PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B01D-053/02
F17C-011/00
B01J-020/20
B01J-020/30
B01J-020/28
출원번호
US-0224536
(2014-03-25)
등록번호
US-9234628
(2016-01-12)
발명자
/ 주소
Wilson, Shaun M.
Sturm, Edward A.
출원인 / 주소
ENTEGRIS, INC.
대리인 / 주소
Hultquist, PLLC
인용정보
피인용 횟수 :
0인용 특허 :
115
초록▼
A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or o
A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or other finely divided form. The adsorbent is particularly suited for storage and supply of fluorine-containing gases, such as fluorine gas, nitrogen trifluoride, carbo-fluoride gases, and the like. The adsorbent may be utilized in a gas storage and dispensing system, in which the adsorbent is contained in a supply vessel, from which sorbate gas can be selectively dispensed.
대표청구항▼
1. A fluid storage and dispensing apparatus, comprising: a fluid storage and dispensing vessel, holding a fluid storage and dispensing medium comprising a polyvinylidene fluoride pyrolyzate carbon adsorbent in a monolithic or particulate form, adapted for fluid to be reversibly adsorbed thereon,wher
1. A fluid storage and dispensing apparatus, comprising: a fluid storage and dispensing vessel, holding a fluid storage and dispensing medium comprising a polyvinylidene fluoride pyrolyzate carbon adsorbent in a monolithic or particulate form, adapted for fluid to be reversibly adsorbed thereon,wherein the vessel is configured to store adsorbed fluid on the polyvinylidene fluoride pyrolyzate carbon adsorbent, and to discharge fluid desorbed from the polyvinylidene fluoride pyrolyzate carbon adsorbent under dispensing conditions. 2. The fluid storage and dispensing apparatus of claim 1, further comprising a fluid reversibly adsorbed on the polyvinylidene fluoride pyrolyzate carbon adsorbent. 3. The fluid storage and dispensing apparatus of claim 2, wherein the fluid comprises one or more of arsine, phosphine, boron trichloride, boron trifluoride, silane, germane, phosgene, diborane, ammonia, stibine, hydrogen sulfide, hydrogen selenide, hydrogen telluride, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydrides, halide (chlorine, bromine, fluorine, and iodine) compounds, organometallic compounds, nitrogen trifluoride, fluorine, hydrogen fluoride, diboron tetrafluoride, and carbofluoride compounds. 4. A fluid storage and dispensing apparatus, comprising: a fluid storage and dispensing vessel, holding a fluid storage and dispensing medium comprising a polyvinylidene fluoride pyrolyzate carbon adsorbent adapted for fluid to be reversibly adsorbed thereon,wherein the vessel is configured to store adsorbed fluid on the polyvinylidene fluoride pyrolyzate carbon adsorbent, and to discharge fluid desorbed from the polyvinylidene fluoride pyrolyzate carbon adsorbent under dispensing conditions,further comprising a fluid reversibly adsorbed on the polyvinylidene fluoride pyrolyzate carbon adsorbent,wherein the fluid comprises a fluorine-containing fluid. 5. The fluid storage and dispensing apparatus of claim 4, wherein the fluorine-containing fluid comprises fluorine gas. 6. The fluid storage and dispensing apparatus of claim 4, wherein the fluorine-containing fluid comprises NF3. 7. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent is of monolithic form. 8. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent is of particulate form. 9. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent comprises porosity including pores of a size in a range of from 0.2 to 5 nanometers. 10. The fluid storage and dispensing apparatus of claim 9, having porosity, wherein at least 30% of the porosity of the polyvinylidene fluoride pyrolyzate carbon adsorbent comprises pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 50% of the porosity comprises pores of diameter <2 nanometers. 11. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent has a bulk density in a range of from 0.6 to 1.8 grams per cubic centimeter. 12. