초록 ▼

The invention relates to a micro pilot valve 1, which is characterized by a micro cavity 2, which is connected with valve outlet 3, a first micro opening 4 between micro cavity 2 and a first pressure level 5, a second micro opening 6 between micro cavity 2 and a second pressure level 7, a sealing el

The invention relates to a micro pilot valve 1, which is characterized by a micro cavity 2, which is connected with valve outlet 3, a first micro opening 4 between micro cavity 2 and a first pressure level 5, a second micro opening 6 between micro cavity 2 and a second pressure level 7, a sealing element 8 within micro cavity 2, which is movable between the micro openings, and which in a first end position closes micro opening 4 and in a second end position micro opening 6, whereas the control pressure in the first end position adopts the value of the second pressure level 7 and in the second end position the value of the first pressure level 5, and a micro actuator 10, which actuates sealing element 8 via a transfer element, which protrudes at least through one of the micro openings.

대표청구항 ▼

1. Micro pilot valve (1) for generating a control pressure at a valve outlet (3), characterized by a micro cavity (2), which is connected to valve outlet (3)a first micro opening (4) in the cavity, which acts as a first valve seat and is connected to a first pneumatic pressure level (5),a second mic

1. Micro pilot valve (1) for generating a control pressure at a valve outlet (3), characterized by a micro cavity (2), which is connected to valve outlet (3)a first micro opening (4) in the cavity, which acts as a first valve seat and is connected to a first pneumatic pressure level (5),a second micro opening (6) in the cavity, which acts as a second valve seat and is connected to a second pneumatic pressure level (7),a sealing element (8) within micro cavity (2), which is movable between the micro openings, and which in a first position closes the first micro opening (4) and in a second position closes the second micro opening (6), wherein in the first position the control pressure adopts the value of the second pneumatic pressure level (7) and in the second position the value of the first pneumatic pressure level (5),and a micro actuator (10) outside the micro cavity, which actuates the sealing element (8) via a rod (9), which protrudes at least through one of the micro openings, wherein in the second position the rod (9) presses on the sealing element (8) whereas in the first position the rod (9) is lifted off from the sealing element (8). 2. Micro pilot valve according to claim 1, characterized in, that micro actuator (10) is designed as a piezo bending actuator. 3. Micro pilot valve according to claim 1, characterized in, that the first pneumatic pressure level (5) is lower than the second pneumatic pressure level (7) and that the first micro opening (4) comprises a larger cross section than the second micro opening (6). 4. Micro pilot valve according to claim 1, characterized in, that the first pneumatic pressure level (4) is lower than the second pneumatic pressure level (7), and that micro opening (4) comprises a larger cross section than micro opening (6), and that micro opening (6) comprises a diameter between 100 micrometer and 300 micrometer and micro opening (4) comprises a diameter between 200 micrometer and 500 micrometer. 5. Micro pilot valve according to claim 1, characterized in, that the first pneumatic pressure level (5) is lower than the second pneumatic pressure level (7) and transfer element (9) protrudes through micro opening (4). 6. Micro pilot valve according to claim 1, characterized in, that sealing element (8) is a sphere. 7. Micro pilot valve (1) according to claim 1, characterized in, that the valve outlet (3) is connected to a pneumatically controlled valve, which controls fluids or gases or discharges gaseous or liquid substances as a free jet. 8. A system characterized in that an array of micro pilot valves (1), each according to claim 7, actuates an array of pneumatically driven valves to control fluids and gases or to dose, dispense or free-jet apply gaseous or liquid substances.