최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0774710 (2007-07-09) |
등록번호 | US-9223202 (2015-12-29) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 2 인용 특허 : 368 |
Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relati
Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relative lateral motions between a fluid dispenser tip a substrate. Also described herein are methods and devices for creating a planar surface on a substrate using a substantially unpatterned planar template.
1. A method of forming a layer on a substrate, said method comprising: disposing a curable liquid solely on said substrate as a predetermined pattern of a plurality of spaced-apart droplets, said curable liquid provided with a viscosity of less than about 20 centipoises, measured at 25° C., and a su
1. A method of forming a layer on a substrate, said method comprising: disposing a curable liquid solely on said substrate as a predetermined pattern of a plurality of spaced-apart droplets, said curable liquid provided with a viscosity of less than about 20 centipoises, measured at 25° C., and a surface area less than the surface area of an imprint lithography template;contacting said curable liquid with a patterning area of said imprint lithography template to spread said curable liquid in said plurality of spaced-apart droplets such that adjacent droplets of said plurality of spaced-apart droplets merge together to form a contiguous layer of said curable liquid over a region of said substrate in superimposition with said patterning area and substantially fill a contiguous gap defined between said template and said substrate with said curable liquid, with said plurality of spaced-apart droplets being arranged in said predetermined pattern to minimize trapping of a gas in said contiguous layer as said droplets merge to form said contiguous layer; andsolidifying said curable liquid in said contiguous layer to form a solidified layer by curing said curable liquid with light passing through said imprint lithography template. 2. A method of forming a layer on a substrate, said method comprising: disposing a curable liquid solely on said substrate as a predetermined pattern of a plurality of spaced-apart droplets, said curable liquid provided with a viscosity of less than about 5 centipoises, measured at 25° C., and a surface area less than the surface area of an imprint lithography template;contacting said curable liquid with a patterning area of said imprint lithography template to spread said curable liquid in said plurality of spaced-apart droplets such that adjacent droplets of said plurality of spaced-apart droplets merge together to form a contiguous layer of said curable liquid over a region of said substrate in superimposition with said patterning area and substantially fill a contiguous qap defined between said template and said substrate with said curable liquid, with said plurality of spaced-apart droplets being arranged in said predetermined pattern to minimize trapping of a gas in said contiguous layer as said droplets merge to form said contiguous layer; andsolidifying said curable liquid in said contiguous layer to form a solidified layer by curing said curable liquid with light passing through said imprint lithography template.
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