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Method of forming a cleanspace fabricator

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/677
  • B01L-001/04
  • H01L-021/67
출원번호 US-0024335 (2013-09-11)
등록번호 US-9793146 (2017-10-17)
발명자 / 주소
  • Flitsch, Frederick A.
출원인 / 주소
  • Futrfab, Inc.
대리인 / 주소
    Kincart, Joseph P.
인용정보 피인용 횟수 : 0  인용 특허 : 89

초록

A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics ar

대표청구항

1. A method of forming a fab comprising the steps of: forming a tube of rectangular cross-section formed by a plurality of planar walls, wherein a primary cleanspace is located within the tube;providing an air source to flow air through the primary cleanspace in a predetermined uni-direction between

이 특허에 인용된 특허 (89)

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