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Wafer carrier with a 31-pocket configuration 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • 13-03
출원번호 US-0522214 (2015-03-27)
등록번호 US-D793972 (2017-08-08)
발명자 / 주소
  • Krishnan, Sandeep
  • Moy, Keng
출원인 / 주소
  • Veeco Instruments Inc.
대리인 / 주소
    Patterson Thuente Pedersen, P.A.
인용정보 피인용 횟수 : 3  인용 특허 : 178

초록

초록이 없습니다.

대표청구항

We claim the ornamental design for a wafer carrier with a 31-pocket configuration, as shown and described.

이 특허에 인용된 특허 (178)

  1. Chan, Sik Leung, Air cleaner.
  2. Yoo, Joonggil; Lee, Sangyoon; So, Ilseop; Suh, Eugene; Ha, Jeewook, Air cleaner.
  3. Bu, Minhyouk; Yoon, Sanghun; Jo, Cheolyeon; Choi, Jaewon, Air conditioner.
  4. McPhilliamy, Stephen J.; Belton, Antonio J.; White, Jr., John S., Air filtration device.
  5. McPhilliamy, Stephen J.; Belton, Antonio J.; White, Jr., John S., Air filtration device.
  6. Mann, Peter Allen, Air purifier.
  7. Morris, III, James M., Airflow screen.
  8. Vadim Boguslavskiy ; Alexander Gurary ; Ameesh Patel ; Jeffrey Ramer, Apparatus and method for controlling temperature uniformity of substrates.
  9. Yi-Sen Chang TW; Hsien-Shu Tsai TW, Apparatus and method for mounting a wafer in a polishing machine.
  10. Seah, Boon Meng; Zhang, Bei Chao; Joy, Raymond; Law, Shao Beng; Sudijono, John; Hsia, Liang Choo, Apparatus and methods for cleaning and drying of wafers.
  11. Scherrer Raymond E. (West Palm Beach FL), Apparatus for lapping or polishing materials.
  12. Sharma, Rajat; Felker, Andrew; Houck, William D., Array of triangular semiconductor dice.
  13. Hashimoto Hiromasa,JPX ; Kasai Kenji,JPX ; Ichikawa Taichi,JPX ; Kawaura Yuji,JPX, Backing pad and method for polishing semiconductor wafer therewith.
  14. Matsumoto, Naoki; Yoshikawa, Jun, Baffle plate.
  15. Toft, Uffe Kjaergaard, Base for mounting element and moving head for a light fixture.
  16. Taylor John Crawshaw,GB4, Base part for a liquid heating vessel.
  17. Berkman, Peter D.; Malaker, Michael; Pischke, Jeffrey Jon, Bath fan with speaker.
  18. Wolff, Gary, Bird and large insect vent cap for exhaust pipes for high efficiency furnaces.
  19. Dempster, James; Maynard, Jason, Boat for use in a material deposition apparatus.
  20. Wilson, Jr., Rodney A., Body of a horizontal blower fan.
  21. Wilson, Jr., Rodney A., Body of a horizontal blower fan.
  22. Wilson, Jr., Rodney A., Body of a vertical blower fan.
  23. Bass Victor J. ; Vines Landon, CMP pad conditioner arrangement and method therefor.
  24. Torrison, Miriam; Cunningham, John; DeJong, Scott, Carbonated beverage cap liner.
  25. Torrison, Miriam; Cunningham, John; DeJong, Scott, Carbonated beverage cap liner.
  26. Torrison, Miriam; Cunningham, John; DeJong, Scott, Carbonated beverage cap liner.
  27. Torrison, Miriam; Cunningham, John; DeJong, Scott, Carbonated beverage cap liner.
  28. Torrison, Miriam; Cunningham, John; DeJong, Scott, Carbonated beverage cap liner.
  29. Weaver, II, Edward L.; Snyder, Thomas M.; Bisek, Patrick E.; Gramza, Beth E.; Julian, Dominic J.; Hinds, Sherry A., Case for a tablet electronic device.
  30. Campbell, Glennbruce S., Ceiling fan motor housing.
  31. Chen Shu-Chin,TWX, Ceiling fan motor housing.
  32. Nguyen, Phuong Van, Chemical mechanical polishing pad and dresser.
  33. Chen, Bishou; Chu, Huer; Feng, Na; Cheng, Wanmei, Chessboard shaped LED lamp.
  34. Sakata, Clinton, Chuck carrier film.
  35. Cockburn, Kevin Thomas, Closure for conduits for cables.
  36. Knox William W. (Mentor OH), Coin bank.
  37. Wood,Gary; Wood,Rod, Coin display folder.
  38. Gajewski, Mark, Combination ceiling fan and light fixture.
  39. Castro Marco G. (7051 SW. 129th Ave. #5 Miami FL 33183) Castro Erwin J. (15605 SW. 74th Circle Dr. Apt. 3 Miami FL 33193), Combined ventilated toilet seat and cover.
