[특허]Substrate processing apparatus

Brooks Automation, Inc.

검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
검색연산자

검색도움말
검색연산자	기능	검색시 예
()	우선순위가 가장 높은 연산자	예1) (나노 (기계 \| machine))
공백	두 개의 검색어(식)을 모두 포함하고 있는 문서 검색	예1) (나노 기계) 예2) 나노 장영실
\|	두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색	예1) (줄기세포 \| 면역) 예2) 줄기세포 \| 장영실
!	NOT 이후에 있는 검색어가 포함된 문서는 제외	예1) (황금 !백금) 예2) !image
*	검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색	예) semi*
""	따옴표 내의 구문과 완전히 일치하는 문서만 검색	예) "Transform and Quantization"

과학기술 지식인프라 ScienceON

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

특허 상세정보

MyON담기

내보내기 페이스북 공유 트위터 공유 카카오톡 공유

Substrate processing apparatus

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G06F-007/00 H01L-021/677 B25J-009/04 B25J-011/00 B25J-018/04
출원번호	US-0579067 (2014-12-22)
등록번호	US-9230841 (2016-01-05)
발명자 / 주소	Gilchrist, Ulysses Caveney, Robert T. Krishnasamy, Jayaraman Drew, Mitchell Moura, Jairo T.
출원인 / 주소	Brooks Automation, Inc.
대리인 / 주소	Perman & Green, LLP
인용정보	피인용 횟수 : 3 인용 특허 : 27

