[특허]Reticle pod

Reticle pod 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65D-085/48 G03F-001/66 H01L-021/673
출원번호	US-0139653 (2013-12-23)
등록번호	US-9745119 (2017-08-29)
발명자 / 주소	Kolbow, Steven P. McMullen, Kevin Tieben, Anthony M. Kusz, Matthew Halbmaier, David L. Lystad, John
출원인 / 주소	Entegris, Inc.
대리인 / 주소	Entegris, Inc. Legal Dept.
인용정보	피인용 횟수 : 0 인용 특허 : 37

초록 ▼

A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

대표청구항 ▼

1. A container for holding reticles, the reticle having a periphery, a top surface, a bottom surface, a side surface, four peripheral corners, a top edge and a bottom edge, the container comprising: an outer container sized to receive an inner container, the outer container comprising an outer cover and a door receivable within the outer cover to define an interior, wherein the inner container comprisesa base for receiving the reticle, the base having a periphery, and a top upwardly facing horizontal metal surface, the upwardly facing horizontal surface having a planar metal sealing surface extending around the base at or proximate to the periphery of said base, the base further having four pairs of posts and a rounded seating element positioned intermediate each pair of posts, the four pairs of posts and respective rounded seating element positioned therebetween defining a reticle seating position above the top upwardly facing horizontal metal surface; anda cover for engaging the top surface of the base plate along the base plate periphery, thereby defining an interior for holding the reticle, the cover having a downwardly facing horizontal planar metal sealing surface for cooperating with the planar metal sealing surface of the base to create a seal therebetween when said respective surfaces are in contact. 2. The container of claim 1 wherein the top surface of the base is continuously planar and integral from the sealing surface to below the reticle. 3. The container of claim 2 wherein the downwardly facing horizontal planar sealing surface has a nickel finish. 4. The container of claim 1 wherein the base is formed primarily of metal. 5. The container of claim 1 wherein the cover comprises a plurality of vertically moveable members positioned in a plurality of apertures in the cover, the members positioned to engage the reticle. 6. The container of claim 5 wherein the each of the moveable reticle members are resiliently positioned in the cover. 7. The container of claim 1 wherein the cover comprises a plurality of vertically moveable members positioned in the cover, the vertically movable members positioned to engage the reticle and are actuatable externally with respect to the cover. 8. The container of claim 1 wherein the top surface of the base and the downwardly facing horizontal planar metal sealing surface of the cover each have a surface finish with a roughness average (RA) of up to 0.50 micro inches. 9. The container of claim 1 wherein the top surface of the base and the downwardly facing horizontal planar metal sealing surface of the cover each have a surface finish with a roughness average (RA) of between 0.20-0.40 micro inches. 10. The container of claim 1 wherein the outer cover includes a plurality of resilient members extending downwardly on an inside surface of said outer cover, and wherein said resilient members engage the top cover of the container. 11. The container of claim 1 wherein the top cover is primarily formed of a polymer and the sealing surface of the top cover is part of a metal ring secured to said polymer.

이 특허에 인용된 특허 (37)

