Semiconductor device and method of fabricating the same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-027/14
G02F-001/1339
H01L-029/786
G02F-001/1333
H01L-027/12
G02F-001/1345
출원번호
US-0163207
(2014-01-24)
등록번호
US-9395584
(2016-07-19)
우선권정보
JP-11-191102 (1999-07-06)
발명자
/ 주소
Hirakata, Yoshiharu
Goto, Yuugo
Kobayashi, Yuko
Yamazaki, Shunpei
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Nixon Peabody LLP
인용정보
피인용 횟수 :
0인용 특허 :
154
초록▼
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the s
There is provided a high quality liquid crystal panel having a thickness with high accuracy, which is designed, without using a particulate spacer, within a free range in accordance with characteristics of a used liquid crystal and a driving method, and is also provided a method of fabricating the same. The shape of a spacer for keeping a substrate interval constant is made such that it is a columnar shape, a radius R of curvature is 2 μm or less, a height H is 0.5 μm to 10 μm, a diameter is 20 μm or less, and an angle α is 65° to 115°. By doing so, it is possible to prevent the lowering of an opening rate and the lowering of light leakage due to orientation disturbance.
대표청구항▼
1. A liquid crystal display device comprising: a first substrate in which a gate electrode, an insulating layer over the gate electrode, a semiconductor layer over the insulating layer, a source or drain electrode over the semiconductor layer, and an interlayer insulating layer over the source or dr
1. A liquid crystal display device comprising: a first substrate in which a gate electrode, an insulating layer over the gate electrode, a semiconductor layer over the insulating layer, a source or drain electrode over the semiconductor layer, and an interlayer insulating layer over the source or drain electrode are formed;a second substrate in which a spacer including a resin material is formed, the second substrate opposed to the first substrate, wherein the spacer is a single layer; anda liquid crystal layer interposed between the first substrate and the second substrate,wherein the spacer includes a region overlapping with the gate electrode, the insulating layer, the semiconductor layer, the source or drain electrode, and the interlayer insulating layer,wherein the spacer has a cross-section in which a width of a second substrate side end portion of the spacer is larger than a width of a center portion of the spacer, the width of the center portion of the spacer is larger than a width of a first substrate side end portion of the spacer, and a value obtained by dividing the width of the second substrate side end portion of the spacer by the width of the center portion of the spacer is smaller than or equal to 3, andwherein in the spacer, an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the second substrate side end portion and the surface of the second substrate. 2. The liquid crystal display device according to claim 1, wherein the spacer is a photolithographic spacer. 3. The liquid crystal display device according to claim 1, wherein the angle between the tangent plane at the center portion and the surface of the second substrate is within a range of 65° to 115°. 4. The liquid crystal display device according to claim 1, wherein the interlayer insulating layer includes a resin material. 5. The liquid crystal display device according to claim 1, wherein the spacer has a curved surface with a radius of curvature of 2 μm or less. 6. The liquid crystal display device according to claim 1, further comprising: a pixel electrode electrically connected to the source or drain electrode; anda transparent conductive film over the pixel electrode,wherein the liquid crystal layer is positioned between the pixel electrode and the transparent conductive film. 7. A liquid crystal display device comprising: a first substrate in which a gate electrode, an insulating layer over the gate electrode, a semiconductor layer over the insulating layer, a source or drain electrode over the semiconductor layer, and an interlayer insulating layer over the source or drain electrode are formed;a second substrate in which a spacer including a resin material and an alignment film over the spacer are formed, the second substrate opposed to the first substrate, wherein the spacer is a single layer; anda liquid crystal layer interposed between the first substrate and the second substrate,wherein the spacer includes a region overlapping with the gate electrode, the insulating layer, the semiconductor layer, the source or drain electrode, and the interlayer insulating layer,wherein the spacer has a cross-section in which a width of a second substrate side end portion of the spacer is larger than a width of a center portion of the spacer, the width of the center portion of the spacer is larger than a width of a first substrate side end portion of the spacer, and a value obtained by dividing the width of the second substrate side end portion of the spacer by the width of the center portion of the spacer is smaller than or equal to 2.5, andwherein in the spacer, an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the second substrate side end portion and the surface of the second substrate. 8. The liquid crystal display device according to claim 7, wherein the spacer is a photolithographic spacer. 9. The liquid crystal display device according to claim 7, wherein the angle between the tangent plane at the center portion and the surface of the second substrate is within a range of 65° to 115°. 10. The liquid crystal display device according to claim 7, wherein the interlayer insulating layer includes a resin material. 11. The liquid crystal display device according to claim 7, wherein the spacer has a curved surface with a radius of curvature of 2 μm or less. 12. The liquid crystal display device according to claim 7, further comprising: a pixel electrode electrically connected to the source or drain electrode layer; anda transparent conductive film over the pixel electrode,wherein the liquid crystal layer is positioned between the pixel electrode and the transparent conductive film. 13. A liquid crystal display device comprising: a touch panel;a first substrate in which a gate electrode, an insulating layer over the gate electrode, a semiconductor layer over the insulating layer, a source or drain electrode over the semiconductor layer, and an interlayer insulating layer over the source or drain electrode are formed;a second substrate in which a spacer including a resin material is formed, the second substrate opposed to the first substrate, wherein the spacer is a single layer; anda liquid crystal layer interposed between the first substrate and the second substrate,wherein the touch panel includes a region overlapping with the spacer,wherein the spacer includes a region overlapping with the gate electrode, the insulating layer, the semiconductor layer, the source or drain electrode, and the interlayer insulating layer,wherein the spacer has a cross-section in which a width of a second substrate side end portion of the spacer is larger than a width of a center portion of the spacer, the width of the center portion of the spacer is larger than a width of a first substrate side end portion of the spacer, and a value obtained by dividing the width of the first substrate side end portion of the spacer by the width of the center portion of the spacer is larger than or equal to 0.6, andwherein in the spacer, an angle between a tangent plane at the center portion and a surface of the second substrate is larger than an angle between a tangent plane at the second substrate side end portion and the surface of the second substrate. 