초록
▼

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

대표
청구항
▼

1. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis, the first and second SCARA arms each having a respective shoulder axis of rotation and being disposed on a common base; anda drive section coupled to the first and second arms, the drive section being configured to independently extend each of the first and second SCARA arms along a respective radial axis and rotate each of the first and second SCARA arms with respect to the common base where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, andindependently move at least an arm portion of one SCARA arm of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes so that at least the arm portion of the one SCARA arm of the first and second SCARA arms moves along the lift axis independent of at least another arm portion of another SCARA arm of the first and second SCARA arms;wherein each end effector is configured to hold at least one substrate. 2. The substrate processing apparatus of claim 1, wherein the first and second SCARA arms are disposed so that an extension axis of the first SCARA arm delimits an angular orientation of an extension axis of the second SCARA arm about the respective shoulder axis of the second SCARA arm. 3. The substrate processing apparatus of claim 1, wherein the end effector of the first SCARA arm and the end effector of the second SCARA arm each comprise two substrate holders. 4. The substrate processing apparatus of claim 1, further comprising a controller connected to the drive section and configured to effect operation of the drive section to substantially prevent interference between the first and second SCARA arms during transport of the respective at least one substrate. 5. The substrate processing apparatus of claim 1, wherein the drive section comprises a four degree of freedom drive system. 6. The substrate processing apparatus of claim 1, wherein the drive section includes a coaxial drive shaft arrangement. 7. The substrate processing apparatus of claim 1, wherein: the first SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation of the first SCARA arm, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis; andthe second SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation of the second SCARA arm, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis. 8. The substrate processing apparatus of claim 6, wherein the forearms are arranged relative to each other in an opposed configuration such that the forearm of the first SCARA arm is located on an upper surface of a respective upper arm and the forearm of the second SCARA arm is located on a bottom surface of a respective upper arm. 9. The substrate processing apparatus of claim 1, wherein the drive section comprises a three degree of freedom drive system connected to the first and second SCARA arms such that an angle between an upper arm of the first SCARA arm and an upper arm of the second SCARA arm is substantially fixed when the arms are rotated with respect to the common base. 10. The substrate processing apparatus of claim 1, wherein each of the end effectors is mounted to a respective arm such that an angle between the end effectors substantially matches an angle between radially adjacent substrate holding stations accessible by each arm. 11. The substrate processing apparatus of claim 1, further comprising a controller connected to at least the drive section and at least one sensor connected to the controller, the controller being configured to obtain substrate detection signals from the at least one sensor and apply an offset to a position of an end effector of one of the first and second arms, wherein the offset is calculated depending on thermal expansion of at least the substrate transport apparatus. 12. The substrate processing apparatus of claim 1, wherein the first arm is configured to allow the second arm to pass between an upper arm and forearm of the first arm. 13. The substrate processing apparatus of claim 1, wherein the respective shoulder axis of rotation of the first and second SCARA arms are disposed along a common shoulder axis of rotation. 14. The substrate processing apparatus of claim 1, wherein the common base includes a first member and a second member wherein the first and second members are joined at a common end. 15. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis;a base arm fixed at one end with respect to the frame and including at least one arm pivot link extending in a plane parallel to the first and second SCARA arms, the first SCARA arm and the second SCARA each having a respective shoulder axis of rotation disposed on a common end of the pivot link of the base arm; anda drive section coupled to the base arm, the first arm and the second arm, where the base arm is rotatably coupled to the drive section at a base arm axis of rotation and the drive section is configured to rotate the base arm about the base arm axis of rotation,independently extend each of the first and second SCARA arms along a respective radial axis, androtate each of the first and second SCARA arms with respect to the base arm where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis;wherein each end effector is configured to hold at least one substrate and the first and second SCARA arms are disposed so that the first radial axis of the first SCARA arm positions the first SCARA arm so that the position of the first SCARA arm delimits an angular orientation of the second radial axis of the second SCARA arm about the respective shoulder axis of the second SCARA arm. 16. The substrate processing apparatus of claim 15, further comprising a controller connected to the drive section and configured to effect operation of the drive section to substantially prevent interference between the first and second SCARA arms during transport of the respective at least one substrate. 17. The substrate processing apparatus of claim 15, wherein the drive section comprises a four degree of freedom drive system. 18. The substrate processing apparatus of claim 15, wherein the drive section includes a coaxial drive shaft arrangement. 19. The substrate processing apparatus of claim 15, wherein: the first SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis; andthe second SCARA arm includes an upper arm connected to the drive section at the respective shoulder axis of rotation, a forearm connected to the upper arm at an elbow axis and the end effector is coupled to the forearm at a wrist axis. 20. The substrate processing apparatus of claim 19, wherein the forearms are arranged relative to each other in an opposed configuration such that the forearm of the first SCARA arm is located on an upper surface of a respective upper arm and the forearm of the second SCARA arm is located on a bottom surface of a respective upper arm. 21. The substrate processing apparatus of claim 15, wherein the drive section comprises a three degree of freedom drive system connected to the first and second SCARA arms such that an angle between an upper arm of the first SCARA arm and an upper arm of the second SCARA arm is substantially fixed when the arms are rotated with respect to the base arm. 22. The substrate processing apparatus of claim 15, wherein each of the end effectors is mounted to a respective arm such that an angle between the end effectors substantially matches an angle between radially adjacent substrate holding stations accessible by each arm. 23. The substrate processing apparatus of claim 15, further comprising a controller connected to at least the drive section and at least one sensor connected to the controller, the controller being configured to obtain substrate detection signals from the at least one sensor and apply an offset to a position of an end effector of one of the first and second arms, wherein the offset is calculated depending on thermal expansion of at least the substrate transport apparatus. 24. The substrate processing apparatus of claim 15, wherein the first arm is configured to allow the second arm to pass between an upper arm and forearm of the first arm. 25. The substrate processing apparatus of claim 15, wherein the respective shoulder axis of rotation of the first and second SCARA arms are disposed along a common shoulder axis of rotation. 26. The substrate processing apparatus of claim 15, wherein the drive section is further configured to independently move at least a portion of each of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes. 27. A substrate processing apparatus comprising: a frame;a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis;a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis, the first and second SCARA arms each having a respective shoulder axis of rotation and being disposed on a common base;a drive section coupled to the first and second arms, the drive section being configured to independently extend each of the first and second SCARA arms along a respective radial axis and rotate each of the first and second SCARA arms with respect to the common base where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis;a controller connected to the drive section and configured to effect operation of the drive section and recognize when rotation of the first and second SCARA arms will result in interference between the first and second SCARA arms so that an axis of extension and retraction of at least one of first and second SCARA arms is within a region substantially without interference with another of the first SCARA arm and the second SCARA arm; andwherein each end effector is configured to hold at least one substrate. 28. The substrate processing apparatus of claim 27, wherein the drive section is further configured to independently move at least a portion of one of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes. 29. The substrate processing apparatus of claim 27, wherein the common base includes a first portion and a second portion that are joined at a common end and angularly adjustable relative to each other, the first SCARA arm being disposed on one of the first portion and second portion and the second SCARA arm being disposed on another one of the first portion and second portion.

이 특허에 인용된 특허 (27)

이 특허를 인용한 특허 피인용횟수: 3

IPC 상위 출원인

내보내기

상세정보
내보내기 구분	파일저장 인쇄 메일전송
구성항목	관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	> 총 건의 자료가 검색되었습니다. > 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) > 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. > 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) > 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오 > ~ > Text(ASCII format) Excel format

과학기술 지식인프라 ScienceON

ScienceON Chatbot

연합인증

특허 상세정보

Substrate processing apparatus

초록
▼

대표
청구항
▼

이 특허에 인용된 특허 (27)

이 특허를 인용한 특허 피인용횟수: 3

IPC 상위 출원인

과제정보

상세정보조회

원문조회

IPC 상세정보(version : 201201)

연구과제 성과물(0)

참여연구원의 다른 문헌(0)

처리중입니다.

잠시만 기다려주세요.

ScienceON Chatbot

연합인증

특허 상세정보

Substrate processing apparatus

초록 ▼

대표청구항 ▼

이 특허에 인용된 특허 (27)

이 특허를 인용한 특허 피인용횟수: 3

IPC 상위 출원인

과제정보

상세정보조회

원문조회

IPC 상세정보(version : 201201)

연구과제 성과물(0)

참여연구원의 다른 문헌(0)

처리중입니다.

잠시만 기다려주세요.

초록
▼

대표
청구항
▼