Top port multi-part surface mount silicon condenser microphone
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-023/12
H01L-021/00
H04R-011/04
H04R-031/00
H04R-019/04
H04R-023/00
B81B-007/00
H01L-023/10
H01L-021/78
H04R-019/01
H04R-019/00
B81B-003/00
출원번호
US-0836499
(2015-08-26)
등록번호
US-9338560
(2016-05-10)
발명자
/ 주소
Minervini, Anthony D.
출원인 / 주소
Knowles Electronics, LLC
대리인 / 주소
Foley & Lardner LLP
인용정보
피인용 횟수 :
3인용 특허 :
196
초록▼
A surface mount package for a micro-electro-mechanical system (MEMS) microphone die is disclosed. The surface mount package features a substrate with metal pads for surface mounting the package to a device's printed circuit board and for making electrical connections between the microphone package a
A surface mount package for a micro-electro-mechanical system (MEMS) microphone die is disclosed. The surface mount package features a substrate with metal pads for surface mounting the package to a device's printed circuit board and for making electrical connections between the microphone package and the device's circuit board. The surface mount microphone package has a cover, and the MEMS microphone die is substrate-mounted and acoustically coupled to an acoustic port provided in the surface mount package. The substrate and the cover are joined together to form the MEMS microphone, and the substrate and cover cooperate to form an acoustic chamber for the substrate-mounted MEMS microphone die.
대표청구항▼
1. A micro-electro-mechanical system (MEMS) microphone, the microphone comprising: a rigid rectangle-shaped microphone base adapted for solder reflow surface mounting and having substantially planar top and bottom surfaces, the microphone base comprising: a top core layer comprising a first non-cond
1. A micro-electro-mechanical system (MEMS) microphone, the microphone comprising: a rigid rectangle-shaped microphone base adapted for solder reflow surface mounting and having substantially planar top and bottom surfaces, the microphone base comprising: a top core layer comprising a first non-conductive layer with a first conductive layer disposed on the upper surface of the first non-conductive layer, and a second conductive layer disposed on the lower surface of the first non-conductive layer, wherein the first non-conductive layer has a predetermined coefficient of thermal expansion;a bottom core layer comprising a second non-conductive layer with a third conductive layer disposed on the upper surface of the second non-conductive layer, and a fourth conductive layer disposed on the lower surface of the second non-conductive layer, wherein the second non-conductive layer has a predetermined coefficient of thermal expansion;a passive electronic material layer disposed between the second and third conductive layers and in electrical contact with the second and third conductive layers, wherein the second and third conductive layers are patterned into electrodes;a first solder mask that defines a plurality of conductive pads in the first conductive layer;a second solder mask that defines a plurality of flat solder pads in the fourth conductive layer; andone or more electrical paths disposed completely within the microphone base,wherein the paths electrically couple one or more of the plurality of conductive pads in the first conductive layer to one or more of the solder pads in the fourth conductive layer;a MEMS microphone die mounted to the top surface of the microphone base and electrically coupled to at least one of the conductive pads in the first conductive layer; anda single-piece rectangular cover formed from a solid material and having a predetermined shape with a top portion and a substantially vertical and continuous sidewall portion that adjoins the top portion at an angle and that completely surrounds and supports the top portion, the sidewall portion having a predetermined height, an exterior sidewall surface, an interior sidewall surface, and an attachment surface, the single-piece rectangular cover comprising an acoustic port disposed in the top portion of the rectangular cover and passing completely through the rectangular cover, wherein the acoustic port is disposed in a position offset from a centerpoint of the top portion of the rectangular cover, wherein the attachment surface of the sidewall portion of the rectangular cover is aligned with and attached to a peripheral region along each edge of the top surface of the microphone base, andwherein the predetermined height of the sidewall portion of the rectangular cover, the interior sidewall surface of the sidewall portion of the rectangular cover, and an interior surface of the top portion of the rectangular cover, in cooperation with the top surface of the microphone base, define an acoustic chamber for the MEMS microphone die and provide a protective enclosure for the MEMS microphone die to reduce electromagnetic interference. 2. A MEMS microphone according to claim 1, wherein the microphone base further comprises a recess disposed therein, and the MEMS microphone die is positioned over the recess. 3. A MEMS microphone according to claim 1, wherein the microphone base further comprises an internal cavity with an aperture in the top surface of the microphone base, the internal cavity extending longitudinally within the microphone base, and the MEMS microphone die is positioned over the aperture in the top surface of the base layer. 4. A MEMS microphone according to claim 1, wherein the passive electronic material layer is a resistive material, and is electrically coupled to one or more of the plurality of conductive pads in the first conductive layer or one or more of the solder pads in the fourth conductive layer through one or more of the electrodes formed in the second and third conductive layers. 5. A MEMS microphone according to claim 1, wherein the passive electronic material layer is a capacitive dielectric material, and is electrically coupled to one or more of the plurality of conductive pads in the first conductive layer or one or more of the solder pads in the fourth conductive layer through one or more of the electrodes formed in the second and third conductive layers. 6. MEMS microphone according to claim 1, wherein a passive electrical element formed in the passive electronic material layer filters one or more of an input signal, an output signal, or input power. 