초록 ▼

The primary invention is to cool a water vapor cryopump using a Gas Balanced Brayton cycle refrigerator. The refrigerator is comprised of a compressor, a gas balanced reciprocating engine and a counterflow heat exchanger. It is connected to the cryopump through insulated transfer lines. Options incl

The primary invention is to cool a water vapor cryopump using a Gas Balanced Brayton cycle refrigerator. The refrigerator is comprised of a compressor, a gas balanced reciprocating engine and a counterflow heat exchanger. It is connected to the cryopump through insulated transfer lines. Options include a gas storage volume with valves that can adjust system pressures, a variable speed engine, gas lines between the compressor and cryopanel that by-pass the engine, and a gas line that by-passes the heat exchanger. This system can cool down and warm up rapidly, rapidly warm and cool the cryopanel without warming the engine, and reduce power input when the cryopanel heat load is reduced.

대표청구항 ▼

1. A water vapor cryopump comprising: a gas-balanced Brayton cycle refrigerator;cold gas transfer lines;a cryopanel; anda vacuum chamber containing the cryopanel;wherein the gas-balanced Brayton cycle refrigerator comprises at least a compressor,a counterflow heat exchanger, anda gas-balanced engine

1. A water vapor cryopump comprising: a gas-balanced Brayton cycle refrigerator;cold gas transfer lines;a cryopanel; anda vacuum chamber containing the cryopanel;wherein the gas-balanced Brayton cycle refrigerator comprises at least a compressor,a counterflow heat exchanger, anda gas-balanced engine. 2. A water vapor cryopump in accordance with claim 1, wherein the gas-balanced Brayton cycle refrigerator incorporates a gas storage volume,means for storing gas from the refrigerator at a high pressure, andmeans for returning gas to the refrigerator at a low pressure;wherein the gas storage volume holding all of the gas needed during normal operation to avoid venting or addition of gas to or from the gas-balanced Brayton cycle refrigerator. 3. A water vapor cryopump in accordance with claim 2, wherein an input power to the gas-balanced Brayton cycle refrigerator can be reduced by storing gas in the gas storage volume to reduce the low pressure or a pressure ratio. 4. A water vapor cryopump in accordance with claim 2, wherein an input power to the gas-balanced Brayton cycle refrigerator may be reduced to less than 50% of a maximum of the gas-balanced Brayton cycle refrigerator by reducing the low pressure or a pressure ratio. 5. A water vapor cryopump in accordance with claim 1, wherein the gas-balanced engine of the gas-balanced Brayton cycle refrigerator can be operated at a variable speed. 6. A water vapor cryopump in accordance with claim 1, wherein, for a maximum output of the compressor, a cool down time of the cryopanel is minimized by controlling a high pressure and a low pressure and engine speed. 7. A water vapor cryopump in accordance with claim 1, further comprising means for rapidly warming the cryopanel without warming the gas-balanced engine by circulating a portion of a warm gas flow from the compressor of the gas-balanced Brayton cycle refrigerator through the cryopanel while circulating a balance of the warm gas flow from the compressor through the gas-balanced engine and the heat exchanger. 8. A water vapor cryopump in accordance with claim 1, wherein a warm up time of the gas-balanced engine, the heat exchanger, insulated lines, and the cryopanel are minimized by opening a valve in a line that by-passes the heat exchanger. 9. A water vapor cryopump in accordance with claim 2, wherein a temperature difference between an inlet and an outlet of the cryopanel can be reduced by more than 40% from a maximum value at a given exit temperature. 10. A water vapor cryopump in accordance with claim 1, further comprising lines between a warm inlet and an outlet of the heat exchanger and a cryopump coil inlet and a cryopump coil outlet respectively,first valves in the lines and which are normally closed,second valves for blocking a cold gas flow through the cold gas transfer lines; anda by-pass valve between an outlet of the gas-balanced engine and an inlet of the gas-balanced engine to a return side of the heat exchanger. 11. A method of rapidly warming a water vapor cryopump, the water vapor cryopump comprising a gas-balanced Brayton cycle refrigerator;cold gas transfer lines;a cryopanel; anda vacuum chamber containing the cryopanel;wherein the gas-balanced Brayton cycle refrigerator comprises at least a compressor,a counterflow heat exchanger, anda gas-balanced engine;lines between a warm inlet and an outlet of the heat exchanger and a cryopump coil inlet and a cryopump coil outlet respectively;first valves in the lines and which are normally closed;second valves for blocking a cold gas flow through the cold gas transfer lines; anda by-pass valve between an outlet of the gas-balanced engine and an inlet of the gas-balanced to a return side of the heat exchanger;the method comprising the steps of: opening the by-pass valve;closing the second valves that block the flow through the cold gas transfer lines;opening the first valves; andrunning the gas-balanced engine. 12. A water vapor cryopump in accordance with claim 1, further comprising a connection line between a warm inlet of the heat exchanger and a cold return inlet of the heat exchanger, a first valve in the connection line and which is normally closed;a pressure relief valve which allows flow only in a direction from a warm end of the connection line to a cold end of the connection line,second valves for blocking a flow through the cold gas transfer lines; anda by-pass valve between the outlet of the gas-balanced engine and the inlet to a return side of the heat exchanger. 13. A method of rapidly warming a gas-balanced engine and a heat exchanger of a water vapor cryopump, the water vapor cryopump comprising a gas-balanced Brayton cycle refrigerator;cold gas transfer lines;a cryopanel; anda vacuum chamber containing the cryopanel;wherein the gas-balanced Brayton cycle refrigerator comprises at least a compressor,the counterflow heat exchanger, anda gas-balanced engine;a connection line between a warm inlet of the heat exchanger and a cold return inlet of the heat exchanger,a first valve in the connection line and which is normally closed;a pressure relief valve which allows flow only in a direction from a warm end of the connection line to a cold end of the connection line;second valves for blocking a flow through the cold gas transfer lines; anda by-pass valve between the outlet of the gas-balanced engine and the inlet to a return side of the exchanger; the method comprising the steps of:opening said by-pass valve;closing the second valves that block the flow through the cold gas transfer lines;opening the first valve; andrunning the gas-balanced engine.