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Precursor delivery system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/44
  • C23C-016/448
출원번호 US-0404700 (2012-02-24)
등록번호 US-9593416 (2017-03-14)
발명자 / 주소
  • Fondurulia, Kyle
  • Shero, Eric
  • Verghese, Mohith E.
  • White, Carl L.
출원인 / 주소
  • ASM AMERICA, INC.
대리인 / 주소
    Knobbe, Martens, Olson & Bear, LLP
인용정보 피인용 횟수 : 0  인용 특허 : 45

초록

A precursor source vessel comprises a vessel body, a passage within the vessel body, and a valve attached to a surface of the body. An internal chamber is adapted to contain a chemical reactant, and the passage extends from outside the body to the chamber. The valve regulates flow through the passag

대표청구항

1. A chemical reactant source vessel comprising; a container body;a lid adapted to engage the container body, the container body and the lid together defining an internal chamber adapted to contain a solid or liquid chemical reactants wherein a width of the lid is greater than an overall height of t

이 특허에 인용된 특허 (45)

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