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특허 상세정보

Electronically variable capacitor and RF matching network incorporating same

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H01P-005/08    H01J-037/32    H01L-021/3065    H01L-021/02    H01L-021/285    H01L-021/311    H01L-021/3213   
출원번호 US-0594262 (2015-01-12)
등록번호 US-9496122 (2016-11-15)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    The Belles Group, P.C.
인용정보 피인용 횟수 : 2  인용 특허 : 131
초록

An RF impedance matching network includes an RF input coupled to an RF source having a fixed impedance and an RF output coupled to a plasma chamber having a variable impedance. A series electronically variable capacitor (EVC) is coupled in series between the RF input and the RF output. A shunt EVC is coupled in parallel between a ground and one of the RF input and the RF output. A control circuit is operatively coupled to the series and shunt EVCs to control first and second variable capacitances, wherein the control circuit is configured to: determine t...

대표
청구항

1. An RF impedance matching network comprising: an RF input coupled to an RF source having a fixed impedance;an RF output coupled to a plasma chamber having a variable impedance;a series electronically variable capacitor having a first variable capacitance, the series electronically variable capacitor electrically coupled in series between the RF input and the RF output;a shunt electronically variable capacitor having a second variable capacitance, the shunt electronically variable capacitor electrically coupled in parallel between a ground and one of th...

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