Semiconductor device and manufacturing method thereof, delamination method, and transferring method
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-027/12
H01L-029/786
출원번호
US-0961043
(2015-12-07)
등록번호
US-9543337
(2017-01-10)
우선권정보
JP-2002-379578 (2002-12-27)
발명자
/ 주소
Maruyama, Junya
Takayama, Toru
Ohno, Yumiko
Yamazaki, Shunpei
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Robinson Intellectual Property Law Office
인용정보
피인용 횟수 :
1인용 특허 :
96
초록▼
A substrate and a delamination film are separated by a physical means, or a mechanical means in a state where a metal film formed over a substrate, and a delamination layer comprising an oxide film including the metal and a film comprising silicon, which is formed over the metal film, are provided.
A substrate and a delamination film are separated by a physical means, or a mechanical means in a state where a metal film formed over a substrate, and a delamination layer comprising an oxide film including the metal and a film comprising silicon, which is formed over the metal film, are provided. Specifically, a TFT obtained by forming an oxide layer including the metal over a metal film; crystallizing the oxide layer by heat treatment; and performing delamination in a layer of the oxide layer or at both of the interface of the oxide layer is formed.
대표청구항▼
1. A method for manufacturing a display device comprising the steps of: forming a metal film comprising a metal over a first substrate;forming a first insulating film comprising oxygen over the metal film, wherein an oxide layer comprising the metal is formed by oxidation at an interface between the
1. A method for manufacturing a display device comprising the steps of: forming a metal film comprising a metal over a first substrate;forming a first insulating film comprising oxygen over the metal film, wherein an oxide layer comprising the metal is formed by oxidation at an interface between the metal film and the first insulating film;forming a semiconductor element over the first insulating film;forming a second substrate over the semiconductor element; andseparating the semiconductor element adhered to the second substrate from the first substrate. 2. The method according to claim 1, wherein the metal film comprises one material selected from Ti, Ta, Mo, Nd, Ni, Co, Zr, Zn, Ru, Rh, Pd, Os, and Ir. 3. The method according to claim 1, further performing a heat treatment at 400° C. or more after forming the oxide layer. 4. The method according to claim 1, wherein the separation occurs in the oxide layer. 5. The method according to claim 1, wherein the separation occurs between the oxide layer and the metal film. 6. The method according to claim 1, further comprising steps of: transferring the semiconductor element onto a third substrate;separating the second substrate from the semiconductor element; andforming a fourth substrate over the semiconductor element after the separation of the second substrate,wherein the third substrate and the fourth substrate are flexible substrates. 7. The method according to claim 1, wherein a film thickness of the oxide layer is 0.1 nm to 5 nm. 8. The method according to claim 1, wherein the oxide layer includes crystals arranged in one direction. 9. The method according to claim 1, wherein the semiconductor element comprises a semiconductor film. 10. The method according to claim 1, further forming a second insulating film comprising nitrogen over the first insulating film. 11. A method for manufacturing a display device comprising the steps of: forming a metal film comprising tungsten over a first substrate;forming a first insulating film comprising oxygen over the metal film, wherein an oxide layer comprising the tungsten is formed by oxidation at an interface between the metal film and the first insulating film;forming a semiconductor element over the first insulating film;forming a second substrate over the semiconductor element; andseparating the semiconductor element adhered to the second substrate from the first substrate. 12. The method according to claim 11, wherein the separation occurs in the oxide layer. 13. The method according to claim 11, wherein the separation occurs between the oxide layer and the metal film. 14. A method for manufacturing a display device comprising the steps of: forming a metal film comprising tungsten over a first substrate;performing a plasma treatment to form an oxide layer over the metal film;forming a first insulating film comprising oxygen over the metal film;forming a semiconductor element over the first insulating film;forming a second substrate over the semiconductor element; andseparating the semiconductor element adhered to the second substrate from the first substrate. 15. The method according to claim 14, wherein the separation occurs in the oxide layer. 16. The method according to claim 14, wherein the separation occurs between the oxide layer and the metal film. 17. A method for manufacturing a display device comprising the steps of: forming a metal film comprising tungsten over a first substrate;forming a first insulating film comprising oxygen over the metal film, wherein an oxide layer comprising the tungsten is formed by oxidation at an interface between the metal film and the first insulating film;performing a heat treatment to increase a proportion of WO2 in the oxide layer;forming a semiconductor element over the first insulating film;forming a second substrate over the semiconductor element; andseparating the semiconductor element adhered to the second substrate from the first substrate. 18. The method according to claim 17, wherein the separation occurs in the oxide layer. 19. The method according to claim 17, wherein the separation occurs between the oxide layer and the metal film.
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