초록 ▼

This invention relates in part to a method for preparing a pressure vessel for receiving high purity acetylene at elevated pressure. The method involves providing a porous filler-containing pressure vessel, deep cleaning the porous filler-containing pressure vessel, purifying a solvent, and charging

This invention relates in part to a method for preparing a pressure vessel for receiving high purity acetylene at elevated pressure. The method involves providing a porous filler-containing pressure vessel, deep cleaning the porous filler-containing pressure vessel, purifying a solvent, and charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel. The pressure vessel is then charged with high purity acetylene for storage, transport and/or delivery of the high purity acetylene. The high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.

대표청구항 ▼

1. A method for storing, transporting and/or delivering high purity acetylene at elevated pressure in a pressure vessel, said method comprising: providing a porous filler-containing pressure vessel;deep cleaning the porous filler-containing pressure vessel;purifying a solvent by vacuum degassing sai

1. A method for storing, transporting and/or delivering high purity acetylene at elevated pressure in a pressure vessel, said method comprising: providing a porous filler-containing pressure vessel;deep cleaning the porous filler-containing pressure vessel;purifying a solvent by vacuum degassing said solvent in a vacuum container containing said solvent and vapor space above said solvent;charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel to provide said pressure vessel;charging said pressure vessel with high purity acetylene at elevated pressure; andstoring, transporting and/or delivering said high purity acetylene at elevated pressure in said pressure vessel. 2. The method of claim 1 wherein said high purity acetylene is delivered to a work device for use in depositing carbon and carbon-containing films, tubes and/or fibers, said high purity acetylene having less than about 1000 parts per million of atmospheric impurities. 3. An acetylene-containing pressure vessel prepared by a process comprising steps of: providing a porous filler-containing pressure vessel;deep cleaning the porous filler-containing pressure vessel;purifying a solvent by vacuum degassing said solvent in a vacuum container containing said solvent and vapor space above said solvent;charging the purified solvent into the deep cleaned porous filler-containing pressure vessel; andcharging said pressure vessel with high purity acetylene at elevated pressure. 4. The acetylene-containing pressure vessel of claim 3, wherein said high purity acetylene comprises less than about 100 parts per million (ppm) of atmospheric impurities. 5. The acetylene-containing pressure vessel of claim 3, wherein said solvent is selected from a group consisting of acetone, dimethylformamide or N-methylpyrrolidone. 6. The acetylene-containing pressure vessel of claim 3, wherein said pressure vessel comprises a cylinder. 7. The acetylene-containing pressure vessel of claim 3, wherein said porous filler is selected from a group consisting of calcium silicate, diatomaceous earth and charcoal. 8. The acetylene-containing pressure vessel of claim 3, configured in combination with a system for depositing carbon and carbon-containing films. 9. The acetylene-containing pressure vessel of claim 3, configured in combination with a vacuum degass system for purifying said solvent.