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent has a fluorine gas permeability in a range of from 100 to 600 cc/psi/cm2/min at 275 kPa pressure. 13. The fluid storage and dispensing apparatus of claim 1, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent is in the form of discs that are vertically stacked in the fluid storage and dispensing vessel to form a stacked array in which successive discs are in face-to-face abutting relationship to one another. 14. The fluid storage and dispensing apparatus of claim 13, wherein the polyvinylidene fluoride pyrolyzate carbon adsorbent has a bulk density in a range of from 0.6 to 1.8 grams per cubic centimeter, a fluorine gas permeability in a range of from 100 to 600 cc/psi/cm2/min at 275 kPa pressure, and porosity including pores of a size in a range of from 0.2 to 5 nanometers, wherein at least 30% of the porosity of the polyvinylidene fluoride pyrolyzate carbon adsorbent comprises pores having a size in a range of from about 0.3 to about 0.72 nanometer, and at least 50% of the porosity comprises pores of diameter <2 nanometers. 15. A method of supplying fluid for use in manufacturing, comprising charging an adsorbable fluid to a fluid storage and dispensing apparatus according to claim 1, for adsorption of the adsorbable fluid on the polyvinylidene fluoride pyrolyzate carbon adsorbent. 16. The method of claim 15, wherein said charging is carried out in a fill operation wherein pressure of the adsorbable fluid is monitored during the fill operation. 17. A manufacturing facility comprising a fluid storage and dispensing apparatus according to claim 2, coupled to flow circuitry for delivering fluid discharged from the fluid storage and dispensing vessel under dispensing conditions to a fluid-utilizing apparatus. 18. A manufacturing facility comprising a fluid storage and dispensing apparatus, comprising: a fluid storage and dispensing vessel, holding a fluid storage and dispensing medium comprising a polyvinylidene fluoride pyrolyzate carbon adsorbent adapted for fluid to be reversibly adsorbed thereon,wherein the vessel is configured to store adsorbed fluid on the polyvinylidene fluoride pyrolyzate carbon adsorbent, and to discharge fluid desorbed from the polyvinylidene fluoride pyrolyzate carbon adsorbent under dispensing conditions,further comprising a fluid reversibly adsorbed on the polyvinylidene fluoride pyrolyzate carbon adsorbent,wherein the fluid storage and dispensing apparatus is coupled to flow circuitry for delivering fluid discharged from the fluid storage and dispensing vessel under dispensing conditions to a fluid-utilizing apparatus,wherein the fluid reversibly adsorbed on the polyvinylidene fluoride pyrolyzate carbon adsorbent comprises fluorine gas or nitrogen fluoride gas, the fluid-utilizing apparatus comprises a semiconductor manufacturing apparatus, and the fluid storage and dispensing apparatus is configured to flow the fluid to the semiconductor manufacturing apparatus for cleaning thereof. 19. The manufacturing facility of claim 18, wherein the semiconductor manufacturing apparatus comprises a vapor deposition chamber or an ion implant chamber. 20. A method of manufacturing a semiconductor, flat-panel display, or solar product, comprising supplying gas for said manufacturing from a fluid storage and dispensing apparatus according to claim 1.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (115)
Guile Donald L. (Horseheads NY), Activated carbon bodies having bentonite and cellulose fibers.
Burchell Timothy D. ; Weaver Charles E. ; Chilcoat Bill R. ; Derbyshire Frank ; Jagtoyen Marit, Activated carbon fiber composite material and method of making.
Burchell Timothy D. ; Weaver Charles E. ; Chilcoat Bill R. ; Derbyshire Frank ; Jagtoyen Marit, Activated carbon fiber composite material and method of making.
Park Minwoo ; Rhodes Frank R. ; L'Amoreaux Jack H. ; Baker Frederick S. ; Beckler Robert K. ; McCue John C., Adsorptive monolith including activated carbon and method for making said monlith.
