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Robot and substrate handling apparatus including the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/677
  • B25J-019/00
  • B25J-015/00
  • B25J-011/00
출원번호 US-0643702 (2015-03-10)
등록번호 US-9381653 (2016-07-05)
우선권정보 KR-10-2014-0027896 (2014-03-10)
발명자 / 주소
  • Kim, Byeongsang
  • Park, Kang-Min
  • Park, Jungjun
  • Hwang, JaeChul
출원인 / 주소
  • SAMSUNG ELECTRONICS CO., LTD.
대리인 / 주소
    Harness, Dickey & Pierce, PLC
인용정보 피인용 횟수 : 1  인용 특허 : 45

초록

The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibrat

대표청구항

1. A robot, comprising: a main body;an arm connected to the main body;a hand connected to the arm, the hand including a hand base and a finger; anda hand bracket unit between the hand base and the finger or between the hand base and the arm, the hand bracket unit configured to damp vibration of the

이 특허에 인용된 특허 (45)

  1. Wang, Kon-Well; Liu, Yanning, Active-passive hybrid constrained layer for structural damping augmentation.
  2. Yokoyama, Kazuo; Asai, Katsuhiko; Matsukawa, Nozomu; Yamamoto, Masaki, Actuator and method for manufacturing planar electrode support for actuator.
  3. Tetsuaki Kato (Oshino JPX), Adaptive sliding mode control method for object of control including spring system.
  4. Soucy, Alan J.; Castantini, James S., Apparatus and methods for handling semiconductor wafers.
  5. Derian Gary A. (Westlake OH) Turner ; Jr. Herman E. (Welington OH) Fleming Michael W. (Lorain OH), Apparatus for mixing and dispensing two chemically reactive materials.
  6. Eaton, Homer, Automated robotic measuring system.
  7. Myers,Robert D.; Weber,Philip E.; Casey,Kevin; Kow,Cheong; Rosenberg,Steven A.; Blank,Norman, Constrained layer damper.
  8. Burkert,Wolfgang; Lenherr,Harald, Device for carrying and fastening a robot.
  9. Miyazawa,Osamu, Drive unit and an operating apparatus.
  10. Hosokawa, Akihiro, End effector assembly.
  11. Curotto, John M.; Suden, Edward M.; Gimlan, Gideon, Front-loadable refuse container having side-loading robotic arm with motors and other mass mounted at rear of container and use of same with front-loading waste-hauling vehicle having hydraulic front forks or other retractably engageable lift means.
  12. Pryadkin, Sergiy; Simonian, Dmitri, Inertial positioner and an optical instrument for precise positioning.
  13. Smits Johannes G. (Quincy MA), Integrated micromechanical piezoelectric motor.
  14. Tan, Mark, Method and apparatus for damping vibrations in a semiconductor wafer handling arm.
  15. Fairhurst, John Robert; Krampert, Jeffrey E.; Hertel, Richard J.; Muka, Richard, Method and apparatus for lifting a horizontally-oriented substrate from a cassette.
  16. Bretschneider, Jochen; Klaus, Maximilian, Method for reducing vibrations of a machine element and/or of a workpiece.
  17. Diepers Heinrich (Hoechstadt DEX) Schewe Herbert (Herzogenaurach DEX), Method of making pressure-sensitive transducer.
  18. Mo Jin-Yong,KRX, Methods and apparatus for attenuating the vibration of a robot element.
  19. Sohn, Hoon; Kim, Seungbum, Methods, apparatuses, and systems for damage detection.
  20. Min, Sung Yong; Kim, Tae Sik; Lee, Tae-Woo, Micro-pattern forming method, and micro-channel transistor and micro-channel light-emitting transistor forming method using same.
  21. Neveu, Dominique, Modular gripper.
  22. Matsumoto,Takayuki; Hosokawa,Akihiro, Multiple section end effector assembly.
  23. Kohring Mark D. (West Chester OH) Bailey Edward J. (Cincinnati OH), Oil film damper.
  24. Kamijo, Koichi; Miyazawa, Osamu; Sawada, Akihiro; Nagahama, Reiko, Piezoelectric actuator, motor, robot hand, and robot.
  25. Urano, Osamu, Piezoelectric actuator, robot hand, and robot.
  26. Churchill, David L.; Arms, Steven W., Piezoelectric composite with tapered beam.
  27. Lembke John R. (Overland Park KS), Piezoelectric film load cell robot collision detector.
  28. Culp Gordon W. (Van Nuys CA), Piezoelectric robotic articulation.
  29. Diepers Heinrich (Hoechstadt DEX) Schewe Herbert (Herzogenaurach DEX), Pressure-sensitive transducer using piezo ceramic material.
  30. Hamann, Jens; Ladra, Uwe; Sch?fers, Elmar, Production machine.
  31. Gerbi, Craig Richard; Duval, Eugene F.; Minami, Don; Hager, Bob; Salisbury, J. Kenneth; Madhani, Akhil; Stern, John; Guthart, Gary S., Removable infinite roll master grip handle and touch sensor for robotic surgery.
  32. Ferrara, Paolo, Robot arm.
  33. Suita Kazutsugu,JPX ; Yamada Yoji,JPX ; Tsuchida Nuio,JPX ; Imai Koji,JPX, Robot covered with visco-elastic material.
  34. Barsky Michael F. (301 Wall St. Blacksburg VA 24060) Linder Douglas K. (510 Sunrise Dr. Blacksburg VA 24060) Claus Richard O. (Rte. 3 Christiansburg VA 24073), Robot gripper control system using PVDF piezoelectric sensors.
  35. Lindner Douglas K. (510 Sunrise Dr. Blacksburg VA 24060) Claus Richard O. (Rte. 3 ; Box 138 Christiansburg VA 24073) Barsky Michael F. (301 Wall St. Blacksburg VA 24060), Robot gripper control system using PYDF piezoelectric sensors.
  36. Takemura, Shinichi; Ihara, Hiroyasu, Robot hand.
  37. Saracen, Michael J.; Carrano, Aaron W.; Henderson, Toby D., Robotic arm for patient positioning assembly.
  38. Saracen, Michael J.; Carrano, Aaron W.; Henderson, Toby D., Robotic arm for patient positioning assembly.
  39. Miyajima, Yoshikazu; Takashima, Tsuneo; Takabayashi, Yukio, Stage device, an exposure apparatus and a device manufacturing method using the same.
  40. Nitzsche Fred,CAX ITX K1N 6A1 ; Grewal Anant,CAX ITX K1T 3P1 ; Zimcik David,CAX ITX K2L 2G5, Structural component having means for actively varying its stiffness to control vibrations.
  41. Yamashita, Kaoru, Tactile sensor unit, robot including the tactile sensor unit, and load calculation method.
  42. Aoyagi, Kenichi; Kobayashi, Takashi; Uchida, Daisuke, Transport member.
  43. Lowrance Robert B. (Los Gatos CA), Two-axis magnetically coupled robot.
  44. Ray Francis M. (Glenview IL), Vibration damping nest for axial lead components.
  45. Norris Mark A. ; Meyers Andrew D. ; Margolis Donald L., Vibration-damped machine and control method therefor.

이 특허를 인용한 특허 (1)

  1. Kumar, Vijay; Zambri, Razman, Active fiber composite data storage device suspension.
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