Sealed devices comprising transparent laser weld regions
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/00
H01L-051/52
C03C-003/12
C03C-023/00
C03C-027/06
C03C-027/08
C03B-023/203
B23K-026/20
B32B-037/06
H01L-051/00
B32B-007/04
B32B-017/06
C03C-003/14
C03C-003/16
C03C-003/23
C03C-003/247
C03C-004/00
C03C-008/24
출원번호
US-0066704
(2016-03-10)
등록번호
US-9741963
(2017-08-22)
발명자
/ 주소
Dabich, II, Leonard Charles
Logunov, Stephan Lvovich
Quesada, Mark Alejandro
Streltsov, Alexander Mikhailovich
출원인 / 주소
Corning Incorporated
대리인 / 주소
Hardee, Ryan T.
인용정보
피인용 횟수 :
0인용 특허 :
47
초록▼
Disclosed herein are sealed devices comprising a first substrate, a second substrate, an inorganic film between the first and second substrates, and at least one weld region comprising a bond between the first and second substrates. The weld region can comprise a chemical composition different from
Disclosed herein are sealed devices comprising a first substrate, a second substrate, an inorganic film between the first and second substrates, and at least one weld region comprising a bond between the first and second substrates. The weld region can comprise a chemical composition different from that of the inorganic film and the first or second substrates. The sealed devices may further comprise a stress region encompassing at least the weld region, in which a portion of the device is under a greater stress than the remaining portion of the device. Also disclosed herein are display and electronic components comprising such sealed devices.
대표청구항▼
1. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 20-100 mol % SnO,0-50 mol % SnF2, and0-30 mol % P2O5 or B2O3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first
1. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 20-100 mol % SnO,0-50 mol % SnF2, and0-30 mol % P2O5 or B2O3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate;wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein a first inorganic film element concentration of the first or second substrate in the weld region is higher than a second inorganic film element concentration of the first or second substrate outside the weld region. 2. The sealed device of claim 1, wherein the inorganic film, and optionally at least one of the first or second substrates is transmissive at wavelengths ranging from about 420 nm to about 750 nm. 3. The sealed device of claim 1, wherein the weld region is transparent. 4. The sealed device of claim 1, wherein at least one of the first or second substrates comprises a glass, glass-ceramic, ceramic, polymer, or metal. 5. The sealed device of claim 1, wherein both the first and second substrates comprise a glass or glass-ceramic. 6. The sealed device of claim 1, further comprising a second inorganic film formed over a surface of the second substrate. 7. The sealed device of claim 1, wherein the at least one inorganic film element is chosen from F, P, Sn, B, Bi, Zn, Ti, W, Ce, Nb, Pb, Fe, Va, Cr, Mn, Mg, Ge, and combinations thereof. 8. The sealed device of claim 1, wherein the first inorganic film element concentration is at least about 5 mol % higher than the second inorganic film element concentration. 9. The sealed device of claim 1, wherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region. 10. The sealed device of claim 9, wherein the at least one inorganic substrate element is chosen from Al, B, Si, Na, Li, K, Mg, Ca, Ba, and combinations thereof. 11. The sealed device of claim 9, wherein the first substrate element concentration is at least about 30 mol % higher than the second substrate element concentration. 12. The sealed device of claim 1, wherein the inorganic film has a thickness ranging from about 0.1 microns to about 10 microns. 13. The sealed device of claim 1, wherein the weld region has a thickness ranging from about 0.3 microns to about 14 microns. 14. The sealed device of claim 1, further comprising a stress region encompassing at least the weld region, wherein a first stress in the stress region is greater than a second stress outside of the stress region. 15. The sealed device of claim 14, wherein the first stress ranges from greater than about 1 MPa to about 25 MPa. 16. The sealed device of claim 14, wherein a ratio of the first stress to the second stress ranges from about 1.1:1 to about 25:1. 17. The sealed device of claim 14, wherein the stress region has a thickness ranging from about 20 microns to about 500 microns. 18. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 20-100 mol % SnO,0-50 mol % SnF2 and0-30 mol % P2O5 or B2O3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate;wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region. 19. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 20-100 mol % SnO,0-50 mol % SnF2, and0-30 mol % P2O5 or B2O3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates;wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein the weld region is enriched with the at least one inorganic substrate element as compared to a portion of the inorganic film outside of the weld region. 20. The sealed device of claim 19, wherein the weld region comprises a first inorganic substrate element concentration at least 30 mol % greater than a second inorganic substrate element concentration in the portion of the inorganic film outside of the weld region. 21. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 20-100 mol % SnO,0-50 mol % SnF2 and0-30 mol % P2O5 or B2O3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates;wherein the inorganic film comprises at least one inorganic film element;wherein the first substrate comprises a first portion in the weld region and a second portion outside of the weld region; andwherein the first portion is enriched with the at least one inorganic film element as compared to the second portion. 