[특허]Peeling apparatus and stack manufacturing apparatus

Peeling apparatus and stack manufacturing apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B32B-043/00 B32B-038/10 B32B-037/12 H01L-051/56 H01L-027/32 H01L-051/52 B32B-037/00 B32B-037/26 H01L-051/00
출원번호	US-0248579 (2016-08-26)
등록번호	US-9770894 (2017-09-26)
우선권정보	JP-2013-249751 (2013-12-03); JP-2014-159799 (2014-08-05)
발명자 / 주소	Ohno, Masakatsu Adachi, Hiroki Idojiri, Satoru Takeshima, Koichi
출원인 / 주소	SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
대리인 / 주소	Nixon Peabody LLP
인용정보	피인용 횟수 : 0 인용 특허 : 23

초록 ▼

The yield of a peeling process is improved. A peeling apparatus includes a structure body with a convex surface and a stage with a supporting surface which faces the convex surface. The structure body can hold a first member of a process member between the convex surface and the supporting surface. The stage can hold a second member of the process member. The radius of curvature of the convex surface is less than the radius of curvature of the supporting surface. The linear velocity of the convex surface is greater than or equal to the speed of a rotation center of the structure body passing the stage. The first member is wound along the convex surface to be separated from the second member.

대표청구항 ▼

1. A stack manufacturing apparatus comprising: a first supply unit configured to supply a process member comprising a first member and a second member;a separation unit configured to separate the first member from the second member; anda bonding unit configured to bond the first member and a support body with a bonding layer,wherein the separation unit comprises: a stage configured to hold the process member; anda roller over the stage, andwherein the roller rotates so that the first member is separated from the second member and rolled up by the roller, andwherein one of the stage and the roller does not move when the other of the stage and the roller moves. 2. The stack manufacturing apparatus according to claim 1, further comprising a second supply unit configured to supply the support body. 3. The stack manufacturing apparatus according to claim 1, further comprising an unloading unit configured to unload a stack comprising the first member, the bonding layer, and the support body. 4. The stack manufacturing apparatus according to claim 1, further comprising a transfer mechanism configured to transfer the first member. 5. The stack manufacturing apparatus according to claim 1, wherein a radius of curvature of the roller is greater than or equal to 100 mm and less than or equal to 500 mm. 6. The stack manufacturing apparatus according to claim 1, wherein the separation unit further comprises: a guide having a groove, wherein the guide extends in a movement direction of the roller; anda liquid feeding unit configured to feed liquid to an opening portion of the first member, andwherein the groove supports a rotation axis of the roller. 7. The stack manufacturing apparatus according to claim 6, wherein a distance between a curved surface of the roller and one surface of the stage is controlled by a position where the groove is provided in the guide. 8. The stack manufacturing apparatus according to claim 6, wherein the liquid is pure water. 9. A stack manufacturing apparatus comprising: a first supply unit configured to supply a process member comprising a first member and a second member;a separation unit configured to separate the first member from the second member; anda bonding unit configured to bond the first member and a support body with a bonding layer,wherein the separation unit comprises: a stage configured to hold the process member; anda roller over the stage, andwherein the roller rotates so that the first member is separated from the second member and rolled up by the roller,wherein one of the stage and the roller does not move when the other of the stage and the roller moves,wherein the first member comprises at least a peeled layer, andwherein the second member comprises at least a separation layer. 10. The stack manufacturing apparatus according to claim 9, further comprising a second supply unit configured to supply the support body. 11. The stack manufacturing apparatus according to claim 9, further comprising an unloading unit configured to unload a stack comprising the first member, the bonding layer, and the support body. 12. The stack manufacturing apparatus according to claim 9, further comprising a transfer mechanism configured to transfer the first member. 13. The stack manufacturing apparatus according to claim 9, wherein a radius of curvature of the roller is greater than or equal to 100 mm and less than or equal to 500 mm. 14. The stack manufacturing apparatus according to claim 9, wherein the separation unit further comprises: a guide having a groove, wherein the guide extends in a movement direction of the roller; anda liquid feeding unit configured to feed liquid to an opening portion of the first member, andwherein the groove supports a rotation axis of the roller. 15. The stack manufacturing apparatus according to claim 14, wherein a distance between a curved surface of the roller and one surface of the stage is controlled by a position where the groove is provided in the guide. 16. The stack manufacturing apparatus according to claim 14, wherein the liquid is pure water.

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