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Parallel single substrate processing system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/67
  • H01L-021/677
  • H01L-021/68
  • H01L-021/687
출원번호 US-0488090 (2012-06-04)
등록번호 US-9449862 (2016-09-20)
발명자 / 주소
  • Keigler, Arthur
  • Fisher, Freeman
  • Goodman, Daniel L.
출원인 / 주소
  • TEL NEXX, INC.
대리인 / 주소
    Rothwell, Figg, Ernst & Manbeck, P.C.
인용정보 피인용 횟수 : 0  인용 특허 : 132

초록

A system for processing surfaces of substrates having a process module having a process module frame and a plurality of process elements to process the substrate surfaces without contacting the substrate surfaces. A plurality of substrate holder assemblies, each having a number of substrate holders,

대표청구항

1. A system for processing surfaces of a plurality of substrates, the system comprising: a process module having a process module frame and having a plurality of process elements to fluid process substrate surfaces of the plurality of substrates without contacting the substrate surfaces;a plurality

이 특허에 인용된 특허 (132)

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