 3. The solar cell coating system according to claim 1, wherein the controller is programmed to control the removal unit to wait removing the liquid material until the coating part is moved to a maintenance position after the first substrate has been coated. 4. The solar cell coating system according to claim 1, wherein the controller is programmed to stop all treatments associated with coating of the liquid material when the at least one of oxygen concentration and humidity exceeds a second threshold value which is larger than the first threshold value.

이 특허에 인용된 특허 (41)

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A	생활필수품
A62	인명구조; 소방(사다리 E06C)
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A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate 원문보기

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Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate 원문보기

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