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Solid precursor delivery assemblies and related methods

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/24
  • C23C-016/448
출원번호 US-0504838 (2010-10-21)
등록번호 US-9297071 (2016-03-29)
국제출원번호 PCT/US2010/053557 (2010-10-21)
§371/§102 date 20120706 (20120706)
국제공개번호 WO2011/053505 (2011-05-05)
발명자 / 주소
  • Kanjolia, Ravi
  • Platts, Chris
  • Nguyen, Nam
  • Wilkinson, Mark
출원인 / 주소
  • SIGMA-ALDRICH CO. LLC
대리인 / 주소
    Harness, Dickey & Pierce, P.L.C.
인용정보 피인용 횟수 : 0  인용 특허 : 106

초록

A solid precursor delivery assembly generally includes a container having upper and lower portions and chambers defined within the container, including an inlet chamber, an outlet chamber, and first and second precursor chambers. The first and second precursor chambers are configured for holding pre

대표청구항

1. A solid precursor delivery assembly comprising: a container;at least two chambers defined within the container and configured to hold precursor material within each of the respective at least two chambers;at least two porous dividers fixedly coupled to the container and defining at least part of

이 특허에 인용된 특허 (106)

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