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Method and apparatus to help promote contact of gas with vaporized material

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
  • C23C-016/448
  • F17C-003/00
  • F17C-003/02
  • F17C-011/00
출원번호 US-0815805 (2015-07-31)
등록번호 US-9469898 (2016-10-18)
발명자 / 주소
  • Gregg, John N.
  • Battle, Scott L.
  • Banton, Jeffrey I.
  • Naito, Donn K.
  • Laxman, Ravi K.
출원인 / 주소
  • ENTEGRIS, INC.
인용정보 피인용 횟수 : 0  인용 특허 : 86

초록

Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may compr

대표청구항

1. A vapor delivery vessel for vaporizing and delivering vaporized source material, the vessel comprising: a peripheral vessel wall bounding an interior volume;a gas inlet and a gas outlet arranged in at least intermittent fluid communication with the interior volume, the gas inlet being adapted to

이 특허에 인용된 특허 (86)

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