  40. Chen,Liang Yuh; Wang,Yuchun; Wang,Yan; Duboust,Alain; Carl,Daniel A.; Wadensweiler,Ralph; Birang,Manoocher; Butterfield,Paul D.; Mavliev,Rashid; Tsai,Stan D., Conductive polishing article for electrochemical mechanical polishing.
  41. Mayer, Steven T.; Porter, David W., Control of electrolyte hydrodynamics for efficient mass transfer during electroplating.
  42. Chen, Donny; Li, Frederick; Shen, Franklin, Cufflink.
  43. Sellers Kathleen R. (228 East Boca Raton Blvd. Boca Raton FL 33432), Cushioned furniture protector.
  44. McDonald,William Justin; Mentry,Marc William; Orsi,Pamela Ledwidge, Data card.
  45. Peterson Robert T. (3333 N. Marshfield Ave. Chicago IL 60657), Dial face for electronic timepiece.
  46. Graebner John Edwin (Short Hills NJ) Jin Sungho (Millington NJ) Kammlott Guenther Wilhelm (Watchung NJ) Zhu Wei (North Plainfield NJ), Diamond polishing method and apparatus employing oxygen-emitting medium.
  47. Namiki, Keisuke; Yasuda, Hozumi; Nabeya, Osamu; Fukushima, Makoto; Togashi, Shingo; Yamaki, Satoru; Watanabe, Katsuhide, Elastic membrane for semiconductor wafer polishing apparatus.
  48. Vosch, Michael J.; Downey, Benjamin M., Electrode patch array.
  49. Vosch, Michael J.; Downey, Benjamin M., Electrode patch array.
  50. Kuwabara, Yusei; Nagakubo, Keiichi, Electrode plate for a plasma processing apparatus.
  51. Akana, Jody; Andre, Bartley K.; Aoyagi, Shota; Ashcroft, Anthony Michael; Bataillou, Jeremy; Coster, Daniel J.; De Iuliis, Daniele; Hankey, M. Evans; Hoenig, Julian; Howarth, Richard P.; Ive, Jonathan P.; Kerr, Duncan Robert; Rohrbach, Matthew Dean; Russell-Clarke, Peter; Shaffer, Benjamin Andrew; Silvanto, Mikael; Stringer, Christopher J.; Whang, Eugene Antony; Zörkendörfer, Rico, Electronic device.
  52. Nishi, Hiroyuki; Inagaki, Yoji, Electronic percussion instrument.
  53. Mayer, Steven T.; Porter, David; Rash, Robert, Electroplating flow shaping plate having offset spiral hole pattern.
  54. Sugimoto, Hiroya, Electrostatic chuck.
  55. Volf, Boris; Rashkovsky, Yuliy, Enhanced wafer carrier.
  56. Yang, Tzu-Ching; Chang, Chung-Ying, Epitaxial growth systems.
  57. Huang, Hao-Yu, Essential oil diffuser.
  58. Stewart, Neil Andrew; Hodgetts, Joseph Eric; Garner, Leanne Joyce; Gammack, Peter David, Fan.
  59. Chen Lee, Yeh, Fan forced heater.
  60. Berkman, Peter D.; Zhang, Ruilin; Pischke, Jeffrey Jon; Malaker, Michael, Fan grille.
  61. Xiao, Li-Hui; Chen, Te-Fu; Lin, Yu-Liang; Lei, Tsung-Yu; Lin, Kuo-Cheng, Fan housing.
  62. Xiao, Li-Hui; Chen, Te-Fu; Lin, Yu-Liang; Lei, Tsung-Yu; Lin, Kuo-Cheng, Fan housing.
  63. Gailen, Robert, Feeding platter for pets.
  64. McGregor Anderson D. ; Digges ; Jr. Thomas G., Flatness and throughput of single side polishing of wafers.
  65. Secard, Joe, Floating solar heating device.
  66. Sawchuk, Daniel A.; Selirio, Reginald, Flow conditioner.
  67. Sawchuk, Daniel A.; Selirio, Reginald, Flow conditioner.
  68. Sawchuk, Daniel; Selirio, Reginald, Flow conditioner.
  69. Sawchuk, Daniel A.; Selirio, Reginald, Flow conditioner with internal vanes.
  70. Green Richard D., Flower vase.
  71. Preisler, Victor, Gas burner.
  72. Nicholson, Egerton Roy; Nicholson, Carolyn Evelyn; Pawluski, Victoria, Gel pack.
  73. Ferrari, Marco Sixtus; Wood, Todd Andrew; Zhu, Min; Fahrendorff, Anders; Yu, Michael Xingyi; de Jong, Janice Leigh; Moore, Shannon Tyler, Handheld electronic device skin.
