A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second r
A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
대표청구항▼
1. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector an
1. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis, the first and second SCARA arms each having a respective shoulder axis of rotation and being disposed on a common base; anda drive section coupled to the first and second arms, the drive section being configured to independently extend each of the first and second SCARA arms along a respective radial axis and rotate each of the first and second SCARA arms with respect to the common base where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, andindependently move at least an arm portion of one SCARA arm of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes so that at least the arm portion of the one SCARA arm of the first and second SCARA arms moves along the lift axis independent of at least another arm portion of another SCARA arm of the first and second SCARA arms;wherein each end effector is configured to hold at least one substrate. 2. The substrate processing apparatus of claim 1, wherein the first and second SCARA arms are disposed so that an extension axis of the first SCARA arm delimits an angular orientation of an extension axis of the second SCARA arm about the respective shoulder axis of the second SCARA arm. 3. The substrate processing apparatus of claim 1, wherein the end effector of the first SCARA arm and the end effector of the second SCARA arm each comprise two substrate holders. 4. The substrate processing apparatus of claim 1, further comprising a controller connected to the drive section and configured to effect operation of the drive section to substantially prevent interference between the first and second SCARA arms during transport of the respective at least one substrate. 5. The substrate processing apparatus of claim 1, wherein the drive section comprises a four degree of freedom drive system. 6. The substrate processing apparatus of claim 1, wherein the drive section includes a coaxial drive shaft arrangement. 7. The substrate processing apparatus of claim 1, wherein: the first SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation of the first SCARA arm, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis; andthe second SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation of the second SCARA arm, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis. 8. The substrate processing apparatus of claim 6, wherein the forearms are arranged relative to each other in an opposed configuration such that the forearm of the first SCARA arm is located on an upper surface of a respective upper arm and the forearm of the second SCARA arm is located on a bottom surface of a respective upper arm. 9. The substrate processing apparatus of claim 1, wherein the drive section comprises a three degree of freedom drive system connected to the first and second SCARA arms such that an angle between an upper arm of the first SCARA arm and an upper arm of the second SCARA arm is substantially fixed when the arms are rotated with respect to the common base. 10. The substrate processing apparatus of claim 1, wherein each of the end effectors is mounted to a respective arm such that an angle between the end effectors substantially matches an angle between radially adjacent substrate holding stations accessible by each arm. 11. The substrate processing apparatus of claim 1, further comprising a controller connected to at least the drive section and at least one sensor connected to the controller, the controller being configured to obtain substrate detection signals from the at least one sensor and apply an offset to a position of an end effector of one of the first and second arms, wherein the offset is calculated depending on thermal expansion of at least the substrate transport apparatus. 12. The substrate processing apparatus of claim 1, wherein the first arm is configured to allow the second arm to pass between an upper arm and forearm of the first arm. 13. The substrate processing apparatus of claim 1, wherein the respective shoulder axis of rotation of the first and second SCARA arms are disposed along a common shoulder axis of rotation. 14. The substrate processing apparatus of claim 1, wherein the common base includes a first member and a second member wherein the first and second members are joined at a common end. 15. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis;a base arm fixed at one end with respect to the frame and including at least one arm pivot link extending in a plane parallel to the first and second SCARA arms, the first SCARA arm and the second SCARA each having a respective shoulder axis of rotation disposed on a common end of the pivot link of the base arm; anda drive section coupled to the base arm, the first arm and the second arm, where the base arm is rotatably coupled to the drive section at a base arm axis of rotation and the drive section is configured to rotate the base arm about the base arm axis of rotation,independently extend each of the first and second SCARA arms along a respective radial axis, androtate each of the first and second SCARA arms with respect to the base arm where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis;wherein each end effector is configured to hold at least one substrate and the first and second SCARA arms are disposed so that the first radial axis of the first SCARA arm positions the first SCARA arm so that the position of the first SCARA arm delimits an angular orientation of the second radial axis of the second SCARA arm about the respective shoulder axis of the second SCARA arm. 16. The substrate processing apparatus of claim 15, further comprising a controller connected to the drive section and configured to effect operation of the drive section to substantially prevent interference between the first and second SCARA arms during transport of the respective at least one substrate. 17. The substrate processing apparatus of claim 15, wherein the drive section comprises a four degree of freedom drive system. 18. The substrate processing apparatus of claim 15, wherein the drive section includes a coaxial drive shaft arrangement. 19. The substrate processing apparatus of claim 15, wherein: the first SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis; andthe second SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis. 20. The substrate processing apparatus of claim 19, wherein the forearms are arranged relative to each other in an opposed configuration such that the forearm of the first SCARA arm is located on an upper surface of a respective upper arm and the forearm of the second SCARA arm is located on a bottom surface of a respective upper arm. 21. The substrate processing apparatus of claim 15, wherein the drive section comprises a three degree of freedom drive system connected to the first and second SCARA arms such that an angle between an upper arm of the first SCARA arm and an upper arm of the second SCARA arm is substantially fixed when the arms are rotated with respect to the base arm. 22. The substrate processing apparatus of claim 15, wherein each of the end effectors is mounted to a respective arm such that an angle between the end effectors substantially matches an angle between radially adjacent substrate holding stations accessible by each arm. 23. The substrate processing apparatus of claim 15, further comprising a controller connected to at least the drive section and at least one sensor connected to the controller, the controller being configured to obtain substrate detection signals from the at least one sensor and apply an offset to a position of an end effector of one of the first and second arms, wherein the offset is calculated depending on thermal expansion of at least the substrate transport apparatus. 24. The substrate processing apparatus of claim 15, wherein the first arm is configured to allow the second arm to pass between an upper arm and forearm of the first arm. 25. The substrate processing apparatus of claim 15, wherein the respective shoulder axis of rotation of the first and second SCARA arms are disposed along a common shoulder axis of rotation. 26. The substrate processing apparatus of claim 15, wherein the drive section is further configured to independently move at least a portion of each of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes. 27. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis, the first and second SCARA arms each having a respective shoulder axis of rotation and being disposed on a common base;a drive section coupled to the first and second arms, the drive section being configured to independently extend each of the first and second SCARA arms along a respective radial axis and rotate each of the first and second SCARA arms with respect to the common base where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis;a controller connected to the drive section and configured to effect operation of the drive section and recognize when rotation of the first and second SCARA arms will result in interference between the first and second SCARA arms so that an axis of extension and retraction of at least one of first and second SCARA arms is within a region substantially without interference with another of the first SCARA arm and the second SCARA arm; andwherein each end effector is configured to hold at least one substrate. 28. The substrate processing apparatus of claim 27, wherein the drive section is further configured to independently move at least a portion of one of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes. 29. The substrate processing apparatus of claim 27, wherein the common base includes a first portion and a second portion that are joined at a common end and angularly adjustable relative to each other, the first SCARA arm being disposed on one of the first portion and second portion and the second SCARA arm being disposed on another one of the first portion and second portion.
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이 특허에 인용된 특허 (27)
Hofmeister Christopher, Articulated arm transfer device.
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Minami, Hirofumi; Ago, Kenji; Kawaguchi, Takafumi; Koike, Toshio; Yuyama, Junpei, Transport apparatus, control method for the same, and vacuum processing system.
Wheeler William R. (Saratoga CA) Kudinar Rusmin (Fremont CA) Kren George J. (Los Altos CA) Clementson David D. (Palo Alto CA), Wafer handling apparatus.
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