Elevator-based tool loading and buffering system
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B65G-047/10
H01L-021/677
B65G-047/50
H01L-021/67
출원번호
US-0223553
(2014-03-24)
등록번호
US-9368382
(2016-06-14)
발명자
/ 주소
Friedman, Gerald M.
Bufano, Michael L.
Hofmeister, Christopher
Gilchrist, Ulysses
Fosnight, William
출원인 / 주소
Brooks Automation, Inc.
대리인 / 주소
Perman & Green, LLP
인용정보
피인용 횟수 :
0인용 특허 :
49
초록▼
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
대표청구항▼
1. A substrate processing apparatus comprising: a casing with a processing device within for processing substrates;a load port interface connected to the casing for loading substrates into the processing device;a carrier holding station connected to the casing, the carrier holding station being adap
1. A substrate processing apparatus comprising: a casing with a processing device within for processing substrates;a load port interface connected to the casing for loading substrates into the processing device;a carrier holding station connected to the casing, the carrier holding station being adapted for holding at least one substrate transport carrier at the load port interface; anda carrier loading and buffering system communicating with the carrier holding station for loading and unloading the at least one substrate transport carrier from the carrier holding station, wherein the carrier loading and buffering system interfaces with a first carrier transport system, capable of moving the at least one substrate transport carrier from the substrate processing apparatus to another substrate processing apparatus along a first transport path, and with a second carrier transport system capable of moving the at least one substrate transport carrier from the substrate processing apparatus to the other substrate processing apparatus along a second transport path, the carrier loading and buffering system having a buffering station that is offset from the carrier holding station and the casing, and a transport section connecting the first carrier transport system and the second carrier transport system to the carrier buffering station. 2. The apparatus according to claim 1, wherein the first and second carrier transport systems are offset relative to each other. 3. The apparatus according to claim 1, wherein the loading and buffering system spans between the first and second carrier transport systems joining the first and second carrier transport systems to each other. 4. The apparatus according to claim 1, wherein the carrier loading and buffering system has storage stations, each of which is configured for storing the at least one substrate transport carrier, and the carrier loading and buffering system has a carrier transfer interface where the carrier loading and buffering system interfaces with one or more of the first carrier transport system and the second carrier transport system for transferring the at least one substrate transport carrier between the carrier loading and buffering system and the one or more of the first carrier transport system and the second carrier transport system, and wherein the carrier transfer interface is distinct and independent from each of the storage stations. 5. The apparatus according to claim 1, wherein the carrier loading and buffering system has storage stations, each of which is configured for storing the at least one substrate transport carrier, and the carrier loading and buffering system has a carrier transfer interface where the carrier loading and buffering system interfaces with one or more of the first carrier transport system and the second carrier transport system for transferring the at least one substrate transport carrier between the carrier loading and buffering system and the one or more of the first carrier transport system and the second carrier transport system, and wherein the carrier transfer interface is not one of the storage stations of the carrier loading and buffering system. 6. The apparatus according to claim 1, wherein the casing, load port interface and carrier loading and buffering system are linearly arranged so as to be substantially parallel with a direction of travel of the first carrier transport system and the second carrier transport system adjacent the carrier loading and buffering system. 7. The apparatus according to claim 1, wherein the load port interface and carrier loading and buffering system are interposed between the first carrier transport system and the second carrier transport system and the casing. 8. The apparatus according to claim 1, wherein a substrate transport carrier orientation along the first carrier transport system and the second carrier transport system corresponds to a substrate transport carrier orientation at the load port interface. 9. The apparatus according to claim 1, wherein the carrier loading and buffering system includes an elevator configured to interface with the plurality of carrier holding stations, the first carrier transport system and the second carrier transport system. 10. A substrate processing apparatus comprising: a casing with a processing device within for processing substrates;a load port interface connected to the casing for loading substrates into the processing device;a carrier holding station connected to the casing, the carrier holding station being adapted for holding at least one substrate transport carrier at the load port interface; anda carrier loading and buffering system communicating with the carrier holding station for loading and unloading the at least one substrate transport carrier from the carrier holding station, wherein the carrier loading and buffering system includes a buffering station that is offset from the carrier holding station and the casing, a transport and one or more buffers, the transport being configured to interface with a first carrier transport system and a second carrier transport system, and the transport being disposed between the first carrier transport system and the second carrier transport system and connecting the first and second carrier transport systems to the buffering station, the transport being configured to interface with the at least one or more buffers, wherein the first carrier transport system is capable of moving the at least one substrate transport carrier from the substrate processing apparatus to another substrate processing apparatus along a first transport path, and the second carrier transport system is capable of moving the at least one substrate transport carrier from the substrate processing apparatus to the other substrate processing apparatus along a second transport path. 11. The apparatus according to claim 10, wherein the first carrier transport system and the second carrier transport system are offset vertically to each other. 12. The apparatus according to claim 10, wherein the carrier loading and buffering system spans between the first carrier transport system and the second carrier transport system joining the first carrier transport system and the second carrier transport system to each other. 13. The apparatus according to claim 10, wherein the transport is distinct and independent from each of the one or more buffers. 14. The apparatus according to claim 10, wherein the casing, load port interface and carrier loading and buffering system are linearly arranged so as to be substantially parallel with a direction of travel of the first carrier transport system and the second carrier transport system adjacent the carrier loading and buffering system. 15. The apparatus according to claim 10, wherein the load port interface and carrier loading and buffering system are interposed between the first and second carrier transport systems and the casing. 16. The apparatus according to claim 10, wherein a substrate transport carrier orientation along the first carrier transport system and the second carrier transport system corresponds to a substrate transport carrier orientation at the load port interface. 17. The apparatus according to claim 10, wherein the buffers are arranged vertically offset from one another. 18. The apparatus according to claim 10, wherein the carrier loading and buffering system includes an elevator configured to interface with the plurality of carrier holding stations, the first carrier transport system and the second carrier transport system.
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