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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0542377 (2014-11-14) |
등록번호 | US-9719727 (2017-08-01) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 0 인용 특허 : 402 |
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor ma
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
1. A method comprising: plasma vaporizing a precursor material using a first gas, thereby producing a vaporized particle-gas mixture;quenching the vaporized particle-gas mixture using a conditioning fluid comprising a second gas, thereby producing a cooled particle-gas mixture comprising a plurality
1. A method comprising: plasma vaporizing a precursor material using a first gas, thereby producing a vaporized particle-gas mixture;quenching the vaporized particle-gas mixture using a conditioning fluid comprising a second gas, thereby producing a cooled particle-gas mixture comprising a plurality of particles comprising the precursor material;removing the plurality of particles from the cooled particle-gas mixture, thereby producing a filtered output comprising the first gas and the second gas;adjusting an amount of the filtered output, thereby producing a content-controlled, filtered output;supplying the content-controlled, filtered output as the conditioning fluid for quenching the vaporized particle-gas mixture. 2. The method of claim 1, further comprising reducing pressure of the filtered output by venting a portion of the filtered output if the pressure exceeds a predetermined threshold. 3. The method of claim 1, wherein adjusting the amount of the filtered output comprises venting a portion of the filtered output. 4. The method of claim 1, wherein the filtered output has a temperature, and the method further comprises controlling the temperature of the filtered output. 5. The method of claim 1, wherein adjusting the amount of the filtered output comprises adjusting an amount of the second gas in the filtered output. 6. The method of claim 5, wherein adjusting the amount of the second gas in the filtered output comprises adding additional second gas to the filtered output. 7. The method of claim 1, wherein adjusting the amount of the filtered output comprises adjusting an amount of the first gas in the filtered output. 8. The method of claim 7, wherein adjusting the amount of first gas in the filtered output comprises adding additional first gas to the filtered output. 9. The method of claim 1, further comprising temporarily storing the filtered output before adjusting the amount of the filtered output.
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