초록 ▼

A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in

A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.

대표청구항 ▼

1. An apparatus comprising: a tunable mid-infrared (MIR) laser that generates a light beam;a specimen stage adapted to carry a specimen to be scanned, said stage moving said specimen in a first direction;an optical assembly that focuses said light beam to a point on said specimen, said optical assem

1. An apparatus comprising: a tunable mid-infrared (MIR) laser that generates a light beam;a specimen stage adapted to carry a specimen to be scanned, said stage moving said specimen in a first direction;an optical assembly that focuses said light beam to a point on said specimen, said optical assembly comprises a scanning assembly having a focusing lens that focuses said light beam to a point on said specimen and a mirror that moves in a second direction relative to said stage such that said focusing lens maintains a fixed distance between said focusing lens and said specimen stage, said first direction being different from said second direction;a first light detector that measures a first intensity of light leaving said point on said specimen;a controller that forms a MIR image from said first intensity of light; anda reference stage that is different from said specimen stage positioned such that said mirror moves over said reference stage in response to a command from said controller, whereinsaid focusing lens and said mirror move together in said second direction over said specimen stage and said reference stage. 2. The apparatus of claim 1 wherein said first direction is substantially orthogonal to second direction. 3. The apparatus of claim 1 wherein said reference stage moves in said first direction in response to a command from said controller. 4. The apparatus of claim 1 wherein said reference stage comprises a resolution target. 5. The apparatus of claim 1 wherein said reference stage comprises a plurality of samples having different known ratios of specular to diffuse reflections. 6. The apparatus of claim 1 wherein said reference stage comprises a plurality of samples having different reflectivities. 7. The apparatus of claim 1 wherein said reference stage comprises a sample of a compound having a chemical composition that matches a compound in said specimen. 8. A method for obtaining a reference sample during the scanning of a specimen, said method comprising: providing a tunable mid-infrared (MIR) laser that generates a light beam;mounting said specimen on a specimen stage adapted to move said specimen in a first direction;focusing said light beam to a point on said specimen using an optical assembly that comprises a scanning assembly having a focusing lens that focuses said light beam to a point on said specimen and a mirror that moves in a second direction relative to said specimen stage such that said focusing lens maintains a fixed distance between said focusing lens and said specimen stage, said second direction being different from said first direction;measuring light that leaves said point on said specimen to form a MIR image; and measuring light leaving a reference stage that is positioned such that said mirror moves over said reference stage in response to a command from said controller, said reference stage being different from said specimen stage, whereinsaid focusing lens and said mirror move together in said second direction over said specimen stage and said reference stage. 9. The method of claim 8 wherein said first direction is substantially orthogonal to second direction. 10. The method of claim 8 wherein said reference stage moves in said first direction in response to a command from said controller. 11. The method of claim 8 wherein said reference stage comprises a resolution target. 12. The method of claim 8 wherein said reference stage comprises a plurality of samples having different known ratios of specular to diffuse reflections. 13. The method of claim 8 wherein said reference stage comprises a plurality of samples having different reflectivities. 14. The method of claim 8 wherein said reference stage comprises a sample of a compound having a chemical composition that matches a compound in said specimen.