[특허]System and method for providing vibration isolation by magnetic levitation

System and method for providing vibration isolation by magnetic levitation 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H02K-007/09 H02N-015/00 H01F-007/06 H01F-007/20 G03F-007/20
출원번호	US-0676224 (2015-04-01)
등록번호	US-9837939 (2017-12-05)
발명자 / 주소	Hughes, John G. Higgins, Thomas E. Griffin, Jr., Lloyd Daniel
출원인 / 주소	LOCKHEED MARTIN CORPORATION
대리인 / 주소	Sanks, Esquire, Terry M.
인용정보	피인용 횟수 : 0 인용 특허 : 27

초록

A magnetic levitation system comprising a control system configured to control six degrees of freedom of a levitated object, wherein each degree of freedom has at least a third order roll off. Another system and a method are also disclosed.

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1. A magnetic levitation system comprising a control subsystem comprising configured to control six degrees of freedom of a levitated object wherein each degree of freedom has at least a fifth order roll off, wherein the control subsystem comprises a plurality of actuators located around the object. 2. The system as set forth in claim 1, wherein at least one of the plurality of actuators comprises a coil isolator. 3. The system as set forth in claim 1, wherein the at least fifth order roll off is up to a ninth order roll off for at least one degree of freedom of the six degrees of freedom. 4. The system as set forth in claim 1, wherein the control subsystem further comprises a plurality of sensors with at least one respective sensor in relationship with at least one actuator of the plurality of actuators. 5. The system as set forth in claim 4, wherein each one of the plurality of sensors is configured to provide feedback regarding at least one respective degree of freedom of the six degrees of freedom. 6. The system as set forth in claim 1, wherein control of each individual degree of freedom of the six degrees of freedom is accomplished independent of any other degrees of freedom of the six degrees of freedom and simultaneously with the other degrees of freedom of the six degrees of freedom. 7. The system as set forth in claim 1, wherein the control subsystem comprises a high gain/high bandwidth current loop configured to eliminate vibration coupling with back electromagnetic field experienced during levitation. 8. A system, comprising: a magnetic levitation subsystem;an assembly configured to levitate using the magnetic levitation in six degrees of freedom;at least one sensor configured to determine displacement of the assembly during levitation in each degree of freedom; anda controller configured to stabilize the assembly to at least a third order roll off for each degree of freedom. 9. The system as set forth in claim 8, wherein the at least third order roll off is up to a ninth order roll off for at least one degree of freedom of the six degrees of freedom. 10. The system as set forth in claim 8, wherein the assembly further comprises at least one motor assembly configured to produce force to magnetically levitate the assembly. 11. The system as set forth in claim 8, wherein the assembly further comprises at least one sensor target positioned with respect to the at least one sensor to be used by the at least one sensor to provide feedback regarding at position in each degree of freedom of the six degrees of freedom. 12. The system as set forth in claim 8, wherein the controller independently and simultaneously controls the six degrees of freedom of the assembly. 13. The system as set forth in claim 9, wherein the controller comprises a plurality of compensators having a plurality of filters configured to provide for at least a ninth order roll off for each degree of freedom. 14. The system as set forth in claim 8, wherein the controller comprises a six degree of freedom position calculator to establish a position feedback factor for each degree of freedom. 15. The system as set forth in claim 8, wherein the position calculator comprises at least one filter that is configured relative to a physical characteristic of the magnetic levitation subsystem. 16. The system as set forth in claim 8, wherein the controller comprises a high gain/high bandwidth current loop configured to eliminate vibration experienced during levitation. 17. The system as set forth in claim 8, wherein the magnetic levitation subsystem comprises at least one actuator that further comprises a coil isolator. 18. A method, comprising: magnetically levitating an object with at least one actuator; andcontrolling six degrees of freedom, of the object with each degree of freedom having at least a fifth order roll off while levitated with a controller, wherein the controller comprises a plurality of actuators located around the object. 19. The method as set forth in claim 18, further comprising providing feedback regarding each degree of freedom, with at least one sensor, to the controller. 20. The method as set forth in claim 18, further comprising compensating for a change in at least one degree of freedom to maintain the object at a nearly constant levitated position with the controller. 21. The method as set forth in claim 18, wherein controlling the six degrees of freedom further comprises controlling each individual degree of freedom of the six degrees of freedom independent of the other degrees of freedom of the six degrees of freedom and simultaneously with the other degrees of freedom of the six degrees of freedom.

