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A liquid delivery system for a substrate processing system includes a liquid ampoule to store liquid precursor. A pressure adjusting system adjusts pressure in the liquid ampoule. A pressure sensor senses a pressure in the liquid ampoule. A capillary injector includes a capillary tube in fluid commu

A liquid delivery system for a substrate processing system includes a liquid ampoule to store liquid precursor. A pressure adjusting system adjusts pressure in the liquid ampoule. A pressure sensor senses a pressure in the liquid ampoule. A capillary injector includes a capillary tube in fluid communication with an output of the liquid ampoule. A temperature control device controls a temperature of the capillary tube. A first valve has an input connected to the capillary tube. A controller is configured to determine a predetermined pressure in the liquid ampoule corresponding a desired flow rate and a predetermined temperature of the capillary tube, maintain the temperature of the capillary tube at the predetermined temperature, communicate with the pressure sensor and the pressure adjusting system, and control the pressure in the liquid ampoule to the predetermined pressure to provide the desired flow rate.

대표청구항 ▼

1. A liquid delivery system for a substrate processing system, comprising: a liquid ampoule to store liquid precursor;a pressure adjusting system to adjust pressure in the liquid ampoule;a pressure sensor to sense a pressure in the liquid ampoule;a capillary injector comprising: a capillary tube in

1. A liquid delivery system for a substrate processing system, comprising: a liquid ampoule to store liquid precursor;a pressure adjusting system to adjust pressure in the liquid ampoule;a pressure sensor to sense a pressure in the liquid ampoule;a capillary injector comprising: a capillary tube in fluid communication with an output of the liquid ampoule;a temperature control device to control a temperature of the capillary tube; anda first valve having an input connected to the capillary tube; anda controller that: for a desired flow rate in the liquid ampoule, determines a relationship between a desired pressure in the liquid ampoule and the desired flow rate at a predetermined temperature of the capillary tube,maintains a temperature of the capillary tube at the predetermined temperature,communicates with the pressure sensor and the pressure adjusting system, andcontrols a pressure in the liquid ampoule to the desired pressure to provide the desired flow rate; anda liquid flow meter in fluid communication with an output of the liquid ampoule and an input of the capillary tube to measure an actual flow rate, wherein when the actual flow rate is not equal to the desired flow rate, the controller adjusts the pressure in the liquid ampoule using the pressure adjusting system, andwherein when the actual flow rate is equal to the desired flow rate after the adjusting of the pressure in the liquid ampoule, the controller updates the desired pressure corresponding to the desired flow rate based on the adjusting. 2. The liquid delivery system of claim 1, further comprising a vaporizer having a first input in fluid communication with an output of the first valve. 3. The liquid delivery system of claim 1, wherein the pressure adjusting system comprises: a vacuum source and a second valve in fluid communication with the liquid ampoule to selectively reduce the pressure in the liquid ampoule; anda push gas source and a third valve in fluid communication with the liquid ampoule to selectively increase the pressure in the liquid ampoule. 4. The liquid delivery system of claim 3, further comprising: a first restricted orifice arranged between the vacuum source and the second valve; anda second restricted orifice arranged between the vacuum source and the third valve. 5. The liquid delivery system of claim 3, further comprising a filter arranged between outputs of the second valve and the third valve and the liquid ampoule. 6. The liquid delivery system of claim 1, wherein the temperature control device comprises a Peltier device. 7. The liquid delivery system of claim 1, further comprising a second valve arranged between the liquid flow meter and the capillary injector, wherein the second valve selectively injects purge gas into the capillary tube. 8. The liquid delivery system of claim 1, wherein the controller generates and stores a table including a plurality of desired pressures for the liquid ampoule and a corresponding plurality of desired flow rates. 9. A method for liquid delivery in a substrate processing system, comprising: storing liquid precursor in a liquid ampoule;providing a capillary injector that includes a capillary tube and a first valve having an input connected to the capillary tube;for a desired flow rate in the liquid ampoule, determining a relationship between a desired pressure in the liquid ampoule and the desired flow rate at a predetermined temperature of the capillary tube;maintaining a temperature of the capillary tube at the predetermined temperature; andcontrolling a pressure in the liquid ampoule to the desired pressure to achieve the desired flow rate;measuring an actual flow rate at an output of the liquid ampoule using a liquid flow meter;adjusting the pressure in the liquid ampoule when the actual flow rate is not equal to the desired flow rate; andupdating the desired pressure corresponding to the desired flow rate based on the adjusting of the pressure in the liquid ampoule when the actual flow rate is equal to the desired flow rate after the adjusting. 10. The method of claim 9, further comprising: vaporizing liquid received from an output of the first valve. 11. The method of claim 9, wherein adjusting the pressure comprises: selectively opening a second valve to a vacuum source to reduce the pressure in the liquid ampoule; andselectively opening a third valve to a push gas source to increase the pressure in the liquid ampoule. 12. The method of claim 11, further comprising: arranging a first restricted orifice between the vacuum source and the second valve; andarranging a second restricted orifice between the vacuum source and the third valve. 13. The method of claim 11, further comprising arranging a filter arranged between outputs of the second valve and the third valve and the liquid ampoule. 14. The method of claim 9, further comprising adjusting the temperature of the capillary tube using a Peltier device. 15. The method of claim 9, further comprising arranging a second valve between the liquid flow meter and the capillary injector, wherein the second valve selectively injects purge gas into the capillary tube. 16. The method of claim 9, further comprising generating a table including a plurality of desired pressures for the liquid ampoule and a corresponding plurality of desired flow rates.