Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01B-009/02
G01B-011/02
G01B-011/24
출원번호
US-0713150
(2015-05-15)
등록번호
US-9677871
(2017-06-13)
우선권정보
DE-10 2012 111 008 (2012-11-15)
발명자
/ 주소
Schönleber, Martin
Michelt, Berthold
Kunkel, Matthias
출원인 / 주소
Precitec Optronik Gmbh
대리인 / 주소
Taylor English Duma LLP
인용정보
피인용 횟수 :
2인용 특허 :
32
초록▼
The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferom
The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fiber array with i fibers of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.
대표청구항▼
1. An optical measuring process for acquiring a surface topography of a measurement object comprising the following steps: providing a measuring device with a plurality of measurement channels, i being a value equal to a total number of measurement channels of the plurality of measurement channels,
1. An optical measuring process for acquiring a surface topography of a measurement object comprising the following steps: providing a measuring device with a plurality of measurement channels, i being a value equal to a total number of measurement channels of the plurality of measurement channels, the measuring device comprising a measuring head in a measuring head guide device for chromatic confocal acquisition of the surface topography;applying spectrally broadband light of a light source from a fibre array with i fibres of i measurement channels via a common measuring head optic, with formation of a spot array of i measurement spots on the measurement object;acquiring and digitizing of i reflection spectra of the i measurement channels; andevaluating the digitized reflection spectra with removal of time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device;whereby the following evaluation steps are also performed to remove time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device: acquiring of geometric distance values (a, b, c) of the i measurement channels at time t(j);acquiring of three-dimensional position values for the i measurement spots on a measurement object surface at time t(j);acquiring of a local inclination of the measurement object surface relative to the measuring head;correcting of time variations in systematic measurement errors based on the acquired inclination;creating of local topographies for the redundant i measurement channels;correlating of the local topographies with separation of time-related deviation movements of the measuring head guide device by separating inconsistencies of a sensor track and inconsistencies of a sensor orientation of the measuring head in the measuring head guide device from the true surface topography andoutputting an adjusted surface topography and a real track and orientation of the measuring head guide device of the measuring head. 2. The optical measuring process in accordance with claim 1, whereby the time-related deviation movements of the measuring head guide device are acquired by means of a three-dimensional acceleration sensor on the measuring head and the measurement values of the surface topography are corrected accordingly. 3. An optical measuring process for acquiring a surface topography of a measurement object comprising the following steps: providing a measuring device with a plurality of measurement channels, i being a value equal to a total number of measurement channels of the plurality of measurement channels, the measuring device comprising a measuring head in a measuring head guide device for spectral interferometric OCT acquisition of the distance to the surface topography;applying spectrally broadband light of a light source from a fibre array with i fibres of i measurement channels via a common measuring head optic with formation of a spot array of i measurement spots on the measurement object;acquiring and digitization of i reflection spectra of the i measurement channels; andevaluating the digitized reflection spectra with removal of time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device (5);whereby the following evaluation steps are also performed to remove time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device: acquiring of geometric distance values (a, b, c) of the i measurement channels at time t(j);acquiring of three-dimensional position values for the i measurement spots on a measurement object surface at time t(j);acquiring of a local inclination of the measurement object surface relative to the measuring head;correcting of time variations in systematic measurement errors based on the acquired inclination;creating of local topographies for the redundant i measurement channels;correlating of the local topographies with separation of time-related deviation movements of the measuring head guide device by separating inconsistencies of a sensor track and inconsistencies of a sensor orientation of the measuring head in the measuring head guide device from the true surface topography andoutputting an adjusted surface topography and a real track and orientation of the measuring head guide device of the measuring head. 4. The optical measuring process in accordance with claim 3, whereby to acquire the local inclination of the measurement object surface relative to the measuring head at least three measurement spots of a triangle are projected onto the measuring object surface. 5. The optical measuring process in accordance with claim 4, whereby to acquire the local inclination of the measurement object surface relative to the measuring head at least three measurement spots of an equilateral triangle are projected onto the measuring object surface and the inclination is determined from distance values between the measurement spots. 6. The optical measuring process in accordance with claim 3, whereby the time-related deviation movements of the measuring head guide device are acquired by means of a three-dimensional acceleration sensor on the measuring head and the measurement values of the surface topography are corrected accordingly. 7. The optical measuring process in accordance with claim 3, whereby using a vector model measuring head movements are acquired by means of determining the yawing, pitching, and rolling of the measurement head on the measuring head guide device. 8. The optical measuring process in accordance with claim 3, whereby a differential scanning process comprising the following steps is used: determining of local slopes of the measurement object surface by calculating the difference in height between i measurement spots andintegrating the totality of the local slopes into a surface topography. 9. The optical measuring process in accordance with claim 8, whereby the differential scanning process acquires path differences between two measurement spots of a measurement head with a fibre end and the measurement spots of two focusing lenses, and whereby the difference in optical path to the two measurement spots is measured by means of spectral interferometry (OCT). 10. The optical measuring process in accordance with claim 3, whereby measurement spots arranged in a line in the direction of scanning are positioned at different distances. 11. The optical measuring process in accordance with claim 3, whereby consecutive scanning pulses follow one another at different time intervals. 12. The optical measuring process in accordance with claim 3, whereby the measurement spots are scanned at different clock speeds. 13. An optical measuring device for acquiring a surface topography of a measurement object having: a measuring device with a plurality of measurement channels, i being a value equal to a total number of measurement channels of the plurality of measurement channels, the measuring device comprising a measuring head in a measuring head guide device for spectral interferometric OCT acquisition of the distance to the surface topography;a spectrally broadband light source that supplies i fibres with broadband light via i Y-couplers;a fibre array with the i fibres for i measurement channels arranged in the measuring head;a common measuring head optic that forms a spot array with i measurement spots on the measurement object;means for acquiring and digitizing i reflection spectra of the i measurement channels in i spectrometers andan evaluation unit for the digitized i reflection spectra for removing time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device;wherein the optical measuring device comprises the following means for removing time variations in systematic measurement errors and time-related deviation movements of the measuring head guide device from the i reflection spectra: means designed for acquiring geometric distance values of the i measurement channels at time t(j);means designed for acquiring three-dimensional position values for the i measurement spots on the measurement object surface at time t(j);means designed for acquiring a local inclination of the measurement object surface relative to the measuring head;means designed for correcting time variations in systematic measurement errors based on the acquired inclination;means designed for creating local topographies for the redundant i measurement channels;means designed for correlating the local topographies with removal of time-related deviation movements of the measuring head guide device by separating inconsistencies of a sensor track and inconsistencies of a sensor orientation of the measuring head in the measuring head guide device from the true surface topography;means designed for outputting an adjusted surface topography andmeans designed for outputting a real track and a real orientation of the measuring head guide device. 14. The optical measuring device in accordance with claim 13, whereby the i measurement channels are connected via a multiplexer to a spectrometer. 15. The optical precision measuring device in accordance with claim 14, whereby the measuring head is designed such that the distance values of the channels assume a fixed order of priority.
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