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A robot for a substrate processing system includes a first arm and a second arm each including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion. The first arm and the second arm are each configur

A robot for a substrate processing system includes a first arm and a second arm each including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion. The first arm and the second arm are each configured to actuate between a fully retracted position and a plurality of extended positions. The end effector of the first arm is configured to support a first substrate and the end effector of the second arm is configured to support a second substrate. When the first arm and the second arm are in the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate.

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1. A robot for a substrate processing system, the robot comprising: a first arm including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the first arm is configured to actuate between

1. A robot for a substrate processing system, the robot comprising: a first arm including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the first arm is configured to actuate between a fully retracted position and a plurality of extended positions; anda second arm including a first arm portion connected to the base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the second arm is configured to actuate between a fully retracted position and a plurality of extended positions,wherein the end effector of the first arm is configured to support a first substrate and the end effector of the second arm is configured to support a second substrate, andwherein, when the first arm and the second arm are in the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate, andwherein, when the first arm and the second arm are in the fully retracted position: a connection between the second arm portion of the first arm and the end effector of the first arm is above and overlaps the second substrate; andthe first substrate is above and overlaps a connection between the second arm portion of the second arm and the end effector of the second arm. 2. The robot of claim 1, wherein, when the first arm actuates from the fully retracted position to any of the plurality of extended positions, the first substrate does not pass over the second substrate. 3. The robot of claim 1, wherein, when the first arm and the second arm are in the fully retracted positions: the first arm portion of the first arm and the first arm portion of the second arm are co-linear; andouter edges of the first substrate and the second substrate are located within a circle defined by radially outermost portions of the first arm portion of the first arm and the first arm portion of the second arm. 4. A robot for a substrate processing system, the robot comprising: a first arm including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the first arm is configured to actuate between a fully retracted position and a plurality of extended positions;a second arm including a first arm portion connected to the base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the second arm is configured to actuate between a fully retracted position and a plurality of extended positions,wherein the end effector of the first arm is configured to support a first substrate and the end effector of the second arm is configured to support a second substrate, andwherein, when the first arm and the second arm are in the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate; anda drive mechanism configured to couple rotation of the first arm portion of the first arm relative to the base in a first rotational direction to rotation of (i) the second arm portion of the first arm relative to the first arm portion of the first arm in a second rotational direction opposite to the first rotational direction and (ii) rotation of the end effector of the first arm relative to the second arm portion of the first arm in the first rotational direction. 5. The robot of claim 4, wherein the drive mechanism includes: a first motor;a second motor; anda common motor,wherein rotation of the first motor extends and retracts the first and second arms relative to the base, rotation of the first motor and the second motor allows extension and retraction of the first arm or the second arm relative to the base, and rotation of the common motor rotates the first arm and the second arm relative to the base without extension or retraction. 6. The robot of claim 4, wherein the drive mechanism is further configured to couple rotation of the first arm portion of the second arm relative to the base in the second rotational direction to rotation of (i) the second arm portion of the second arm relative to the first arm portion of the second arm in the first rotational direction and (ii) rotation of the end effector of the second arm relative to the second arm portion of the second arm in the second rotational direction. 7. The robot of claim 6, wherein when the drive mechanism rotates the first arm portion of the first arm by a first angle relative to the base, the drive mechanism (i) rotates the second arm portion of the first arm by a second angle relative to the first arm portion of the first arm and (ii) rotates the end effector of the first arm by a third angle relative to the second arm portion of the first arm. 8. The robot of claim 7, wherein the first angle is greater than the second angle, and the second angle is greater than the third angle. 9. The robot of claim 8, wherein the second angle is one half of the first angle and the third angle is one half of the second angle. 10. A method for controlling a robot for a substrate processing system, the method comprising: selectively actuating a first arm between a fully retracted position and a plurality of extended positions, the first arm including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the end effector of the first arm is configured to support a first substrate; andselectively actuating a second arm between a fully retracted position and a plurality of extended positions, the second arm including a first arm portion connected to the base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the second arm is configured to support a second substrate,wherein, when the first arm and the second arm are actuated to the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate, andwherein, when the first arm and the second arm are in the fully retracted position: a connection between the second arm portion of the first arm and the end effector of the first arm is above and overlaps the second substrate; andthe first substrate is above and overlaps a connection between the second arm portion of the second arm and the end effector of the second arm. 11. The method of claim 10, wherein selectively actuating the first arm includes actuating the first arm from the fully retracted position to any of the plurality of extended positions without the first substrate passing over the second substrate. 12. The method of claim 10, wherein, when the first arm and the second arm are in the fully retracted position: the first arm portion of the first arm and the first arm portion of the second arm are co-linear; andouter edges of the first substrate and the second substrate are located within a circle defined by radially outermost portions of the first arm portion of the first arm and the first arm portion of the second arm. 13. A method for controlling a robot for a substrate processing system, the method comprising: selectively actuating a first arm between a fully retracted position and a plurality of extended positions, the first arm including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the end effector of the first arm is configured to support a first substrate;selectively actuating a second arm between a fully retracted position and a plurality of extended positions, the second arm including a first arm portion connected to the base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion, wherein the second arm is configured to support a second substrate,wherein, when the first arm and the second arm are actuated to the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate; andcoupling rotation of the first arm portion of the first arm relative to the base in a first rotational direction to rotation of (i) the second arm portion of the first arm relative to the first arm portion of the first arm in a second rotational direction opposite to the first rotational direction and (ii) rotation of the end effector of the first arm relative to the second arm portion of the first arm in the first rotational direction. 14. The method of claim 13, further comprising rotating a first motor to extend and retract the first arm and the second arm relative to the base, rotating the first motor and a second motor to extend and retract the first arm or the second arm relative to the base, and rotating a common motor to rotate the first arm and the second arm relative to the base without extension or retraction. 15. The method of claim 13, further comprising coupling rotation of the first arm portion of the second arm relative to the base in the second rotational direction to rotation of (i) the second arm portion of the second arm relative to the first arm portion of the second arm in the first rotational direction and (ii) rotation of the end effector of the second arm relative to the second arm portion of the second arm in the second rotational direction. 16. The method of claim 15, wherein rotating the first arm portion of the first arm by a first angle relative to the base includes (i) rotating the second arm portion of the first arm by a second angle relative to the first arm portion of the first arm and (ii) rotating the end effector of the first arm by a third angle relative to the second arm portion of the first arm. 17. The method of claim 16, wherein the first angle is greater than the second angle, and the second angle is greater than the third angle. 18. The method of claim 17, wherein the second angle is one half of the first angle and the third angle is one half of the second angle.