Method of forming organic polymer thin film and an apparatus for forming the organic polymer thin film
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-014/12
C23C-014/24
출원번호
US-0903431
(2010-10-13)
등록번호
US-9290837
(2016-03-22)
우선권정보
JP-2009-238179 (2009-10-15)
발명자
/ 주소
Noguchi, Masumi
Momono, Ken
Irikura, Hagane
출원인 / 주소
Kojima Press Industry Co., Ltd.
대리인 / 주소
Burr & Brown, PLLC
인용정보
피인용 횟수 :
0인용 특허 :
4
초록▼
A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repe
A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers in vacuum state are introduced into a deposition chamber in a vacuum state and polymerized on a surface of the substrate arranged in the deposition chamber, each of the monomers in a liquid form is present in the evaporation source containers in a constant amount every time, at the beginning of the evaporation operation of monomers.
대표청구항▼
1. A method of forming an organic polymer thin film, comprising the steps of: performing an evaporation operation of a plurality of kinds of monomers in a plurality of evaporation source containers in a vacuum state; and introducing the evaporated plurality of kinds of monomers into a deposition cha
1. A method of forming an organic polymer thin film, comprising the steps of: performing an evaporation operation of a plurality of kinds of monomers in a plurality of evaporation source containers in a vacuum state; and introducing the evaporated plurality of kinds of monomers into a deposition chamber in a vacuum state so as to be polymerized on a surface of at least one substrate disposed in the deposition chamber, thereby performing a vacuum deposition polymerization which is a forming operation of an organic polymer thin film on the surface of the at least one substrate,wherein each of the plurality of kinds of monomers is introduced into the deposition chamber due to a difference between pressures within each of the plurality of evaporation source containers and the deposition chamber, wherein only the evaporated plurality of kinds of monomers are introduced into the deposition chamber,wherein each of the plurality of kinds of monomers is present in its evaporation source container of the plurality of evaporation source containers each in a constant amount in a liquid form at least at a beginning of the evaporation operation of the monomers,wherein the plurality of evaporation source containers and the deposition chamber are connected via control valves, which are opened and closed such that internal pressures in the plurality of evaporation source containers are controlled to be higher than an internal pressure of the deposition chamber,wherein gate valves are provided in each of the plurality of evaporation source containers, each of the plurality of evaporation source containers are filled with a monomer of the plurality of kinds of monomers while the gate valves are closed, and then the plurality of evaporation source containers are heated so that the plurality of kinds of monomers are evaporated while the gate valves are opened and the control valves are closed until internal pressures within the evaporation source containers reach predetermined values, then the control valves are opened to introduce the evaporated plurality of kinds of monomers into the deposition chamber,wherein each evaporation source container is a pressure-tight container that is heremetically sealed with a gate valve partitioning the evaporation source container into an upper portion and a lower portion, wherein the lower portion is a liquid storage chamber and the upper portion is a vapor storage chamber with the gate valve therebetween in the evaporation source container, the upper portion connected to the deposition chamber by a single control valve, and each evaporation source container includes a monomer supply mechanism to supply the monomer to the liquid storage chamber of each evaporation source container,wherein each monomer supply mechanism comprises a heremetically sealed storage tank, an inert gas supply with an inert gas supply tube including an inert gas pressure control valve, connected between the inert gas supply and the storage tank, and a monomer suction tube in communication with a lower portion of the storage tank and the respective liquid storage chamber of the evaporation source container for that monomer with a valve positioned between the liquid storage chamber and the storage tank, andwherein a space within the storage tank that is not filled with the monomer is filled with the inert gas at a pressure above atmospheric pressure, and when the control valve and the gate valve are closed and the monomer suction tube valve is opened, the monomer is automatically suctioned from the storage tank to the liquid storage chamber due to a difference in pressure. 2. The method of forming an organic polymer thin film according to claim 1, wherein the at least one substrate comprises a plurality of substrates and the vacuum deposition polymerization is repeatedly performed to form the organic polymer thin film on the surface of each of the plurality of substrates that is disposed in the deposition chamber in turn, and the plurality of kinds of monomers are present in the plurality of evaporation source containers each in a constant amount in a liquid form at the beginning of each of the evaporation operations of the monomers for the repeated vacuum deposition polymerization. 3. The method of forming an organic polymer thin film according to claim 2, wherein each of the plurality of kinds of monomers is intermittently supplied into each of the plurality of evaporation source containers in a liquid form, from the beginning of the evaporation operation of the monomers to end of the forming operation of the organic polymer thin film on a surface of the plurality of substrates, by an amount equal to the amount that is reduced due to the evaporation, thereby allowing the plurality of kinds of monomers in a liquid form to be present in the plurality of evaporation source containers always in a constant amount. 4. The method of forming an organic polymer thin film according to claim 1, the plurality of kinds of monomers are aliphatic diisocyanate and aliphatic diamine. 5. The method of forming an organic polymer thin film according to claim 1, wherein the organic polymer thin film is any one of an aliphatic polyurea film, an aliphatic polyamide film, a polyester film, and a polyurethane film.
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이 특허에 인용된 특허 (4)
Bittner Hans J. (Ingelheim DEX) Klein Hans-Jrgen (Bad Gandersheim DEX) Kpper Thomas (Bad Gandersheim DEX) Mrsen Ewald (Mrfelden DEX), Apparatus for supplying CVD coating devices.
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