Apparatus and methods for photoacoustic measurement of light absorption of particulate and gaseous species
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01N-021/00
G01N-029/24
G01N-029/02
출원번호
US-0290706
(2016-10-11)
등록번호
US-9696283
(2017-07-04)
발명자
/ 주소
Yu, Zhenhong
Kebabian, Paul L.
Brown, William
Assif, James
출원인 / 주소
Aerodyne Research, Inc.
대리인 / 주소
Cesari and McKenna, LLP
인용정보
피인용 횟수 :
0인용 특허 :
12
초록▼
In one embodiment, a photoacoustic effect measurement instrument for measuring a species (e.g., a species of PM) in a gas employs a pair of differential acoustic cells including a sample cell that receives sample gas including the species, and a reference cell that receives a filtered version of the
In one embodiment, a photoacoustic effect measurement instrument for measuring a species (e.g., a species of PM) in a gas employs a pair of differential acoustic cells including a sample cell that receives sample gas including the species, and a reference cell that receives a filtered version of the sample gas from which the species has been substantially removed. An excitation light source provides an amplitude modulated beam to each of the acoustic cells. An array of multiple microphones is mounted to each of the differential acoustic cells, and measures an acoustic wave generated in the respective acoustic cell by absorption of light by sample gas therein to produce a respective signal. The microphones are isolated from sample gas internal to the acoustic cell by a film. A preamplifier determines a differential signal and a controller calculates concentration of the species based on the differential signal.
대표청구항▼
1. A photoacoustic effect measurement instrument for measuring a species in a gas, comprising: a pair of differential acoustic cells including a sample cell configured to receive sample gas including the species, anda reference cell configured to receive a filtered version of the sample gas from whi
1. A photoacoustic effect measurement instrument for measuring a species in a gas, comprising: a pair of differential acoustic cells including a sample cell configured to receive sample gas including the species, anda reference cell configured to receive a filtered version of the sample gas from which the species has been substantially removed;an excitation light source configured to provide an amplitude modulated beam to each of the differential acoustic cells;one or more microphones mounted to each of the differential acoustic cells, and configured to measure an acoustic wave generated in the respective acoustic cell by absorption of light by sample gas therein and to produce a respective signal, the one or more microphones isolated from sample gas internal to the acoustic cells;a preamplifier configured to determine a differential signal from the signals produced for each of the differential acoustic cells; anda controller configured to calculate concentration of the species based on the differential signal. 2. The photoacoustic effect measurement instrument of claim 1, wherein the species is a species of particulate matter (PM). 3. The photoacoustic effect measurement instrument of claim 1, further comprising: a function generator configured to generate a waveform that controls the excitation light source; anda lock-in amplifier configured to receive the differential signal from the preamplifier and the waveform from the function generator, and to demodulate the waveform from the differential signal to produce a demodulated differential signal,wherein the controller is coupled to the lock-in amplifier and configured to calculate the concentration of the species based on the demodulated differential signal. 4. The photoacoustic effect measurement instrument of claim 1, wherein each of the differential acoustic cells includes an acoustic resonator and a pair of acoustic attenuators, and the preamplifier is a bandpass preamplifier that is tuned to an acoustic resonance frequency of the acoustic resonators of the differential acoustic cells. 5. The photoacoustic effect measurement instrument of claim 1, wherein the excitation light source is a diode-pumped solid state (DPSS) laser. 6. The photoacoustic effect measurement instrument of claim 1, wherein the one or more microphones mounted to each of the differential acoustic cell are an array of multiple microphones whose output signals are combined to form the signal for the differential acoustic cell. 7. The photoacoustic effect measurement instrument of claim 6, wherein the array of multiple microphones is an array of multiple membrane-based MicroElectrical-Mechanical System (MEMS) microphones mounted on a printed circuit boards (PCB). 8. The photoacoustic effect measurement instrument of claim 1, wherein the one or more microphones are mounted over an opening in each of the differential acoustic cells and are isolated from sample gas internal to the acoustic cell by a film disposed over the opening. 9. The photoacoustic effect measurement instrument of claim 1, wherein the film is an aluminized polyester film. 10. The photoacoustic effect measurement instrument of claim 1, wherein the species is black carbon soot. 11. A photoacoustic effect measurement instrument for measuring a species in a gas, comprising an acoustic cell configured to receive sample gas including the species;an excitation light source configured to provide an amplitude modulated beam to the acoustic cell;an array of multiple microphones mounted to the acoustic cell, each microphone configured to measure an acoustic wave generated in the acoustic cell by absorption of light by sample gas therein, wherein output signals from the multiple microphones of the array are combined to produce a combined signal; anda controller configured to calculate concentration of the species based on the combined signal. 12. The photoacoustic effect measurement instrument of claim 11, wherein the species is a species of particulate matter (PM). 