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An apparatus and method adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes an installation unit having a top ring, a clamp ring, and a base ring, and upon tighte

An apparatus and method adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes an installation unit having a top ring, a clamp ring, and a base ring, and upon tightening of the top ring onto the base ring, the elastomer band is clamped between the clamp ring and the base ring, and a clamping surface adapted to release the elastomer band on at least one of a lower surface of the clamp ring and/or an upper surface of the base ring. A latch and release mechanism, which releases the elastomer band into the mounting groove by declamping the elastomer band from between the clamp ring and the base ring.

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1. An annular installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, comprising: an installation unit comprising: a top ring, the top ring having one or more i

1. An annular installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, comprising: an installation unit comprising: a top ring, the top ring having one or more internal threads;a clamp ring;a base ring, the base ring having one or more external threads, which are configured to receive the one or more internal threads of the top ring, and upon tightening of the top ring onto the base ring, the elastomer band is clamped between a lower surface of the clamp ring and an upper surface of the base ring, and a clamping surface adapted to release the elastomer band on at least one of the lower surface of the clamp ring and/or the upper surface of the base ring; anda latch and release mechanism, which releases the elastomer band into the mounting groove by declamping the elastomer band from between the clamp ring and the base ring; anda band loader, which positions the elastomer band within the installation unit between the clamp ring and the base ring. 2. The annular installation fixture of claim 1, wherein the clamp ring is an annular ring having an upper section and a lower section, which forms a step on a lower portion of the clamp ring. 3. The annular installation fixture of claim 1, wherein the latch and release mechanism includes a first handle attached to an outer edge of the top ring, a second handle attached to an outer edge of the base ring, and a latch mechanism, which secures the top ring to the base ring. 4. The annular installation fixture of claim 1, wherein the clamping surface on the at least one of the upper surface of the base ring and/or the lower surface of the clamp ring is a non-stick coating. 5. The annular installation fixture of claim 1, wherein the clamping surface on the at least one of the upper surface of the base ring and/or the lower surface of the clamp ring is a plurality of grooves. 6. The annular installation fixture of claim 5, wherein the lower surface of the clamp ring and the upper surface of the base ring each have a plurality of grooves. 7. The annular installation fixture of claim 5, wherein the plurality of grooves extend radially from an inner edge to an outer edge of the lower surface of the clamp ring and/or an inner edge to an outer edge of the upper surface of the base ring. 8. The annular installation fixture of claim 5, wherein the plurality of grooves are not continuous. 9. The annular installation fixture of claim 5, wherein the plurality of grooves extend circumferentially around the upper surface of the base ring and/or the lower surface of the clamp ring. 10. The annular installation fixture of claim 5, wherein each of the plurality of grooves has an angled groove formed by a first angular surface and a second angular surface, and wherein each of the angled grooves forms an angle of about 10 degrees to about 170 degrees between the first angular surface and the second angular surface. 11. The annular installation fixture of claim 10, wherein the angled groove is greater than 90 degrees. 12. The annular installation fixture of claim 5, wherein the plurality of grooves has a depth of about 0.0009 to 0.0039 inches, a width from one edge of the groove to another edge of the groove of about 0.010 to 0.016 inches, and each of the plurality of grooves is spaced apart from one another by about 0.012 to 0.016 inches. 13. The annular installation fixture of claim 6, wherein the upper and lower clamping surfaces on the lower surface of the clamp ring and the upper surface of the base ring includes areas not in contact with the elastomer band when the elastomer band is clamped. 14. The annular installation fixture of claim 5, wherein the clamping surface on the lower surface of the clamp ring and/or the upper surface of the base ring has a greater surface area in contact with the elastomer band when the elastomer band is clamped than when the elastomer band is declamped. 15. The annular installation fixture of claim 5, wherein the plurality of grooves are substantially parallel or concentric. 16. The annular installation fixture of claim 1, wherein the clamp ring and the base ring are made of plastic.