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A high purity water delivery system has a reservoir (40) of purified water. A distribution line (42) extends downstream from an outlet (44) of the reservoir to a return (46) of the reservoir. A plurality of delivery stations each include an outlet (54′) and a diverter (102; 102′; 102″; 102′″). The d

A high purity water delivery system has a reservoir (40) of purified water. A distribution line (42) extends downstream from an outlet (44) of the reservoir to a return (46) of the reservoir. A plurality of delivery stations each include an outlet (54′) and a diverter (102; 102′; 102″; 102′″). The diverter has an upstream inlet port (104) along the distribution line and a downstream outlet port (106) along the distribution line. The diverter has a supply port (108) downstream of the inlet port and a return port (110) downstream of the supply port. The diverter has a flow restriction (112; 112′; 216) between the supply port and the return port. Each delivery station includes a flow control valve (56′) between the outlet on the one hand and the supply port and return port on the other hand.

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1. A high purity water delivery system comprising: a reservoir (40) of purified water;a distribution line (42) extending downstream from an outlet (44) of the reservoir to a return (46) of the reservoir; anda plurality of delivery stations, each comprising: an outlet (54′);a diverter (102; 102′; 102

1. A high purity water delivery system comprising: a reservoir (40) of purified water;a distribution line (42) extending downstream from an outlet (44) of the reservoir to a return (46) of the reservoir; anda plurality of delivery stations, each comprising: an outlet (54′);a diverter (102; 102′; 102″; 102′″) having: an upstream inlet port (104) along the distribution line;a downstream outlet port (106) along the distribution line;a supply port (108) downstream of the inlet port;a return port (110) downstream of the supply port; anda flow restriction (112; 112′; 216) between the supply port and return port; anda flow control valve (56′) between: the outlet; and the supply port and the return port. 2. The system of claim 1 wherein: for at least two of the delivery stations: the outlet is a faucet outlet; andthe flow restriction is a fixed orifice (112; 216). 3. The system of claim 2 wherein: for said at least two delivery stations: the flow restriction has an open area 40-60% of an internal area of piping of the distribution line. 4. The system of claim 3 wherein: the piping has an internal diameter of 25-60 mm. 5. The system of claim 3 wherein: the piping has an internal diameter of 40-57 mm. 6. The system of claim 2 wherein: for said at least two delivery stations: the orifice has a diameter of 30-35 mm with a piping OD of 50 mm. 7. The system of claim 2 wherein: for said at least two delivery stations: the orifice has a diameter of 35-39 mm with a piping OD of 63 mm. 8. The system of claim 2 wherein: for said at least two delivery stations: the orifice is in a polyvinylidene difluoride diverter body (212). 9. The system of claim 2 wherein: for said at least two delivery stations: the orifice is in a non-metallic diverter body (212). 10. The system of claim 1 wherein: the system is a single-line system; andfor at least one of the delivery stations: a recirculating loop (120) length is at least 2 m. 11. The system of claim 1 wherein: for at least one of the delivery stations: a recirculating loop (120) length is at least 5 m. 12. The system of claim 1 wherein: for at least two of the delivery stations: a recirculating loop (120) length is at least 5 m. 13. The system of claim 1 further comprising: a pump (48) along the distribution line for driving a recirculating flow from the reservoir outlet and returning to the reservoir return. 14. The system of claim 13 further comprising: a purification system (24) purifying water from a source (22) and delivering the purified water to the reservoir. 15. A method for retrofitting a high purity water delivery system (20) wherein the system has a system baseline configuration comprising: a reservoir (40) of purified water;a distribution line (42) extending downstream from an outlet (44) of the reservoir to a return (46) of the reservoir; anda plurality of delivery stations (50), each comprising: an outlet (54);a dead leg from the distribution line; anda flow control valve (56) between: the outlet; and distribution line, the method comprising: modifying or replacing the delivery stations to have, in a system retrofitted configuration: an outlet (54′);a diverter (102; 102′; 102″, 102′″) along the distribution line having: an upstream inlet port (104) along the distribution line;a downstream outlet port (106) along the distribution line;a supply port (108) downstream of the inlet port;a return port (110) downstream of the supply port; anda flow restriction (112; 112′; 216) between the supply port and return port; anda flow control valve (56′) between: the outlet; and the supply port and the return port. 16. The apparatus of claim 15 wherein: the modifying or replacing comprises replacing a baseline faucet (52) having the baseline flow control valve with a recirculating retrofitted faucet (52′) having the retrofitted flow control valve. 17. A method comprising: purifying water;directing a flow of the purified water downstream along a distribution line (42) extending from an outlet (44) of a reservoir the purified water to a return (46) of the reservoir; andoperating a plurality of delivery stations, each comprising: an outlet (54′); anda flow control valve (56′) between the outlet and the distribution line, the operating comprising: opening the flow control valve to deliver an outlet flow of the purified water from the outlet in an open condition; andclosing the valve to terminate the outlet flow in a closed condition, wherein: each of the delivery stations comprises: a flow restriction (112, 112′, 216) along the distribution line;a supply branch (120-1) between the flow control valve and the distribution line upstream of the flow restriction; anda return branch (120-2) between the flow control valve and the distribution line downstream of the flow restriction; andin the open condition, a branch flow passes from the distribution line, through the supply branch and returning to the distribution line through the return branch. 18. The method of claim 17 wherein: the flow control valve is a manual faucet valve. 19. The system of claim 18 wherein: for at least one of the delivery stations: a recirculating loop (120) length is at least 5 m. 20. The system of claim 17 wherein: for at least one of the delivery stations: a recirculating loop (120) length is at least 5 m.