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A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of th

A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.

대표청구항 ▼

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising: transferring a moving unit into a chamber utilizing a first transfer unit configured to pass through the chamber, while a substrate is fixed to the moving unit wherein the first transfer unit includes a

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising: transferring a moving unit into a chamber utilizing a first transfer unit configured to pass through the chamber, while a substrate is fixed to the moving unit wherein the first transfer unit includes a coil, the moving unit includes a magnetic rail along a central line of the moving unit, and the magnetic rail and the coil form a linear motor;depositing a deposition material radiated from a deposition assembly on the substrate and forming a layer while the first transfer unit transports the substrate relative to the deposition assembly in a first direction when the deposition assembly and the substrate are spaced apart from each other in the chamber;separating the moving unit from the substrate; andreturning the moving unit separated from the substrate utilizing a second transfer unit configured to pass through the chamber,wherein the forming of the layer comprises supporting two opposing ends of the moving unit in a second direction perpendicular to the first direction by magnetic force from a first support unit having a magnetic levitation bearing, and supporting a side of the moving unit opposite to a side close to the deposition assembly by using a second support unit, the second support unit is laterally spaced apart from the magnetic rail along the central line of the moving unit and configured to balance a gravitational force in a central part of the moving unit,wherein the magnetic levitation bearing of the first support unit comprises two side magnetic levitation bearings and two upper or two lower magnetic levitation bearings,each of the two side magnetic levitation bearings faces a respective one of the two opposing ends of the moving unit, and the two side magnetic levitation bearings are configured to form an interval between the first support unit and the moving unit by balancing an attractive or repulsive force between one of the two side magnetic levitation bearings and the respective one of the two opposing ends of the moving unit with an attractive or repulsive force between the other one of the two side magnetic levitation bearings and the other one of the two opposing ends of the moving unit; andeach of the two upper or the two lower magnetic levitation bearings is laterally spaced apart from the second support unit, and configured such that an attractive or repulsive force between the two upper or the two lower magnetic levitation bearings and the moving unit balances the gravitational force on the moving unit. 2. The method of claim 1, wherein the second support unit is placed at an upper inner space of a housing through which the moving unit is transferred when the first transfer unit transfers the moving unit, the moving unit is placed below the second support unit, andwherein the forming of the layer comprises applying an attractive force between the moving unit and the second support unit without direct contact between the moving unit and the second support unit. 3. The method of claim 2, wherein the forming of the layer comprises applying the attractive force by using a magnetic field generated by the second support unit. 4. The method of claim 3, wherein the forming of the layer comprises applying the attractive force by using the magnetic field to support the moving unit, the magnetic field being generated by an electromagnet disposed in the second support unit. 5. The method of claim 2, wherein the forming of the layer comprises measuring a distance between the second support unit and the moving unit by using a gap sensor. 6. The method of claim 5, wherein the forming of the layer comprises regulating an intensity of the attractive force which the second support unit applies to the moving unit to keep the distance between the second support unit and the moving unit constant, the distance being measured by using the gap sensor. 7. The method of claim 1, wherein the forming of the layer comprises aligning a guide rail with a guide block of the moving unit, the guide rail being placed at an upper inner space of the housing through which the moving unit is transferred when the first transfer unit transfers the moving unit. 8. The method of claim 1, wherein the forming of the layer comprises transferring the deposition material radiated from a deposition source of the deposition assembly to a deposition source nozzle unit of the deposition assembly near the first transfer unit and then to a patterning slit sheet of the deposition assembly that is arranged to face the deposition source nozzle unit and comprises a plurality of patterning slits in one direction, and depositing the deposition material on the substrate fixed to the moving unit.