  74. Blateri, Frank, Heater fan.
  75. Dempster, James; Maynard, Jason, Hexcell channel arrangement for use in a boat for a deposition apparatus.
  76. Buzanowski, Mark A.; Hall, Iain Stuart; Crawford, Richard B., High surface area ash removal screen.
  77. Ramljak Vinko (16950 Merriman Rd. Livonia MI 48154), Holder for crayons, markers, pencils and the like.
  78. Kimpara, Naoya, Infrared oil heater.
  79. Kaneko, Hirofumi; Endo, Atsushi, Inner tube for process tube for manufacturing semiconductor wafers.
  80. Musk, Jenniffer Lewin, Interactive artwork display.
  81. Krishnan, Sandeep; Moy, Keng; Gurary, Alexander I.; King, Matthew; Boguslavskiy, Vadim; Krommenhoek, Steven, Keyed wafer carrier.
  82. Baran, Adam; Rupprath, Bernhard, LED approach light.
  83. Mackin, Michael P.; Herling, Robert J., LED dock light head.
  84. Harrington, Jr., Robert T., LED spot lamp.
  85. Clifford, Scott; Brundula, Steven N. D., LED strobe light with integrated magnet and heat sink chimney.
  86. Harder, Gary, Laminar flow swim spa jet.
  87. Lin, Chu-Keng; Yang, Sung-Hsiang; Yeh, Wei-Chun, Lens cover for LED lamp.
  88. Toft, Uffe Kjaergaard, Lens of a lighting fixture.
  89. Mori, Yoshinobu; Okabe, Akira, Lid for epitaxial growing device.
  90. Chen, Kuo-Ching; Chien, Chien-Hsuan, Light emitting diode module.
  91. Egawa,Kazuo, Light emitting diode module.
  92. Yang, Hwi Seok; Kim, Chul Ju, Light emitting diode module for LED lighting.
  93. Silver,Remy, Light fixture.
  94. Sukumoda Katsuyuki (Itabashi-ku JPX) Okonogi Tatsuya (Itabashi-ku JPX) Yoshikawa Yukio (Itabashi-ku JPX), Light-emitting diode indicator.
  95. Oh, Kyung Seob; Lee, Min Sang; Lee, Tae Hong, Light-emitting diode module.
  96. Glass, Benjamin W., Lighter-than-air craft for energy-producing turbines.
  97. Feigenbaum, Marvin, Lighting device.
  98. Feigenbaum, Marvin, Lighting device.
  99. Feigenbaum, Marvin, Lighting device.
  100. Benensohn, Sanford H., Lighting fixture.
  101. Benensohn, Sanford H., Lighting fixture.
  102. Salm, Markus, Lights.
  103. Jackson, Nicholas, Magnetic drawer divider piece.
  104. Young, Matthew Pinner; Preiss, Andrew Richard, Metal tongue drum.
  105. Guoqiang David Zhang ; Yun-Biao Xin ; Henry F. Erk, Method and apparatus for a wafer carrier having an insert.
  106. Nguyen, Phuong Van, Method and apparatus for polishing silicon wafers.
  107. Grabbe, Alexis; Bjelopavlic, Mick; Hull, Ashley S.; Haler, Michele L.; Zhang, Guoqiang (David); Erk, Henry F.; Xin, Yun-Biao, Method and apparatus for processing a semiconductor wafer using novel final polishing method.
  108. Nakazato Yasuaki (Koushoku JPX) Ogawara Hiroo (Nagano JPX), Method of polishing semiconductor wafer.
  109. Nakazima Yukio (Nagano JPX) Kuroyanagi Itsuo (Chiba-ken JPX), Method of polishing wafers, a backing pad used therein, and method of making the backing pad.
