초록 ▼

A manufacturing method of a mask includes aligning a mask sheet including an effective area and a non-effective area, on a mask frame; applying a pressure to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, to prevent sagging of the n

A manufacturing method of a mask includes aligning a mask sheet including an effective area and a non-effective area, on a mask frame; applying a pressure to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, to prevent sagging of the non-effective area; and moving a clamping unit to the mask sheet along a direction substantially parallel to the mask sheet, to clamp the clamping unit onto the non-effective area of the mask sheet.

대표청구항 ▼

1. A mask clamping unit comprising: a clamping unit which clamps a non-effective area of a mask sheet comprising: an effective area disposed in a plane defined in first and second directions, andthe non-effective area which extends from the effective area; anda sagging prevention unit which is space

1. A mask clamping unit comprising: a clamping unit which clamps a non-effective area of a mask sheet comprising: an effective area disposed in a plane defined in first and second directions, andthe non-effective area which extends from the effective area; anda sagging prevention unit which is spaced apart from the non-effective area of the mask sheet and configured to apply a force to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, and prevents sagging of the non-effective area of the mask sheet, the sagging direction defined in a third direction perpendicular to the plane defined in the first and second directions,whereinthe effective area of the mask sheet is supported by a mask frame which disposed in the effective area, and the non-effective area is not supported by the mask frame, andthe sagging prevention unit spaced apart from the non-effective area of the mask sheet overlaps the non-effective area in the sagging direction, and sprays a gas in a direction opposite to the sagging direction and toward the non-effective area, to apply the force to the non-effective area of the mask sheet. 2. The mask clamping unit of claim 1, wherein the sagging prevention unit maintains the effective area and the non-effective substantially coplanar with each other. 3. The mask clamping unit of claim 1, wherein the clamping unit is configured to move in a direction substantially parallel to the mask sheet. 4. A mask clamping unit comprising: a clamping unit which clamps a non-effective area of a mask sheet comprising: an effective area disposed in a plane defined in first and second directions, andthe non-effective area which extends from the effective area; anda sagging prevention unit which is spaced apart from the non-effective area of the mask sheet and configured to apply a force to the non-effective area of the mask sheet in a direction opposite to a sagging direction of the non-effective area, and prevents sagging of the non-effective area of the mask sheet, the sagging direction defined in a third direction perpendicular to the plane defined in the first and second directions,whereinthe effective area of the mask sheet is supported by a mask frame which disposed in the effective area, and the non-effective area is not supported by the mask frame, andthe sagging prevention unit spaced apart from the non-effective area of the mask sheet overlaps the non-effective area in a direction opposite to the sagging direction, and draws a gas from the non-effective area and in the direction opposite to the sagging direction, to apply the force to the non-effective area of the mask sheet. 5. The mask clamping unit of claim 4, wherein the sagging prevention unit is attached to the clamping unit.