Method and apparatus to reduce contamination of particles in a fluidized bed reactor
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-016/442
C23C-016/06
C23C-016/44
C22C-019/00
B01J-008/18
출원번호
US-0939067
(2013-07-10)
등록번호
US-9212421
(2015-12-15)
발명자
/ 주소
Miller, Matthew J.
Spangler, Michael V.
출원인 / 주소
REC Silicon Inc
대리인 / 주소
Klarquist Sparkman, LLP
인용정보
피인용 횟수 :
0인용 특허 :
12
초록▼
A method and fluidized bed reactor for reducing or eliminating contamination of silicon-coated particles are disclosed. The metal surface of one or more fluidized bed reactor components is at least partially coated with a hard protective layer comprising a material having an ultimate tensile strengt
A method and fluidized bed reactor for reducing or eliminating contamination of silicon-coated particles are disclosed. The metal surface of one or more fluidized bed reactor components is at least partially coated with a hard protective layer comprising a material having an ultimate tensile strength of at least 700 MPa at 650° C.
대표청구항▼
1. A method of reducing or eliminating contamination of silicon-coated particles due to contact with a surface in a fluidized bed reactor, the method comprising: providing, in a fluidized bed reactor, a fluidized bed reactor component having a surface facing silicon-coated particles during operation
1. A method of reducing or eliminating contamination of silicon-coated particles due to contact with a surface in a fluidized bed reactor, the method comprising: providing, in a fluidized bed reactor, a fluidized bed reactor component having a surface facing silicon-coated particles during operation of the fluidized bed reactor, the surface comprising metal that is at least partially coated with a protective layer comprising a material having an ultimate tensile strength of at least 700 MPa at 650° C., wherein the protective layer is a cobalt-based alloy comprising 25-35% Cr, ≦10% W, ≦10% Ni, ≦5% Mo, ≦3% Fe, ≦2% Si, ≦2% C, ≦1.5% Mn, ≦1% B, ≦0.05% P, ≦0.05% S, and 30.5-75% cobalt, ora nickel-based alloy comprising 4-30% Mo, 5-25% Cr, 2-15% Co, ≦3.5% Ti, ≦2% Fe, ≦2% Al, ≦1% Mn, ≦1% Si, ≦0.5% Cu, ≦0.1% C, ≦0.1% Zr, ≦0.01% B, and 23.4-89% nickel; andoperating the fluidized bed reactor to make silicon-coated particles. 2. The method of claim 1, wherein at least 95% of the surface is coated with the protective layer. 3. The method of claim 1, wherein the metal has a thermal coefficient of expansion, TCE-1, and the protective layer has a thermal coefficient of expansion, TCE-2, wherein TCE-2 and TCE-1 differ by ≦30%. 4. The method of claim 3, wherein an intermediate coating having a thermal coefficient of expansion, TCE-3, between TCE-1 and TCE-2 is disposed between the metal and the protective layer. 5. The method of claim 1, wherein the protective layer has a minimum average thickness of 0.1 mm. 6. The method of claim 5, wherein the protective layer has a thickness that varies across a width and/or along a length of the surface. 7. The method of claim 1, wherein a portion of the fluidized bed reactor component is constructed entirely of a material having substantially the same chemical composition as the protective layer. 8. The method of claim 7, wherein the fluidized bed reactor component is a fluidization gas inlet tube, an injection nozzle, a thermocouple, a pressure nozzle, or a sample nozzle. 9. The method of claim 1, wherein the fluidized bed reactor component is an injection nozzle, a fluidization gas inlet tube, a seed inlet tube, a product withdrawal outlet tube, a probe assembly, a sample nozzle, a pressure nozzle, a thermocouple, an internal heater, or a bubble breaker. 10. A fluidized bed reactor unit for production of polycrystalline silicon, the unit comprising: a reactor defining a reactor chamber; andone or more reactor components having a surface facing the reactor chamber, the surface comprising metal that is at least partially coated with a protective layer having an ultimate tensile strength of at least 700 MPa at 650° C., wherein the protective layer is a cobalt-based alloy comprising 25-35% Cr, ≦10% W, ≦10% Ni, ≦5% Mo, ≦3% Fe, ≦2% Si, ≦2% C, ≦1.5% Mn, ≦1% B, ≦0.05% P, ≦0.05% S, and 30.5-75% cobalt, ora nickel-based alloy comprising 4-30% Mo, 5-25% Cr, 2-15% Co, ≦3.5% Ti, ≦2% Fe, ≦2% Al, ≦1% Mn, ≦1% Si, ≦0.5% Cu, ≦0.1% C, ≦0.1% Zr, ≦0.01% B, and 23.4-89% nickel. 11. The fluidized bed reactor unit of claim 10, wherein the metal has a first thermal coefficient of expansion (TCE-1) and the protective layer has a second thermal coefficient of expansion (TCE-2) that differs from TCE-1 by ≦30%. 12. The fluidized bed reactor unit of claim 10, wherein the reactor component further comprises an intermediate coating having a thermal coefficient of expansion, TCE-3, between TCE-1 and TCE-2, wherein the intermediate layer is positioned between the metal and the protective layer. 13. The fluidized bed reactor unit of claim 10, wherein the protective layer has an average thickness from 0.1 mm to 1 mm. 14. The fluidized bed reactor unit of claim 13, wherein the protective layer has a thickness that varies across a width and/or along a length of the surface. 15. The fluidized bed reactor unit of claim 10, wherein the protective layer comprises a cobalt-based alloy, a nickel-based alloy, or a combination thereof. 16. The fluidized bed reactor unit of claim 10, wherein a portion of reactor component is constructed entirely of a material having substantially the same chemical composition as the protective layer. 17. A process for the production of granulate polycrystalline silicon particles, the process comprising flowing a silicon-containing gas through a fluidized bed reactor containing a seed particle within a reactor chamber defined by the fluidized bed reactor to effect pyrolysis of the silicon-containing gas and deposition of a polycrystalline silicon layer on the seed particle to form a polycrystalline silicon-coated particle, wherein the fluidized bed reactor comprises one or more reactor components having a surface facing the reactor chamber during reactor operation, the surface comprising metal that is at least partially coated with a protective layer having an ultimate tensile strength of at least 700 MPa at 650° C., wherein the protective layer is a cobalt-based alloy comprising 25-35% Cr, ≦10% W, ≦10% Ni, ≦5% Mo, ≦3% Fe, ≦2% Si, ≦2% C, ≦1.5% Mn, ≦1% B, ≦0.05% P, ≦0.05% S, and 30.5-75% cobalt, ora nickel-based alloy comprising 4-30% Mo, 5-25% Cr, 2-15% Co, ≦3.5% Ti, ≦2% Fe, ≦2% Al, ≦1% Mn, ≦1% Si, ≦0.5% Cu, ≦0.1% C, ≦0.1% Zr, ≦0.01% B, and 23.4-89% nickel. 18. The process of claim 17, wherein at least 95% of the surface is coated with the protective layer, thereby reducing or eliminating contact of the polycrystalline silicon-coated particle with the metal and reducing or eliminating metal contamination of the polycrystalline silicon particle.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (12)
Ingle William M. (Phoenix AZ) Darnell Robert D. (Phoenix AZ) Thompson Stephen W. (Rosenberg TX), Ascending differential silicon harvesting means and method.
Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.
Hsu George C. (La Crescenta CA) Levin Harry (Woodland Hills CA) Hogle Richard A. (Arcadia CA) Praturi Ananda (Monrovia CA) Lutwack Ralph (Sunland CA), Fluidized bed silicon deposition from silane.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.