  110. Bhattacharya, Abhijeet, Mobile personal device.
  111. Evans, Thomas, Motion alarm.
  112. Windstrup, Sonny; Jonsson, Karl; Micko, Eric Scott, Motion sensor.
  113. Toft, Uffe Kjaergaard, Moving head for a light fixture.
  114. Tanaka, Yokichi J., Multi-electrode holder.
  115. Krishnan, Sandeep; Moy, Keng; Gurary, Alexander I.; King, Matthew; Boguslavskiy, Vadim; Krommenhoek, Steven, Multi-keyed wafer carrier.
  116. Gibson, Karen Theresa; Gibson, John, Musical steel pan with drum sticks.
  117. Ishikawa, Tetsuya; Chen, Liang-Yuh, Non-circular substrate holders.
  118. Jungwirth, Douglas Ralph, Optical filtering system for solar cell testing.
  119. Sip, Kim-Yeung; Chu, Yung-Hung; Tang, Yu-Hao, PCB for arranging LED lights.
  120. Petsch, Carsten, Pad arrangement of a circuit module.
  121. Heine, Daniel, Passover humidifier.
  122. Maushard, Jerry P; Waterfield, L. Glenn, Piezoelectric actuator device.
  123. Lee, Jeong Ho; Jeong, Sang Jin; Kim, Woo Chan, Plasma inducing plate for semiconductor deposition apparatus.
  124. Nguyen, Phuong Van, Polishing holder for silicon wafers and method of use thereof.
  125. Kitta Satoru (Nagano JPX) Furukawa Masanori (Nagano JPX), Polishing machine and a method of polishing a work.
  126. Männle, Ferdinand; Beylich, Jest; Hauge, Roger; Simon, Christian; Kleppe, Emil Arne; Larsen, Aage Gellein; Röseth, Kaare Roger, Polymer composition.
  127. Rochelle Tolar, Portable battery-powered neck fan.
  128. Fowler, David, Portable energy storage and power supply device.
  129. Gatton James W. (P.O. Box 27 ; State Rte. 97 ; West Bellville OH 44813), Portable outdoor fireplace.
  130. Wenski, Guido; Heier, Gerhard; Winkler, Wolfgang; Altmann, Thomas, Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process.
  131. Urata Masafumi (San Jose CA) Shirogaki Katsuya (Sunnyvale CA), Reactor for epitaxial growth.
  132. Yoshinobu, Masayuki; Higuchi, Kazunari; Moriyama, Takayoshi; Hashimoto, Sumio, Recessed lighting fixture.
  133. Blomberg, David M.; Dwyer, Gary E.; Raines, III, Carl W.; Schulz, Mark W., Respirator mask having a communication grille.
  134. Hugh B. Carr, Roller hearth reheat furnace tire.
  135. Akana, Jody; Anderson, Molly; Andre, Bartley K.; Aoyagi, Shota; Ashcroft, Anthony Michael; Bataillou, Jeremy; Coster, Daniel J.; De Iuliis, Daniele; Gorman, Michael; Hankey, M. Evans; Heirakuji, Russell John Kaaihue; Hoenig, Julian; Howarth, Richard P.; Ive, Jonathan P.; Kerr, Duncan Robert; Russell-Clarke, Peter; Schwalbach, Charles A.; Shaffer, Benjamin Andrew; Silvanto, Mikael; Stringer, Christopher J.; Tissandier, Clement; Whang, Eugene Antony; Yang, Sheng; Zörkendörfer, Rico, Security attachment.
  136. Hasapoglou,Nicholas Steven, Seed catcher for birdfeeders.
  137. Feng, Jingbin; Stowell, Marshall, Segmented electroplating anode and anode segment.
  138. Chang, Chenghung Paul; Moy, Keng; Gurary, Alexander I., Self-cleaning shutter for CVD reactor.
  139. Toyoshima, Shigenori, Semiconductor module for power conversion.
  140. Goela, Jitendra S.; Pickering, Michael A.; Fahey, James T.; Strickland, Melinda S., Semiconductor processing.
  141. Desai Ankur H. (St. Peters MO) Wisnieski Michael S. (O\Fallon MO) Golland David I. (Chesterfield MO), Semiconductor wafer polisher and method.
  142. Flynn, Greg; Richards, Benjamin C., Semiconductor wafer with dicing positions for solar cell fabrication.
  143. Pendleton, Bruce, Shelf.
  144. Genord,Daniel S.; Daunter,Dominic J.; Giggs,Julian; Miller,Michael, Showerhead.
  145. Nguyen, Phuong Van; Tran, Thang Van, Silicon carbide, sapphire, germanium, silicon and pattern wafer polishing templates holder.