7. A MEMS microphone according to claim 1, wherein the MEMS microphone die is a pressure-equalizing MEMS microphone die. 8. A MEMS microphone according to claim 1, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume within the acoustic chamber, and the acoustic port disposed in the rectangular cover is acoustically coupled to the diaphragm. 9. A MEMS microphone according to claim 8, wherein the interface between the attachment surface of the sidewall portion of the rectangular cover and the attachment region of the top surface of the substrate is sealed to maintain acoustic pressure within the front volume. 10. A MEMS microphone according to claim 1, wherein the first and second non-conductive layers comprise one or more layers of FR-4 printed circuit board material. 11. A micro-electro-mechanical system (MEMS) microphone, the microphone comprising: a rigid rectangle-shaped microphone base adapted for solder reflow surface mounting and having substantially planar top and bottom surfaces, the microphone base comprising: a top core layer comprising a first non-conductive layer with a first conductive layer disposed on the upper surface of the first non-conductive layer, and a second conductive layer disposed on the lower surface of the first non-conductive layer, wherein the first non-conductive layer has a predetermined coefficient of thermal expansion;a bottom core layer comprising a second non-conductive layer with a third conductive layer disposed on the upper surface of the second non-conductive layer, and a fourth conductive layer disposed on the lower surface of the second non-conductive layer, wherein the second non-conductive layer has a predetermined coefficient of thermal expansion;a passive electronic material layer disposed between the second and third conductive layers and in electrical contact with the second and third conductive layers, wherein the second and third conductive layers are patterned into electrodes;a first solder mask that defines a plurality of conductive pads in the first conductive layer;a second solder mask that defines a plurality of flat solder pads in the fourth conductive layer;one or more electrical paths disposed completely within the microphone base, wherein the paths electrically couple one or more of the plurality of conductive pads in the first conductive layer to one or more of the solder pads in the fourth conductive layer; andan acoustic port disposed in an interior region of the microphone base layer and passing completely through the microphone base, wherein the acoustic port is disposed in a position offset from a centerpoint of the microphone base, and wherein one of the plurality of flat solder pads in the fourth conductive layer is a metal ring that completely surrounds the acoustic port in the microphone base;a MEMS microphone die mounted to the top surface of the microphone base and electrically coupled to at least one of the conductive pads in the first conductive layer, the MEMS microphone die being disposed directly over the acoustic port in the microphone base; anda single-piece rectangular cover formed from a solid material and having a predetermined shape with a top portion and a substantially vertical and continuous sidewall portion that adjoins the top portion at an angle and that completely surrounds and supports the top portion, the sidewall portion having a predetermined height, an exterior sidewall surface, an interior sidewall surface, and an attachment surface, wherein the attachment surface of the sidewall portion of the rectangular cover is aligned with and attached to a peripheral region along each edge of the top surface of the microphone base, andwherein the predetermined height of the sidewall portion of the rectangular cover, the interior sidewall surface of the sidewall portion of the rectangular cover, and an interior surface of the top portion of the rectangular cover, in cooperation with the top surface of the microphone base, define an acoustic chamber for the MEMS microphone die and provide a protective enclosure for the MEMS microphone die to reduce electromagnetic interference. 12. A MEMS microphone according to claim 11, wherein the passive electronic material layer is a resistive material, and is electrically coupled to one or more of the plurality of conductive pads in the first conductive layer or one or more of the solder pads in the fourth conductive layer through one or more of the electrodes formed in the second and third conductive layers. 13. A MEMS microphone according to claim 11, wherein the passive electronic material layer is a capacitive dielectric material, and is electrically coupled to one or more of the plurality of conductive pads in the first conductive layer or one or more of the solder pads in the fourth conductive layer through one or more of the electrodes formed in the second and third conductive layers. 14. MEMS microphone according to claim 11, wherein a passive electrical element formed in the passive electronic material layer filters one or more of an input signal, an output signal, or input power. 15. A MEMS microphone according to claim 11, wherein the MEMS microphone die is a pressure-equalizing MEMS microphone die. 16. A MEMS microphone according to claim 11, wherein the microphone base further comprises an acoustic material that substantially blocks contaminants from passing through the acoustic port. 17. A MEMS microphone according to claim 16, wherein the acoustic material to block environmental contaminants is a film of polymeric material. 18. A MEMS microphone according to claim 16, wherein the acoustic material to block environmental contaminants is hydrophobic. 19. A MEMS microphone according to claim 11, wherein a diaphragm of the MEMS microphone die defines a front volume and a back volume within the acoustic chamber, and the acoustic port disposed in the microphone base of the substrate is acoustically coupled to the front volume. 20. A MEMS microphone according to claim 19, wherein the interface between the attachment surface of the sidewall portion of the cover and the peripheral region of the top surface of the microphone base is sealed to maintain acoustic pressure within the back volume.
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