14. The liquid crystal display device according to claim 13, wherein the spacer is a photolithographic spacer. 15. The liquid crystal display device according to claim 13, wherein the angle between the tangent plane at the center portion and the surface of the second substrate is within a range of 65° to 115°. 16. The liquid crystal display device according to claim 13, wherein the interlayer insulating layer includes a resin material. 17. The liquid crystal display device according to claim 13, wherein the spacer has a curved surface with a radius of curvature of 2 μm or less. 18. The liquid crystal display device according to claim 13, further comprising: a pixel electrode electrically connected to the source or drain electrode; anda transparent conductive film over the pixel electrode,wherein the liquid crystal layer is positioned between the pixel electrode and the transparent conductive film. 19. A liquid crystal display device comprising: a first substrate in which a pixel portion is formed;a second substrate in which a light shielding film is formed, the second substrate opposed to the first substrate;a sealing region surrounding the pixel portion;a liquid crystal layer interposed between the first substrate and the second substrate,wherein the pixel portion comprises a semiconductor layer, an insulating layer over the semiconductor layer, a gate electrode over the insulating layer, an interlayer insulating layer over the gate electrode, and a pixel electrode over the interlayer insulating layer,wherein a first photolithographic spacer is located in the pixel portion,wherein an alignment film is located between the first photolithographic spacer and the liquid crystal layer,wherein a second photolithographic spacer is located in the sealing region; andwherein a third photolithographic spacer is located between the sealing region and an end portion of the first substrate and outside a region surrounded by the sealing region,wherein the first photolithographic spacer includes a region over and overlapping with the semiconductor layer, the insulating layer, the gate electrode, the interlayer insulating layer, and the pixel electrode,wherein the first photolithographic spacer has a cross-section in which, a width of a first substrate side end of the first photolithographic spacer is larger than a width of a center portion of the first photolithographic spacer, and the width of the center portion of the first photolithographic spacer is larger than a width of a second substrate side end of the first photolithographic spacer,wherein an angle between a tangent plane at the center portion of the first photolithographic spacer and a surface of the first substrate is 65° to 115°,wherein a taper portion of first photolithographic spacer is formed at the first substrate side end,wherein the second photolithographic spacer has a cross-section in which, a width of a first substrate side end of the second photolithographic spacer is larger than a width of a center portion of the second photolithographic spacer, and the width of the center portion of the second photolithographic spacer is larger than a width of a second substrate side end of the second photolithographic spacer,wherein the third photolithographic spacer has a cross-section in which, a width of a first substrate side end of the third photolithographic spacer is larger than a width of a center portion of the third photolithographic spacer, and the width of the center portion of the third photolithographic spacer is larger than a width of a second substrate side end of the third photolithographic spacer,wherein the first photolithographic spacer is a single layer,wherein the second photolithographic spacer is a single layer,wherein the third photolithographic spacer is a single layer,wherein the semiconductor layer comprises polycrystalline silicon,wherein the interlayer insulating layer includes a resin material, andwherein the light shielding film overlaps with the semiconductor layer and the first photolithographic spacer. 20. The liquid crystal display device according to claim 19, further comprising a touch panel, wherein the touch panel includes a region overlapping with the first photolithographic spacer. 21. The liquid crystal display device according to claim 19, wherein a top surface of the first photolithographic spacer is a flat surface. 22. A liquid crystal display device comprising: a first substrate in which a pixel portion is formed;a second substrate in which a light shielding film is formed, the second substrate opposed to the first substrate;a sealing region surrounding the pixel portion;a liquid crystal layer interposed between the first substrate and the second substrate,wherein the pixel portion comprises a semiconductor layer, an insulating layer over the semiconductor layer, a gate electrode over the insulating layer, an interlayer insulating layer over the gate electrode, and a pixel electrode over the interlayer insulating layer,wherein a first photolithographic spacer is located in the pixel portion,wherein an alignment film is located between the first photolithographic spacer and the liquid crystal layer,wherein a second photolithographic spacer is located in the sealing region; andwherein the first photolithographic spacer includes a region over and overlapping with the semiconductor layer, the insulating layer, the gate electrode, the interlayer insulating layer, and the pixel electrode,wherein the first photolithographic spacer has a cross-section in which, a width of a first substrate side end of the first photolithographic spacer is larger than a width of a center portion of the first photolithographic spacer, and the width of the center portion of the first photolithographic spacer is larger than a width of a second substrate side end of the first photolithographic spacer,wherein an angle between a tangent plane at the center portion of the first photolithographic spacer and a surface of the first substrate is 65° to 115°,wherein a taper portion of first photolithographic spacer is formed at the first substrate side end,wherein the second photolithographic spacer has a cross-section in which, a width of a first substrate side end of the second photolithographic spacer is larger than a width of a center portion of the second photolithographic spacer, and the width of the center portion of the second photolithographic spacer is larger than a width of a second substrate side end of the second photolithographic spacer,wherein the first photolithographic spacer is a single layer,wherein the second photolithographic spacer is a single layer,wherein the semiconductor layer comprises polycrystalline silicon,wherein the interlayer insulating layer includes a resin material, andwherein the light shielding film overlaps with the semiconductor layer and the first photolithographic spacer. 23. The liquid crystal display device according to claim 22, further comprising a touch panel, wherein the touch panel includes a region overlapping with the first photolithographic spacer. 24. The liquid crystal display device according to claim 22, wherein a top surface of the first photolithographic spacer is a flat surface.
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