이 특허에 인용된 특허 (27)

Shinji Wakui JP, Active vibration isolation device and its control method.
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van Namen Frederik T. (Danville CA), Actuator for active vibration control.
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Korenaga,Nobushige, Alignment apparatus and exposure apparatus using the same.
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Korenaga,Nobushige, Anti-vibration technique.
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Trumper David L. (Concord NC), Bearing for use in high resolution precision control device.
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Smith, Stuart T.; Woody, Shane C.; Seugling, Richard M., Closed loop control systems employing relaxor ferroelectric actuators.
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Jacot A. Dean (Kent WA) Hamilton Brian J. (Glendale AZ) Cunningham David C. (Carefree AZ) Davis L. Porter (Phoenix AZ), Dual mode vibration isolator.
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Ruckman, Christopher E.; Holford, John M., Electromagnetic active vibration control system and electromagnetic actuator.
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Hoag David G. (Medway MA), Electromagnetic isolator/actuator system.
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Kienholz, David A., Hybrid pneumatic-magnetic isolator-actuator.
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Shibata Masayuki (Hitachi JPX) Maki Naoki (Toukai JPX) Saitoh Toshio (Hitachi JPX) Kobayashi Takashi (Hitachi JPX) Takizawa Teruhiro (Hitachi JPX) Sonobe Tadasi (Iwaki JPX) Tsujimoto Shizuo (Hitachi , Levitation system of a magnetically levitated train.
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Laughlin Darren (Albuquerque NM), Linear actuator control system for platform stabilization.
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Galburt,Daniel N.; Kochersperger,Peter C., Lithographic tool with dual isolation system and method for configuring the same.
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Shimanovich Michael ; Caudill Reggie J. ; Chang Timothy N. ; Ji Zhiming, Low friction, high precision actuator.
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Kendig John R. (Peoria AZ) Hibble William R. (Phoenix AZ) Kiedrowski James A. (Phoenix AZ), Magnetic isolating and pointing gimbal apparatus.
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Trumper, David; Cuff, David, Magnetic micropositioner and method of providing the same.
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Trumper David L. (Concord NC), Magnetic positioning device.
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Silcox Richard J. (Poquoson VA) Fuller Chris R. (Hampton VA) Gibbs Gary P. (Chesapeake VA), Method and apparatus for minimizing multiple degree of freedom vibration transmission between two regions of a structure.
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VanBiervliet, Filip, Method to control the movements of a flight simulator and flight simulator implementing such method.
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Williams, Mark; Phillips, Alton H., Monolithic stage devices providing motion in six degrees of freedom.
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Junkins John L. ; Hughes Delcan ; Schaub Hanspeter, Noncontact position and orientation measurement system and method.
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Fujiwara Shunsuke (Tokyo JPX) Jizo Yoshihiro (Amagasaki JPX) Akagi Hidenari (Amagasaki JPX), Propulsion system for magnetically levitated vehicle.
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Jacques, Robert N.; Warkentin, David J., Vibration control utilizing signal detrending.
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Fujita, Etsunori; Enoki, Yoshimi; Oshimo, Hiroki, Vibration damping apparatus using magnetic circuit.
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Watanabe Katsuhide (Kanagawa JPX) Kanemitu Yoichi (Kanagawa JPX) Ikeda Yukio (Tokyo JPX), Vibration eliminating apparatus for elminating vibration of an installation floor.
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Hayashi Yutaka,JPX, Vibration isolator and method of isolating vibration.
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Forward Robert L. (Oxnard CA) Griffin William S. (Manhattan Beach CA), Wideband electromagnetic damping of vibrating structures.
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