22. The sealed device of claim 21, wherein the first portion comprises a first inorganic film element concentration at least 5 mol % greater than a second inorganic film element concentration in the second portion. 23. The sealed device of claim 21, wherein the first portion extends from a sealing interface into the first substrate to a depth ranging from about 0.1 μm to about 2 μm. 24. The sealed device of claim 21, wherein the second substrate comprises a third portion in the weld region and a fourth portion outside of the weld region, and wherein the third portion is enriched with the at least one inorganic film element as compared to the fourth portion. 25. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 10-80 mol % B2O3, 5-60 mol % Bi2O3, and0-70 mol % ZnO;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate;wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein a first inorganic film element concentration of the first or second substrate in the weld region is higher than a second inorganic film element concentration of the first or second substrate outside the weld region. 26. The sealed device of claim 25, wherein the inorganic film, and optionally at least one of the first or second substrates is transmissive at wavelengths ranging from about 420 nm to about 750 nm. 27. The sealed device of claim 25, wherein the weld region is transparent. 28. The sealed device of claim 25, wherein at least one of the first or second substrates comprises a glass, glass-ceramic, ceramic, polymer, or metal. 29. The sealed device of claim 25, wherein both the first and second substrates comprise a glass or glass-ceramic. 30. The sealed device of claim 25, further comprising a second inorganic film formed over a surface of the second substrate. 31. The sealed device of claim 25, wherein the at least one inorganic film element is chosen from F, P, Sn, B, Bi, Zn, Ti, W, Ce, Nb, Pb, Fe, Va, Cr, Mn, Mg, Ge, and combinations thereof. 32. The sealed device of claim 25, wherein the first inorganic film element concentration is at least about 5 mol % higher than the second inorganic film element concentration. 33. The sealed device of claim 25, wherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region. 34. The sealed device of claim 33, wherein the at least one inorganic substrate element is chosen from Al, B, Si, Na, Li, K, Mg, Ca, Ba, and combinations thereof. 35. The sealed device of claim 33, wherein the first substrate element concentration is at least about 30 mol % higher than the second substrate element concentration. 36. The sealed device of claim 25, wherein the inorganic film has a thickness ranging from about 0.1 microns to about 10 microns. 37. The sealed device of claim 25, wherein the weld region has a thickness ranging from about 0.3 microns to about 14 microns. 38. The sealed device of claim 25, further comprising a stress region encompassing at least the weld region, wherein a first stress in the stress region is greater than a second stress outside of the stress region. 39. The sealed device of claim 38, wherein the first stress ranges from greater than about 1 MPa to about 25 MPa. 40. The sealed device of claim 38, wherein a ratio of the first stress to the second stress ranges from about 1.1:1 to about 25:1. 41. The sealed device of claim 38, wherein the stress region has a thickness ranging from about 20 microns to about 500 microns. 42. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 10-80 mol % B2O3, 5-60 mol % Bi2O3, and0-70 mol % ZnO;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates and extending from a first depth in the first substrate to a second depth in the second substrate;wherein the inorganic film comprises at least one inorganic film element and wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein a first substrate element concentration of the weld region is higher than a second substrate element concentration of the inorganic film outside the weld region. 43. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 10-80 mol % B2O3, 5-60 mol % Bi2O3, and0-70 mol % ZnO3;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates;wherein one or both of the first and second substrates comprises at least one inorganic substrate element; andwherein the weld region is enriched with the at least one inorganic substrate element as compared to a portion of the inorganic film outside of the weld region. 44. The sealed device of claim 43, wherein the weld region comprises a first inorganic substrate element concentration at least 30 mol % greater than a second inorganic substrate element concentration in the portion of the inorganic film outside of the weld region. 45. A sealed device comprising: an inorganic film formed over a surface of a first substrate, the inorganic film comprising: 10-80 mol % B2O3, 5-60 mol % Bi2O3, and0-70 mol % ZnO;a second substrate in contact with the inorganic film; anda weld region comprising a bond formed between the first and second substrates;wherein the inorganic film comprises at least one inorganic film element;wherein the first substrate comprises a first portion in the weld region and a second portion outside of the weld region; andwherein the first portion is enriched with the at least one inorganic film element as compared to the second portion. 46. The sealed device of claim 45, wherein the first portion comprises a first inorganic film element concentration at least 5 mol % greater than a second inorganic film element concentration in the second portion. 47. The sealed device of claim 45, wherein the first portion extends from a sealing interface into the first substrate to a depth ranging from about 0.1 μm to about 2 μm. 48. The sealed device of claim 45, wherein the second substrate comprises a third portion in the weld region and a fourth portion outside of the weld region, and wherein the third portion is enriched with the at least one inorganic film element as compared to the fourth portion.
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