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Hot tile sputtering system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/00
  • C23C-014/34
  • H01J-037/34
출원번호 US-0211257 (2014-03-14)
등록번호 US-9476117 (2016-10-25)
발명자 / 주소
  • McCabe, Ian A.
  • Harlow, Jeffrey D.
출원인 / 주소
  • Magna Mirrors of America, Inc.
대리인 / 주소
    Gardner, Linn, Burkhart & Flory, LLP
인용정보 피인용 횟수 : 0  인용 특허 : 45

초록

A method of sputter coating a glass substrate includes providing a glass substrate and providing a sputtering assembly for sputtering a coating onto the glass substrate in a vacuum deposition chamber. The sputtering assembly includes a backing plate and a separating element disposed on the backing p

대표청구항

1. A method of sputter coating a glass substrate, said method comprising: providing a glass substrate;providing a sputtering assembly for sputtering a coating material onto said glass substrate in a vacuum deposition chamber, wherein said sputtering assembly comprises a backing plate and a separatin

이 특허에 인용된 특허 (45)

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  44. Desmond John P. (Newbridge IEX) Flynn Thomas P. (Newbridge IEX) Gaffney Thomas D. (Bray IEX) Campbell James P. (Drogheda IEX) Lawlor Parick J. (Dublin IEX) McCormack John J. (Newbridge IEX) Molyneux , Vehicle rearview mirror assembly.
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