  146. Nguyen, Phuong Van, Silicon wafer polisher.
  147. Park, Soonhyun; Shin, Cheolwoong; Kim, Hongsik; Min, Jinki; Song, Seunghwan; Yi, Byunghyun; Cha, Jiyoun, Smart key for automobiles.
  148. Utley ; Jr. James E. (228 Day St. Tallahassee FL 32304), Solar powered roof vent fan.
  149. Lee, Jeong Ho; Jeong, Sang Jin; Jung, Dong Rak, Substrate support for a semiconductor deposition apparatus.
  150. Choi, Seung Woo; Noh, Hyung Wook; Woo, Jeong Jun; Kim, Dae Youn; Jang, Hyun Soo, Substrate supporter for semiconductor deposition apparatus.
  151. Jang, Hyun Soo; Kim, Dae Youn; Lee, Jeong Ho; Lee, Seung Seob; Kwon, Hak Yong, Substrate supporter for semiconductor deposition apparatus.
  152. Nakamura,Akihiko; Miyanari,Atsushi; Inao,Yoshihiro, Supporting plate.
  153. Nakamura,Akihiko; Miyanari,Atsushi; Inao,Yoshihiro, Supporting plate.
  154. Erlich, Guy; Elmaleh, Jonathan, Surface ornamentation for a passive solar heating article.
  155. Ogata Kazuro (Omura JPX) Iwanaga Kazuhisa (Takagi-machi JPX), Susceptor for an epitaxial growth apparatus.
  156. Wegger, Emil; Mayer, Markus J.; Reyes, Fabio; Jepsen, Claus; Ross, Nick, Suspended luminaire.
  157. Hirsch Jeffrey G. (701 NW. 40th St. Oklahoma City OK 73118) Hirsch Regina S. (701 NW. 40th St. Oklahoma City OK 73118), Terracotta pot insert.
  158. Saulnier, Christian R.; Gasque, James G.; Gallardo, Manuel A., Test plate for ceramic surface mount devices and other electronic components.
  159. Mansueto, David; Jones, David; Bean, Angus; Mundy, Kevin Brian, Thermostat/hub for climate control and monitoring.
  160. Buzzelli, Lisa Christine, Tiered floral centerpiece.
  161. Yamagishi, Takayuki; Sato, Kazuo; Tsuji, Naoto, Top plate.
  162. Nepple, Jeffrey Brian; Ingalls, Zachary Adam; Davis, Matthew A.; Grierson, Dean, Trapezoidal luminaire.
  163. LeVan Kenneth R. (Kintnersville PA), Tray for flower pots or the like.
  164. Takahashi, Tamami, Vacuum contact pad.
  165. Takemi Masayoshi,JPX ; Ohkura Yuji,JPX, Vapor-phase growth apparatus and compound semiconductor device fabricated thereby.
  166. Bjelopavlic,Mick; Grabbe,Alexis; Haler,Michele; Ragan,Tracy M., Wafer carrier.
  167. Chang, Chung-Ying; Yang, Tzu-Ching, Wafer carrier.
  168. Chang, Chung-Ying; Yang, Tzu-Ching; Chang, Chia-Sheng, Wafer carrier.
  169. Boguslavskiy,Vadim; Gurary,Alex; Stall,Richard A., Wafer carrier for growing GaN wafers.
  170. Gurary, Alexander I.; Moy, Keng; Chang, Chenghung Paul, Wafer carrier having pockets.
  171. Gurary, Alexander I.; Moy, Keng; Chang, Chenghung Paul, Wafer carrier having pockets.
  172. Gurary, Alexander I.; Moy, Keng; Chang, Paul, Wafer carrier having pockets.
  173. Gurary, Alexander I.; Moy, Keng; Chang, Paul, Wafer carrier having pockets.
  174. Krishnan, Sandeep; Moy, Keng, Wafer carrier having pockets.
  175. Gurary, Alexander; Deshpande, Mandar; Parekh, Aniruddh; Rashkovsky, Yuliy, Wafer carrier with a multi-pocket configuration.
  176. Gurary Alexander I. ; Beherrell Scott ; Boguslavskiy Vadim, Wafer carrier with flexible wafer flat holder.
  177. Morisaki, Eisuke; Machiyama, Wataru; Kobayashi, Hirokatsu; Harashima, Masayuki; Sano, Yukio, Wafer holder for manufacturing semiconductor.
  178. Tamaso, Hideto, Wafer holder for stepper.

이 특허를 인용한 특허 (3)

  1. Finn, Brian, Coin card device.
  2. Wall, Timothy Eli; Green, Christopher, Electronic device.
  3. Wall, Timothy Eli; Green, Christopher, Electronic device.
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