[특허]Laser irradiation method and laser irradiation apparatus

Laser irradiation method and laser irradiation apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B23K-026/06 H01L-021/84 B23K-026/073 H01L-027/12
출원번호	US-0899983 (2010-10-07)
등록번호	US-9296068 (2016-03-29)
우선권정보	JP-2004-092933 (2004-03-26)
발명자 / 주소	Tanaka, Koichiro Yamamoto, Yoshiaki
출원인 / 주소	Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소	Robinson, Eric J.
인용정보	피인용 횟수 : 0 인용 특허 : 123

초록 ▼

An object of the present invention is to provide a laser irradiation method and a laser irradiation apparatus for irradiating an irradiation surface with a linear beam having more homogeneous intensity by blocking a low-intensity part of the linear beam without forming the fringes due to the diffraction on the irradiation surface. In the laser irradiation, a laser beam emitted from a laser oscillator 101 passes through a slit 102 so as to block a low-intensity part of the laser beam, the traveling direction of the laser beam is bent by a mirror 103, and an image formed at the slit is projected to an irradiation surface 106 by a convex cylindrical lens 104.

대표청구항 ▼

1. A laser irradiation method comprising: blocking a low-intensity part of a first laser beam emitted from a laser oscillator which is either a YAG laser or a YVO4 laser to form a second laser beam, by making the first laser beam pass through a slit;bending a traveling direction of the second laser beam by a predetermined angle by a mirror; andprojecting an image formed at the slit to an irradiation surface by a convex cylindrical lens,wherein the second laser beam is shaped into a linear beam on the irradiation surface,wherein the slit, the convex cylindrical lens, and the irradiation surface are arranged so that a distance (M1) between the slit and the convex cylindrical lens and a distance (M2) between the convex cylindrical lens and the irradiation surface satisfy following equations 1 and 2: M1=f(s+D)/D [Equation 1]M2=f(s+D)/s [Equation 2]where s is a width of the slit, D is a length of the linear beam in a long-side direction, and f is a focal length of the convex cylindrical lens,wherein the mirror is provided between the slit and the convex cylindrical lens,wherein the convex cylindrical lens acts in the long-side direction of the linear beam, andwherein the slit acts in the long-side direction of the linear beam. 2. The laser irradiation method according to claim 1, wherein a second convex cylindrical lens is provided between the convex cylindrical lens and the irradiation surface in such a way that the second convex cylindrical lens is rotated by 90° from the convex cylindrical lens. 3. A laser irradiation apparatus comprising: a laser oscillator which is either a YAG laser or a YVO4 laser;a slit for blocking a low-intensity part of a first laser beam emitted from the laser oscillator to form a second laser beam;a mirror for bending a traveling direction of the second laser beam by a predetermined angle; anda convex cylindrical lens for projecting to an irradiation surface an image formed at the slit in which the low-intensity part is blocked,wherein the second laser beam is shaped into a linear beam on the irradiation surface,wherein the slit, the convex cylindrical lens, and the irradiation surface are arranged so that a distance (M1) between the slit and the convex cylindrical lens and a distance (M2) between the convex cylindrical lens and the irradiation surface satisfy following equations 1 and 2: M1=f(s+D)/D [Equation 1]M2=f(s+D)/s [Equation 2]where s is a width of the slit, D is a length of the linear beam in a long-side direction, and f is a focal length of the convex cylindrical lens,wherein the mirror is provided between the slit and the convex cylindrical lens,wherein the convex cylindrical lens acts in the long-side direction of the linear beam, andwherein the slit acts in the long-side direction of the linear beam. 4. The laser irradiation apparatus according to claim 3, wherein a second convex cylindrical lens is provided between the convex cylindrical lens and the irradiation surface in such a way that the second convex cylindrical lens is rotated by 90° from the convex cylindrical lens. 5. A laser irradiation method comprising: blocking a low-intensity part of a first laser beam emitted from a laser oscillator which is either a YAG laser or a YVO4 laser to form a second laser beam, by making the first laser beam pass through a slit;bending a traveling direction of the second laser beam by a predetermined angle by a mirror; andprojecting an image formed at the slit to an irradiation surface by a convex spherical lens,wherein the second laser beam is shaped into a linear beam on the irradiation surface,wherein the slit, the convex spherical lens, and the irradiation surface are arranged so that a distance (M1) between the slit and the convex spherical lens and a distance (M2) between the convex spherical lens and the irradiation surface satisfy following equations 1 and 2: M1=f(s+D)/D [Equation 1]M2=f(s+D)/s [Equation 2]where s is a width of the slit, D is a length of the linear beam in a long-side direction, and f is a focal length of the convex spherical lens,wherein the mirror is provided between the slit and the convex spherical lens,wherein the convex spherical lens acts in the long-side direction of the linear beam, andwherein the slit acts in the long-side direction of the linear beam.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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Laser irradiation method and laser irradiation apparatus 원문보기

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Laser irradiation method and laser irradiation apparatus 원문보기

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