Park Minwoo ; Rhodes Frank R. ; L'Amoreaux Jack H. ; Baker Frederick S. ; Beckler Robert K. ; McCue John C., Adsorptive monolith including activated carbon, method for making said monolith, and method for adsorbing chemical agents from fluid streams.
Park Minwoo ; Rhodes Frank R. ; L'Amoreaux Jack H. ; Baker Frederick S. ; Beckler Robert K. ; McCue John C., Adsorptive monolith including activated carbon, method for making said monolith, and method for adsorbing chemical agents from fluid streams.
Jain, Ravi; LaCava, Alberto I.; Maheshwary, Apurva; Ambriano, John Robert; Acharya, Divyanshu R.; Fitch, Frank R., Air separation using monolith adsorbent bed.
Garrett Charles W. (Somerville AL) Robinson ; Jr. William H. (Huntland TN) Sierk Dennis A. (Huntsville AL), Apparatus and method for controlling functions of automated gas cabinets.
Zheng Dao-Hong (London GBX) Irven John (High Wycombe GBX) Paterson Alan J. F. (Crewe GBX) Tregear Daniel C. (Cambridge GBX), Apparatus for supplying high purity fluid.
Maroldo Stephen G. (Harleysville PA) Betz William R. (Port Matilda PA) Borenstein Noah (Oreland PA), Carbonaceous adsorbents from pyrolyzed polysulfonated polymers.
Palumbo Luigi (Rome ITX) Colletta Angelo (Rome ITX), Carbonaceous material with high characteristics of surface area and activity and process for producing the same.
Quinn David F. (Kingston CAX) Holland Jayne A. (Kingston CAX), Carbonaceous material with high micropore and low macropore volume and process for producing same.
Diot Christian (11 ; rue du Noisetier -Clos Notre Dame 77340 Pontault-Combault FRX) Larrieu Dominique (48 ; rue de la Sourderie 78180 Montigny-le-Brettoneux FRX) Rivero Alain (4 ; rue Henri de Bourna, Enclosure and apparatus for separating gas mixtures by adsorption.
Nowobilski Jeffert J. (Orchard Park NY) Notaro Frank (Amherst NY) Acharya Arun (East Amherst NY), Method and apparatus for quick filling gas cylinders.
Briesacher Jeffrey L. (Pismo Beach CA) Applegarth Charles H. (San Luis Obispo CA) Lorimer D\Arcy H. (Pismo Beach CA), Method and apparatus for removing residual hydrogen from a purified gas.
Greinke Ronald A. (Medina OH) Bretz Richard I. (Parma OH) Mullhaupt Joseph T. (Williamsville NY), Method for storing methane using a halogenating agent treated activated carbon.
De Bievre Paul J. (Kasterlee BEX) Vansant Etienne F. (Zoersel BEX) Peeters Guido J. (Berchem BEX), Method of encapsulating materials in a zeolite in a stable manner.
Coffield Kelly M. (Davenport IA) Cantrill Dean A. (Bettendorf IA) McCulloh Kevin G. (Davenport IA) Mickelson Sammy K. (Bettendorf IA), Modular, stackable pressure swing absorption concentrator.
Putyera Karol ; Contescu Cristian I. ; Amankwah Kwabena A. G. ; Amato Wayne S., Post-carbonization treatment of microporous carbons for enhancement of methane and natural gas storage properties.
Godino Claude (Biviers FRX) Duval Philippe (Echirolles FRX) Ghnassia-Daudin Benot (Voreppe FRX), Process and plant for purification by adsorption on activated carbon and corresponding adsorber vessel.
Prigge Helene (Unterschleissheim DEX) Rurlnder Robert (Halsbach DEX) Hoffman Harald (Burghausen DEX) Bortner Hans-Peter (Emmerting DEX), Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds.
Tamhankar Satish S. (Scotch Plains NJ) Ramachandran Ramakrishnan (Allendale NJ) Blow Martin (Basking Ridge NJ) Galica Theodore R. (Glen Gardner NJ), Removal of perfluorocarbons from gas streams.
Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.