Efficient polarization independent single photon detector
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-039/10
H01L-039/02
G01J-001/42
출원번호
US-0698442
(2015-04-28)
등록번호
US-9577175
(2017-02-21)
발명자
/ 주소
Nam, Sae Woo
Baek, Burm
Marsili, Francesco
Verma, Varun
출원인 / 주소
THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
대리인 / 주소
Hain, Toby D.
인용정보
피인용 횟수 :
0인용 특허 :
4
초록▼
An apparatus includes a base layer; and a superconducting nanowire disposed on the base layer in a continuous meander pattern and including an amorphous metal-metalloid alloy such that the apparatus is configured to detect single photons, and the continuous meander pattern includes: a plurality of p
An apparatus includes a base layer; and a superconducting nanowire disposed on the base layer in a continuous meander pattern and including an amorphous metal-metalloid alloy such that the apparatus is configured to detect single photons, and the continuous meander pattern includes: a plurality of parallel line segments; and a plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment. A method for making an apparatus for detecting single photons includes forming a base layer; forming a superconducting layer on the base layer; patterning the superconducting layer; and forming a continuous meander pattern from the superconducting layer, the continuous meander pattern includes a plurality of parallel line segments; and a plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment; and forming a dielectric layer on the continuous meander pattern, the dielectric layer including a dielectric material that is substantially transparent to a predetermined photon wavelength, wherein the apparatus is configured to detect single photons.
대표청구항▼
1. An apparatus comprising: a base layer; anda superconducting nanowire disposed on the base layer in a continuous meander pattern and comprising an amorphous metal-metalloid alloy such that the apparatus is configured to detect single photons, andthe continuous meander pattern comprises: a pluralit
1. An apparatus comprising: a base layer; anda superconducting nanowire disposed on the base layer in a continuous meander pattern and comprising an amorphous metal-metalloid alloy such that the apparatus is configured to detect single photons, andthe continuous meander pattern comprises: a plurality of parallel line segments; anda plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment. 2. The apparatus of claim 1, further comprising a dielectric layer disposed on the superconducting nanowire and interposed between the base layer and the superconducting nanowire. 3. The apparatus of claim 2, wherein the amorphous metal-metalloid alloy comprises an alloy of tungsten and silicon. 4. The apparatus of claim 3, wherein the alloy of tungsten and silicon comprises 20 mole percent to 30 mole percent silicon. 5. The apparatus of claim 2, wherein the dielectric layer comprises an oxide of silicon and a nitride of silicon. 6. The apparatus of claim 1, wherein the dielectric layer comprises a transparent material that comprises an oxide, a nitride, and a fluoride. 7. The apparatus of claim 1, wherein the dielectric layer comprises a semiconductor that comprises silicon or germanium. 8. The apparatus of claim 1, wherein the apparatus is configured to detect single photons comprising a photon wavelength from 300 nanometers to 3,000 nanometers. 9. The apparatus of claim 8, wherein the photon wavelength is from 800 nanometers to 2,000 nanometers. 10. The apparatus of claim 9, wherein the photon wavelength is from 1050 nanometers to 1600 nanometers. 11. The apparatus of claim 8, wherein the photon wavelength is from 1800 nanometers to 2400 nanometers. 12. The apparatus of claim 1, wherein the apparatus is configured to detect single photons comprising a photon wavelength from 2000 nanometers to 8000 nanometers. 13. The apparatus of claim 1, further comprising an electrical inductor component electrically connected to the superconducting nanowire, wherein the electrical inductor component comprises an inductance that is greater than an inductance of the superconducting nanowire. 14. The apparatus of claim 13, wherein the inductance of the inductor component is at least 8 times the inductance of the superconducting nanowire. 15. The apparatus of claim 1, wherein the base layer is deposited on an alternating layer of silicon oxide and silicon nitride. 16. The apparatus of claim 15, wherein the alternating layer of silicon oxide and silicon nitride are deposited on a mirror layer that comprises a metal. 17. The apparatus of claim 1, wherein a width of the superconducting nanowire is from 3 nanometers to 3,000 nanometers. 18. The apparatus of claim 2, wherein a thickness of the dielectric layer is from 3 nanometers to 3,000 nanometers. 19. The apparatus of claim 1, further comprising a detection area that comprises the continuous meander pattern and that has a size that is greater than or equal to 125 square micrometers. 20. A method for making an apparatus for detecting single photons, the method comprising: forming a base layer;forming a superconducting layer on the base layer;patterning the superconducting layer; andforming a continuous meander pattern from the superconducting layer, the continuous meander pattern comprising: a plurality of parallel line segments; anda plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment; andforming a dielectric layer on the continuous meander pattern, the dielectric layer comprising a dielectric material that is substantially transparent to a predetermined photon wavelength,wherein the apparatus is configured to detect single photons.
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