Kirkpatrick, John, Apparatus and method for securely carrying a substrate.
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Shaw Charles G. (San Antonio TX) Vokoun ; III Edward R. (Boerne TX), Box for an optical stepper reticle.
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Nakazato Hiroshi (Yokohama JPX) Nakamura Gen (Yokohama JPX) Yoshinari Satoshi (Yokohama JPX), Container for a plate-like article.
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Kosugi Masao (Yokohama JPX) Iizuka Kazuo (Yokohama JPX), Container for a sheet-like article.
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Abrams Robert S. (Albany NY) Supranowicz Ronald P. (Lenox MA), Container for a wafer chip.
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Abe Nobutoshi (Kawasaki JPX) Kakizaki Yukio (Yokohama JPX) Kobayashi Jiro (Yamato JPX), Container for holding substrate.
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Hirohata Tatsuaki,JPX ; Betsuyaku Takashi,JPX, Container for transporting precision substrates.
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Nakazato Hiroshi (Ohme JPX) Iijima Mamoru (Yokohama JPX), Dust-proof container having improved construction for holding a reticle therein.
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Phillips, Alton H.; Sogard, Michael R.; Watson, Douglas C., EUV reticle handling system and method.
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Phillips,Alton H.; Sogard,Michael R.; Watson,Douglas C., EUV reticle handling system and method.
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Cheng Dong-Hsu,TWX ; Liaw Yung Haw,TWX ; Juang Deng-Guey,TWX, Electrostatic discharge-free container equipped with metal shield.
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Li Meng Chun,TWX, Electrostatic discharge-free container for insulating articles.
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Halbmaier,David L.; Simpson,Anthony; Goodwin,William M.; Kishkovich,Oleg P.; Kielbaso,Thomas B.; Manganiello,Frank, Environmental control in a reticle SMIF pod.
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Blank, Richard M.; Burkhart, Christopher W., Flatted object passive aligner.
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Durben, Joseph A.; Rider, Gavin Charles; Lindsley, Robert K., High cleanliness article transport system.
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Chiu,Ming Chien, Holder of photomask.
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Grohrock Peter (Hoehenkirchen-Siegertsb DEX), Lockable container for transporting and for storing semiconductor wafers.
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Lenox, Richard J., Method and apparatus for kinematic registration of a reticle.
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Elliott,Martin R.; Rice,Michael Robert; Lowrance,Robert B.; Hudgens,Jeffrey C.; Englhardt,Eric Andrew; Stuart,Loy Randall, Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing.
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Lewis Lynn Armentrout, Photolithography system including a SMIF pod and reticle library cassette designed for ESD protection.
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Johnson,Michael L.; Rauworth,Barry L., Photomask container.
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Hart Robert Allison (Gardner MA) Plourde Richard Harry (Gardner MA), Probe card shipping and handling system.
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Tieben, Anthony Mathius; Halbmeier, David L.; Kolbow, Steven P., Purge system for a substrate container.
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Wiseman,Brian; Strike,Justin, Reticle carrier including reticle positioning and location means.
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Nakazato Hiroshi (Ohme JPX) Iijima Mamoru (Yokohama JPX), Reticle cassette.
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Kolbow, Steven P.; McMullen, Kevin; Tieben, Anthony Mathius; Kusz, Matthew; Andersen, Christian; Wang, Huaping; Cisewski, Michael; Johnson, Michael L.; Halbmaier, David L.; Lystad, John, Reticle pod.
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Su, Wei-Yu; Tern, Li-Kong; Cheng, Dong-Hsu, Reticle pod and reticle with cut areas.
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Gregerson, Barry; Halbmaier, David; Sumner, Stephen; Wiseman, Brian; Tieben, Anthony Mathius; Strike, Justin, Reticle pod with isolation system.
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Okubo, Yukiharu; Kikuchi, Hidekazu, Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same.
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Shelton Gary R. (Greentown IN) Street Kyle R. (Kokomo IN), Rotary clip for solder pallet.
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Fosnight William J. ; Martin Raymond S. ; Shenk Joshua W. ; Wartenbergh Robert P., SMIF container including a reticle support structure.
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Fujimori Yoshiaki,JPX ; Takahashi Masato,JPX ; Kamada Toshiyuki,JPX, Storage container for precision substrates.
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Yamauchi Takashi (Tokyo JPX), Substrate holding case.
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del Puerto, Santiago; Loopstra, Erik R.; Massar, Andrew; Kish, Duane P.; Alikhan, Abdullah; Olson, Woodrow J.; Feroce, Jonathan H., System for using a two part cover for protecting a reticle.
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Pylant, James D.; Bradley, Scott C., Wafer storage container with wafer positioning posts.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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연합인증

Reticle pod 원문보기

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이 특허에 인용된 특허 (37)

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