13. The photoacoustic effect measurement instrument of claim 11, wherein the array of multiple microphones is an array of multiple membrane-based MicroElectrical-Mechanical System (MEMS) microphones mounted on a printed circuit boards (PCB). 14. The photoacoustic effect measurement instrument of claim 11, wherein the array of multiple microphones are mounted over an opening in the acoustic cell and are isolated from sample gas internal to the acoustic cell by a film disposed over the opening. 15. The photoacoustic effect measurement instrument of claim 11, further comprising: a function generator configured to generate a waveform that controls the excitation light source; anda lock-in amplifier configured to receive the combined signal and to demodulate the waveform from the combined signal to produce a demodulated signal, andwherein the controller is coupled to the lock-in amplifier and configured to calculate the concentration of the species based on the demodulated signal. 16. The photoacoustic effect measurement instrument of claim 11, wherein the excitation light source is a diode-pumped solid state (DPSS) laser. 17. A photoacoustic effect measurement instrument for measuring a species in a gas, comprising an acoustic cell configured to receive sample gas including the species, the acoustic cell including an acoustic resonator having an opening;a film mounted over the opening;an excitation light source configured to provide an amplitude modulated beam to the acoustic cell;one or more detectors mounted over the film and configured to measure an acoustic wave generated in the acoustic cell by absorption of light by sample gas therein and to produce a signal;a controller configured to calculate concentration of the species based on the signal,wherein the film isolates the one or more detectors from the sample gas internal to the acoustic cell. 18. The photoacoustic effect measurement instrument of claim 17, wherein the species is a species of particulate matter (PM). 19. The photoacoustic effect measurement instrument of claim 17, wherein the one more detectors are one or more microphones. 20. The photoacoustic effect measurement instrument of claim 19, wherein the one or more microphones are an array of multiple microphones whose output signals are combined to form the signal for the acoustic cell. 21. The photoacoustic effect measurement instrument of claim 20, wherein the array of multiple microphones is an array of multiple membrane-based MicroElectrical-Mechanical System (MEMS) microphones mounted on a printed circuit boards (PCB). 22. The photoacoustic effect measurement instrument of claim 17, further comprising: a function generator configured to generate a waveform that controls the excitation light source; anda lock-in amplifier configured to receive the combined signal and to demodulate the waveform from the combined signal to produce a demodulated signal,wherein the controller is coupled to the lock-in amplifier and configured to calculate the concentration of the species based on the demodulated signal. 23. The photoacoustic effect measurement instrument of claim 17, wherein the excitation light source is a diode-pumped solid state (DPSS) laser. 24. A method for photoacoustic measurement of a species in a gas, comprising: measuring an acoustic wave generated in a pair of differential acoustic cells exposed to a beam from an excitation light source, the pair of differential acoustic cells including a sample cell containing sample gas including the species, anda reference cell containing a filtered version of the sample gas from which the species has been substantially removed, the measuring performed by one or more detectors isolated from sample gas internal to the acoustic cells that produce a first signal for the sample cell and a second signal for the reference cell; determining a differential signal from the first signal and the second signal;calculating a concentration of the species based on differential signal; andoutputting the concentration of the species. 25. The method of claim 24, where the species is a species of particulate matter (PM). 26. The method of claim 24, wherein the beam from the excitation light source is amplitude modulated based on a waveform, and the method further comprises: demodulating the waveform from the differential signal to produce a demodulated differential signal, andwherein the calculating calculates the concentration of the species based on the demodulated differential signal. 27. The method of claim 24, wherein each of the differential acoustic cells includes an acoustic resonator and a pair of acoustic attenuators, and the method further comprises: bandpass filtering the first signal and the second signal to a resonance frequency of the acoustic resonators of the differential acoustic cells. 28. The method of claim 24, wherein the one or more detectors is an array of multiple microphones mounted to each of the differential acoustic cells, and the method further comprises: combining output signals from the microphones of each array of multiple microphones to produce the first signal and the second signal, respectively. 29. The method of claim 28, wherein each array of multiple microphones is an array of multiple membrane-based MicroElectrical-Mechanical System (MEMS) microphones mounted on a printed circuit boards (PCB). 30. The method of claim 24, wherein the one or more detectors are mounted over an opening in each of the differential acoustic cells, and the one or more detectors are isolated from sample gas internal to the acoustic cell by a film disposed over the opening.
Schaffer Arnold M. (Bartlesville OK) Favre John A. (Bartlesville OK), Photoacoustic method and apparatus for measuring intensity of electromagnetic radiation.
Kebabian,Paul L.; Freedman,Andrew, System and method for trace species detection using cavity attenuated phase shift spectroscopy with an incoherent light source.
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